scholarly journals Preparation of boron nitride thin films by N2-Ar plasma jet

1996 ◽  
Vol 116 (6) ◽  
pp. 566-567
Author(s):  
Yasushi Takakura ◽  
Shigeru Ono ◽  
Shinriki Teii
Keyword(s):  
Thin Films ◽  
Boron Nitride ◽  
Plasma Jet ◽  
Ar Plasma

Trajectory effect on the properties of large area ZnO thin films deposited by atmospheric pressure plasma jet

2014 ◽  
Vol 314 ◽  
pp. 1074-1081 ◽  
Author(s):  
Jia-Yang Juang ◽  
Tung-Sheng Chou ◽  
Hsin-Tien Lin ◽  
Yuan-Fang Chou ◽  
Chih-Chiang Weng
Keyword(s):  
Thin Films ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Zno Thin Films ◽  
Atmospheric Pressure Plasma Jet ◽  
Large Area ◽  
Pressure Plasma

Ion implantation induced phase transformation in carbon and boron nitride thin films

2005 ◽  
Vol 14 (8) ◽  
pp. 1395-1401 ◽  
Author(s):  
T.W.H. Oates ◽  
L. Ryves ◽  
F.A. Burgmann ◽  
B. Abendroth ◽  
M.M.M. Bilek ◽  
...  
Keyword(s):  
Thin Films ◽  
Phase Transformation ◽  
Boron Nitride ◽  
Ion Implantation

Etching mechanism of MgO thin films in inductively coupled Cl2∕Ar plasma

2004 ◽  
Vol 22 (5) ◽  
pp. 2101-2106 ◽  
Author(s):  
A. M. Efremov ◽  
Seong-Mo Koo ◽  
Dong-Pyo Kim ◽  
Kyoung-Tae Kim ◽  
Chang-Il Kim
Keyword(s):  
Thin Films ◽  
Inductively Coupled ◽  
Etching Mechanism ◽  
Ar Plasma

Utilization of cathodic arc evaporation for the deposition of boron nitride thin films

1997 ◽  
Vol 90 (1-2) ◽  
pp. 178-183 ◽  
Author(s):  
F. Richter ◽  
G. Krannich ◽  
J. Hahn ◽  
R. Pintaske ◽  
M. Friedrich ◽  
...  
Keyword(s):  
Thin Films ◽  
Boron Nitride ◽  
Cathodic Arc Evaporation ◽  
Arc Evaporation ◽  
Cathodic Arc

Piezoresistive granular metal thin films of platinum–boron nitride and platinum–alumina at higher strain levels

2018 ◽  
Vol 124 (23) ◽  
pp. 235308 ◽  
Author(s):  
Silvan Schwebke ◽  
Steffen Winter ◽  
Marcus Koch ◽  
Günter Schultes
Keyword(s):  
Thin Films ◽  
Boron Nitride ◽  
Metal Thin Films

Dry etching characteristics of (Ba0.6,Sr0.4)TiO3 thin films in high density CF4/Ar plasma

2003 ◽  
Vol 171 (1-3) ◽  
pp. 273-279 ◽  
Author(s):  
Pil-Seung Kang ◽  
Kyoung-Tae Kim ◽  
Dong-Pyo Kim ◽  
Chang-Il Kim ◽  
Alexander M. Efremov
Keyword(s):  
Thin Films ◽  
Dry Etching ◽  
High Density ◽  
Ar Plasma

Effect of gas flow on transport of O (3Pj) atoms produced in ac power excited non-equilibrium atmospheric-pressure O2/Ar plasma jet

2013 ◽  
Vol 46 (46) ◽  
pp. 464006 ◽  
Author(s):  
Keigo Takeda ◽  
Masanori Kato ◽  
Fengdong Jia ◽  
Kenji Ishikawa ◽  
Hiroyuki Kano ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Gas Flow ◽  
Plasma Jet ◽  
Ac Power ◽  
Ar Plasma ◽  
Non Equilibrium
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