The preparation and tribological characteristics of a phosphorylated 3-aminopropyltriethoxysilane self-assembled nanometre film
Thin films deposited on a phosphonate 3-aminopropyltriethoxysilane (APTES) self- assembled monolayer (SAM) were prepared on a hydroxylated silicon substrate by self-assembling. The chemical compositions and the chemical state of the film elements were determined by X-ray photoelectron spectrometry. The thickness of the films was determined with an ellipsometer, while the morphologies and nanotribological properties of the samples were analysed by atomic force microscopy. As a result, the target film was obtained. It was also found that the thin films showed the lowest friction and adhesion, followed by APTES—SAM and phosphorylated APTES—SAM, while the silicon substrate showed the highest friction and adhesion. Microscale scratch/wear studies clearly showed that thin films were much more scratch/wear resistant than the other samples.