Highly Sensitive InOxOzone Sensing Films on Flexible Substrates

InOxthin films with a thickness of the order of 100 nm were grown by dc magnetron sputtering on glass, Si and flexible (PET) substrates. The electrical conductivity ofInOxthin films exhibited a change of two orders of magnitude during photoreduction with ultraviolet light and subsequent oxidation in ozone concentrations from 2370 to 15 ppb, at room temperature. Optical transparency of over 85% for all substrates was maintained. Film structural and ozone sensing properties were analyzed. Surface morphology investigations carried out by SEM for films on PET substrates showed extended surface cracking for bending angles beyond40∘. Optimization of growth conditions has led to films with extremely low detection levels for ozone down to 15 ppb at room temperature, demonstrating the wide prospective of utilizing these metal oxides as gas sensors on flexible substrates for a variety of automotive and air-conditioning applications.

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Ultraviolet light-emitting diode-assisted highly sensitive room temperature NO2 gas sensor for low-temperature solution-processed ZnO/TiO2 nanorods decorated with plasmonic Au nanoparticles

Nanoscale ◽

10.1039/d1nr01001h ◽

2021 ◽

Author(s):

Soon-Hwan Kwon ◽

Tae-Hyeon Kim ◽

Sang-Min Kim ◽

Semi Oh ◽

Kyoung-Kook Kim

Keyword(s):

Gas Sensors ◽

High Performance ◽

Room Temperature ◽

Au Nanoparticles ◽

Light Emitting Diode ◽

Light Emitting ◽

No2 Gas Sensor ◽

Highly Sensitive ◽

Temperature Solution ◽

Semiconducting Metal Oxides

Nanostructured semiconducting metal oxides such as SnO2, ZnO, TiO2, and CuO have been widely used to fabricate high performance gas sensors. To improve the sensitivity and stability of gas sensors,...

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A tunable volatile organic compound sensor by using PtOx/GQDs/TiO2 nanocomposite thin films at room temperature under visible-light activation

RSC Advances ◽

10.1039/c7ra07478f ◽

2017 ◽

Vol 7 (63) ◽

pp. 39859-39868 ◽

Cited By ~ 3

Author(s):

Shaofeng Shao ◽

Yunyun Chen ◽

Shenbei Huang ◽

Fan Jiang ◽

Yunfei Wang ◽

...

Keyword(s):

Thin Film ◽

Thin Films ◽

Visible Light ◽

Gas Sensors ◽

Room Temperature ◽

Light Activation ◽

Nanocomposite Thin Film ◽

Nanocomposite Thin Films ◽

Volatile Organic ◽

Visible Light Activation

Pt/GQDs/TiO2 nanocomposite thin film-based gas sensors show tunable VOC sensing behaviour at room temperature under visible-light activation.

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Thermal annealing induced multiple phase in V/V2O5 alternating multilayer structure

International Journal of Modern Physics B ◽

10.1142/s0217979216502106 ◽

2016 ◽

Vol 30 (27) ◽

pp. 1650210 ◽

Cited By ~ 7

Author(s):

B. Ilahi ◽

M. Abdel-Rahman ◽

Z. Zaaboub ◽

M. F. Zia ◽

M. Alduraibi ◽

...

Keyword(s):

Thin Films ◽

Thermal Annealing ◽

Oxygen Diffusion ◽

Multilayer Structure ◽

Room Temperature ◽

Optical And Electrical Properties ◽

Film Resistance ◽

Dc Magnetron Sputtering ◽

Temperature Coefficient Of Resistance ◽

Multiple Phase

In this paper, we report on microstructural, optical and electrical properties of alternating multilayer of vanadium pentoxide (V2O5), 25 nm, and vanadium (V), 5 nm, thin films deposited at room temperature by radio frequency (RF) and DC magnetron sputtering, respectively. Raman and photoluminescence (PL) spectroscopy have been employed to investigate the effects of thermal annealing for 20, 30 and 40 min at 400[Formula: see text]C in Nitrogen (N2) atmosphere on the multiple phase formation and its impact on the film resistance and temperature coefficient of resistance (TCR). We demonstrate that the oxygen free annealing environment allows the formation of multiple phases including V2O5, V6O[Formula: see text] and VO2 through oxygen diffusion and consequent deficiency in V2O5 layer.

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