A Method to Characterize n[sup +]-Polysilicon/Oxide Interface Traps in Ultrathin Oxides

2001 ◽  
Vol 4 (6) ◽  
pp. G47 ◽  
Author(s):  
Kow Ming Chang ◽  
Yuan Hung Chung ◽  
Tzyk Cheang Lee ◽  
Yong Long Sun
2021 ◽  
pp. 2100074
Author(s):  
Livia Janice Widiapradja ◽  
Taewook Nam ◽  
Yeonsu Jeong ◽  
Hye‐Jin Jin ◽  
Yangjin Lee ◽  
...  

1996 ◽  
Vol 43 (7) ◽  
pp. 1144-1152 ◽  
Author(s):  
H.-H. Vuong ◽  
C.S. Rafferty ◽  
S.A. Eshraghi ◽  
J.L. Lentz ◽  
P.M. Zeitzoff ◽  
...  

2012 ◽  
Vol 1439 ◽  
pp. 101-107
Author(s):  
Guillaume Rosaz ◽  
Bassem Salem ◽  
Nicolas Pauc ◽  
Pascal Gentile ◽  
Priyanka Periwal ◽  
...  

ABSTRACTThe authors present the technological routes used to build planar and vertical gate all-around (GAA) field-effect transistors (FETs) using both Si and SiGe nanowires (NWs) and the electrical performances of the as-obtained components. Planar FETs are characterized in back gate configuration and exhibit good behavior such as an ION/IOFF ratio up to 106. Hysteretic behavior and sub-threshold slope values with respect to surface and oxide interface trap densities are discussed. Vertical devices using Si NWs show good characteristics at the state of the art with ION/IOFF ratio close to 106 and sub-threshold slope around 125 mV/decade while vertical SiGe devices also obtained with the same technological processes, present an ION/IOFF ratio from 103 to 104but with poor dynamics which can be explained by the high interface traps density.


2015 ◽  
Vol 2015 ◽  
pp. 1-14
Author(s):  
Zhi Jiang ◽  
Yiqi Zhuang ◽  
Cong Li ◽  
Ping Wang ◽  
Yuqi Liu

We demonstrate the impact of semiconductor/oxide interface traps (ITs) on the DC and AC characteristics of tunnel field-effect transistors (TFETs). Using the Sentaurus simulation tools, we show the impacts of trap density distribution and trap type on the n-type double gate- (DG-) TFET. The results show that the donor-type and acceptor-type ITs have the great influence on DC characteristic at midgap. Donor-like and acceptor-like ITs have different mechanism of the turn-on characteristics. The flat band shift changes obviously and differently in the AC analysis, which results in contrast of peak shift of Miller capacitorCgdfor n-type TFETs with donor-like and acceptor-like ITs.


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