ABSTRACTDetection at room temperature of near and medium infrared radiation has been achieved by using micro-doped or micro-compensated amorphous silicon films as intermediate absorber layer in a p-n junction. Extremely low dopant concentrations in the gas mixture have been utilized to achieve micro-doping and micro-compensation. Device operation is based on transitions, induced by the infrared radiation, between extended states in the valence band and defects in the forbidden gap. The absorption process changes electron defect occupancy, giving rise to change in electric field distribution. This effect can be observed as variation of differential capacitance of the structure. Capacitance measurements, performed on two different devices with micro-doped and micro-compensated absorber layer respectively, showed sensitivity to radiation from 900 nm up to 4·5 jim.
Room-temperature long-wave infrared detector with thin double layers of amorphous germanium and amorphous silicon
