Role of Nitrogen Incorporation into Hf-Based High-kGate Dielectrics for Termination of Local Current Leakage Paths
2005 ◽
Vol 44
(No. 43)
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pp. L1333-L1336
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2019 ◽
Vol 58
(5)
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pp. 050918
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Keyword(s):
2019 ◽
Vol 775
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pp. 1301-1306
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Keyword(s):
1987 ◽
Vol 1
(4)
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pp. 326-329
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Keyword(s):
2011 ◽
Vol 467
(2133)
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pp. 2534-2560
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