Formation of TiSi2 on nitrogen ion implanted (001)Si

1999 ◽  
Vol 14 (1) ◽  
pp. 213-221 ◽  
Author(s):  
S. L. Cheng ◽  
L. J. Chen ◽  
B. Y. Tsui
Keyword(s):  
Ion Implantation ◽  
Deep Submicron ◽  
Nitrogen Ion Implantation ◽  
Low Resistivity ◽  
Submicron Devices ◽  
Shallow Junctions ◽  
Nitrogen Ion ◽  
Ion Implanted

Formation of TiSi2 on nitrogen ion implanted (001)Si has been investigated. Nitrogen ion implantation was found to suppress the B and As diffusion in silicon. For Ti on 30 keV BF2+−20 keV N2+ and 30 keV As+−20 keV N2+ implanted samples, a continuous low-resistivity TiSi2 layer was found to form in all samples annealed at 700–900 °C. For Ti on 1 ×1015/cm2 N2+ 1- and As+ implanted samples, end-of-range defects were completely eliminated in all samples annealed at 700–900 °C. The results indicated that with appropriate control, N+-implantation can be successfully implemented in forming low-resistivity TiSi2 contacts on shallow junctions in deep submicron devices.

Quantitative Ruthenium Method for Analysis of Nitrogen Ion-Implanted Titanium Alloy (Ti-6AI-4V) and the Effect on Bacterial Adherence

1991 ◽  
Vol 252 ◽  
Author(s):  
Beverly L. Giammara ◽  
James M. Williams ◽  
David J. Birch ◽  
Joanne J. Dobbins
Keyword(s):  
Pseudomonas Aeruginosa ◽  
Titanium Alloy ◽  
Ion Implantation ◽  
Growth Period ◽  
Scattered Electron ◽  
Nitrogen Ion Implantation ◽  
Total Fluence ◽  
Nitrogen Ion ◽  
Electron Imaging ◽  
Ion Implanted

ABSTRACTThe effects of nitrogen ion implantation of Ti-6AI-4V alloy on growth of Pseudomonas aeruginosa bacteria on surfaces of the alloy have been investigated. Results for ion implanted samples were compared with controls with similarly smoothly polished surfaces and with controls that had intentionally roughened surfaces. The test consisted of exposing sterile alloy samples to a microbiological broth, to which 24 hour-old cultures of Pseudomonas aeruginosa had been added. After bioassociation at normal temperature 37°C, bacteria adhering to the surface were fixed and treated with a new ruthenium tetroxide staining method, and quantified by use of scanning electron microscopy (SEM), back-scattered electron imaging and EDAX energy dispersive microanalysis. For smooth samples of the alloy, after a 12 hour growth period, the retained bacteria (revealed by the biologically incorporated ruthenium), decreased monotonically with nitrogen dose out to a total fluence of approximately 7 × 1017/cm2 in an affected depth of approximately 0.1500 μm. The SEM confirmed that the Pseudomonas aeruginosa adhered equally to control materials. The ruthenium studies revealed that the amount of bacterial adhesion is indirectly proportional to the nitrogen ion implantation of the titanium. The greater the percentage of nitrogen ion implantation in the titanium alloy, the less bacteria colonized the disk.

Ultra-Microhardness Tests on Ion Implanted Metal Surfaces

1981 ◽  
Vol 7 ◽  
Author(s):  
J.B. Pethica ◽  
W.C. Oliver
Keyword(s):  
Mechanical Properties ◽  
Ion Implantation ◽  
Metal Surfaces ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion ◽  
High Doses ◽  
Penetration Depths ◽  
Ion Implanted

ABSTRACTTo measure the mechanical properties of ion implanted layers special microhardness tests with penetration depths less than 100 nm have been made. The results show that increases in hardness of up to 50 % may occur in a number of metals as a result of nitrogen ion implantation. Considerable carbon is also present in the implanted surfaces and when in the form of a distinct layer, may give an apparent softening of surfaces at high doses.

Wear and Friction of Nitrogen Ion Implanted Steel

1983 ◽  
Vol 105 (2) ◽  
pp. 239-244 ◽  
Author(s):  
J. A. Kirk ◽  
G. W. Egerton ◽  
B. D. Sartwell
Keyword(s):  
Stainless Steel ◽  
Ion Implantation ◽  
Wear Behavior ◽  
304 Stainless Steel ◽  
Nitrogen Ion Implantation ◽  
Wide Range ◽  
Wear And Friction ◽  
Nitrogen Ion ◽  
Contact Pressures ◽  
Ion Implanted

A pin on disk wear test apparatus was used to evaluate wear and friction properties for nitrogen ion implanted and non-ion implanted steel disks in the presence of a lubricant. Both AISI/1018 mild steel and 304 stainless steel were examined. Typical fluence levels for ion implantation were above 1017 ions/cm2. In this paper disk wear is measured directly by a Talysurf profilometer tracing of the disk wear scar. By varying the contact area of the pin it was possible to evaluate wear behavior of both unimplanted and implanted disks over a wide range of contact pressures. It is shown that stainless steel disk wear can be decreased by nitrogen ion implantation, provided that contact pressures remain less than the yield strength of the substrate material. No significant wear improvements were observed for 1018 steel. To evaluate improvements in hardness due to nitrogen ion implantation, very low penetration depth microhardness measurements were made and the indentation diagonals were measured in a scanning electron microscope. These results and their limitations are also presented.

Effects of nitrogen ion implantation on the formation of nickel silicide contacts on shallow junctions

1999 ◽  
Vol 355-356 ◽  
pp. 412-416 ◽  
Author(s):  
L.W Cheng ◽  
S.L Cheng ◽  
J.Y Chen ◽  
L.J Chen ◽  
B.Y Tsui
Keyword(s):  
Ion Implantation ◽  
Nickel Silicide ◽  
Nitrogen Ion Implantation ◽  
Shallow Junctions ◽  
Nitrogen Ion

The Effect of Nitrogen Ion Implantation on the Abrasive Wear Resistance of the Ti-6Al-4V/UHMWPE Couple

1985 ◽  
Vol 55 ◽  
Author(s):  
Frank D. Matthews ◽  
Keith W. Greer ◽  
Douglas L. Armstrong
Keyword(s):  
Wear Resistance ◽  
Ion Implantation ◽  
Abrasive Wear ◽  
Gravimetric Analysis ◽  
Cobalt Chromium ◽  
Nitrogen Ion Implantation ◽  
Significant Difference ◽  
Pin On Disc ◽  
Nitrogen Ion ◽  
Ion Implanted

ABSTRACTNitrogen ion implantation was investigated as a means of improving the wear resistance of Ti-6Al-4V alloy and the performance of the Ti-6Al-4V/ultra high molecular weight polyethylene (UHMWPE) wear couple. Included in the pin-on-disc wear study were cobalt-chromium and stainless steel controls as well as non-ion-implanted Ti-6Al-4V. Ion implanted Ti-6Al-4V and the control alloys exhibited minor scratching whereas non-ion-implanted Ti-6AI-4V exhibited definite wear scars. Gravimetric analysis of the UHMWPE discs revealed no significant difference between those worn against ion implanted Ti-6Al-4V and the control alloys. Discs worn against non-ionimplanted Ti-6Al-4V, however, exhibited significantly more weight loss than the other couples. The results of this testing indicate that nitrogen ion implantation improves the wear resistance of Ti-6Al-4V with an attendant decrease in the amount of polyethylene abrasive wear.

Impact of nitrogen ion-implantation on deep submicron SALICIDE process

1997 ◽  
Author(s):  
Chong W. Lim ◽  
Syamal Lahiri ◽  
C. H. Tung ◽  
Sang M. Wong ◽  
Kong H. Lee ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Deep Submicron ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion

scholarly journals Effect of Nitrogen Ion Implantation on the Cavitation Erosion Resistance and Cobalt-Based Solid Solution Phase Transformations of HIPed Stellite 6

Materials ◽  
2021 ◽  
Vol 14 (9) ◽  
pp. 2324
Author(s):  
Mirosław Szala ◽  
Dariusz Chocyk ◽  
Anna Skic ◽  
Mariusz Kamiński ◽  
Wojciech Macek ◽  
...  
Keyword(s):  
Plastic Deformation ◽  
Stainless Steel ◽  
Ion Implantation ◽  
Phase Transformations ◽  
Erosion Rate ◽  
Cavitation Erosion ◽  
Matrix Phase ◽  
Nitrogen Ion Implantation ◽  
Stellite 6 ◽  
Nitrogen Ion

From the wide range of engineering materials traditional Stellite 6 (cobalt alloy) exhibits excellent resistance to cavitation erosion (CE). Nonetheless, the influence of ion implantation of cobalt alloys on the CE behaviour has not been completely clarified by the literature. Thus, this work investigates the effect of nitrogen ion implantation (NII) of HIPed Stellite 6 on the improvement of resistance to CE. Finally, the cobalt-rich matrix phase transformations due to both NII and cavitation load were studied. The CE resistance of stellites ion-implanted by 120 keV N+ ions two fluences: 5 × 1016 cm−2 and 1 × 1017 cm−2 were comparatively analysed with the unimplanted stellite and AISI 304 stainless steel. CE tests were conducted according to ASTM G32 with stationary specimen method. Erosion rate curves and mean depth of erosion confirm that the nitrogen-implanted HIPed Stellite 6 two times exceeds the resistance to CE than unimplanted stellite, and has almost ten times higher CE reference than stainless steel. The X-ray diffraction (XRD) confirms that NII of HIPed Stellite 6 favours transformation of the ε(hcp) to γ(fcc) structure. Unimplanted stellite ε-rich matrix is less prone to plastic deformation than γ and consequently, increase of γ phase effectively holds carbides in cobalt matrix and prevents Cr7C3 debonding. This phenomenon elongates three times the CE incubation stage, slows erosion rate and mitigates the material loss. Metastable γ structure formed by ion implantation consumes the cavitation load for work-hardening and γ → ε martensitic transformation. In further CE stages, phases transform as for unimplanted alloy namely, the cavitation-inducted recovery process, removal of strain, dislocations resulting in increase of γ phase. The CE mechanism was investigated using a surface profilometer, atomic force microscopy, SEM-EDS and XRD. HIPed Stellite 6 wear behaviour relies on the plastic deformation of cobalt matrix, starting at Cr7C3/matrix interfaces. Once the Cr7C3 particles lose from the matrix restrain, they debond from matrix and are removed from the material. Carbides detachment creates cavitation pits which initiate cracks propagation through cobalt matrix, that leads to loss of matrix phase and as a result the CE proceeds with a detachment of massive chunk of materials.

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