Experimental, analytical, and finite element analyses of nanoindentation of multilayer PZT/Pt/SiO2 thin film systems on silicon wafers

2006 ◽  
Vol 21 (2) ◽  
pp. 409-419 ◽  
Author(s):  
C. Chima-Okereke ◽  
A.J. Bushby ◽  
M.J. Reece ◽  
R.W. Whatmore ◽  
Q. Zhang
Keyword(s):  
Finite Element ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Indentation Modulus ◽  
Mems Devices ◽  
Element Analysis ◽  
Multilayer Systems ◽  
Sio2 Thin Film ◽  
Promising Tool ◽  
Zirconate Titanate

The mechanical properties of lead zirconate titanate (PZT) multilayer systems are needed to model and design micro-electromechanical systems (MEMS) devices. Nanoindentation is a promising tool for obtaining the elastic properties of thin films. However, no means exist to obtain the elastic modulus of the lead zirconate titanate (PZT) in the multilayer system. The indentation modulus versus a/t behavior of the multilayered PZT/Pt/SiO2 film system on a silicon substrate was investigated and compared with finite element models and a new analytical solution. Six different PZT film thicknesses were indented (100, 140, 400, 700, 1500, and 2000 nm), using 5-, 10-, and 20-μm radius indenters. Good agreement was shown between the finite element analysis (FEA) and analytical solutions, and the experimental data. However the behavior of multilayer systems is complex, making deconvolution of properties difficult for films of less than a micron thick.

Nanoindentation of multilayer PZT/Pt/SiO2 thin film systems on silicon wafers for MEMS applications.

2004 ◽  
Vol 841 ◽  
Author(s):  
C. Chima-Okereke ◽  
M. J. Reece ◽  
A. J. Bushby ◽  
R. W. Whatmore ◽  
Q. Zhang
Keyword(s):  
Experimental Data ◽  
Indentation Modulus ◽  
Mems Devices ◽  
Film Properties ◽  
Multilayer Systems ◽  
Sio2 Thin Film ◽  
Promising Tool ◽  
Pzt Film ◽  
Wafer Substrate ◽  
Good Agreement

ABSTRACTNanoindentation is a promising tool for obtaining the elastic properties of thin films. However, no means exists to predict or extrapolate the elastic modulus of the top layer in multilayer systems from experimental data. The mechanical properties of PZT multilayer systems have become increasingly important in applications for MEMS devices. The indentation modulus vs. a/t behaviour of PZT on Pt/SiO2/Si wafer substrate was investigated and compared with a new analytical solution for Herztian indentation of multilayers. Five different PZT film thicknesses were indented (70, 140, 400, 700, 1500 nm), using a 10 μm radius indenter. Good agreement was found between analytical equations and experimental data. However the behaviour of the multilayer system was complex. This makes the deconvolution of film properties difficult for thicknesses less than about 1000 nm.

Piezoelectric Properties of Lead Zirconate Titanate Films Prepared by Arc Discharged Reactive Ion-Plating Method

2005 ◽  
Vol 902 ◽  
Author(s):  
Masahiro Akamatsu ◽  
Yoshiaki Yasuda ◽  
Masanao Tani ◽  
Takashi Iijima
Keyword(s):  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Plasma Deposition ◽  
Lead Zirconate ◽  
Deposition Method ◽  
Mems Devices ◽  
Ion Plating ◽  
Zirconate Titanate ◽  
Plating Method ◽  
Piezoelectric Films

AbstractThis study is about new plasma deposition method fabricating piezoelectric films applied for actuators in MEMS devices.

scholarly journals Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings

Coatings ◽  
2021 ◽  
Vol 11 (8) ◽  
pp. 944
Author(s):  
Youcao Ma ◽  
Jian Song ◽  
Xubo Wang ◽  
Yue Liu ◽  
Jia Zhou
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Influential Factors ◽  
Mems Devices ◽  
Large Area ◽  
Pzt Thin Films ◽  
Synthesis Parameters ◽  
Zirconate Titanate

Compared to aluminum nitride (AlN) with simple stoichiometry, lead zirconate titanate thin films (PZT) are the other promising candidate in advanced micro-electro-mechanical system (MEMS) devices due to their excellent piezoelectric and dielectric properties. The fabrication of PZT thin films with a large area is challenging but in urgent demand. Therefore, it is necessary to establish the relationships between synthesis parameters and specific properties. Compared to sol-gel and pulsed laser deposition techniques, this review highlights a magnetron sputtering technique owing to its high feasibility and controllability. In this review, we survey the microstructural characteristics of PZT thin films, as well as synthesis parameters (such as substrate, deposition temperature, gas atmosphere, and annealing temperature, etc.) and functional proper-ties (such as dielectric, piezoelectric, and ferroelectric, etc). The dependence of these influential factors is particularly emphasized in this review, which could provide experimental guidance for researchers to acquire PZT thin films with expected properties by a magnetron sputtering technique.

scholarly journals Effects of Added Mass on Lead-Zirconate-Titanate Thin-Film Microactuators in Aqueous Environments

2016 ◽  
Vol 138 (6) ◽  
Author(s):  
Chuan Luo ◽  
W. C. Tai ◽  
Cheng-Wei Yang ◽  
G. Z. Cao ◽  
I. Y. Shen
Keyword(s):  
Thin Film ◽  
Finite Element ◽  
Natural Frequency ◽  
Lead Zirconate Titanate ◽  
Laser Doppler Vibrometer ◽  
Lead Zirconate ◽  
Added Mass ◽  
Surrounding Water ◽  
Zirconate Titanate ◽  
Pzt Thin Film

In this paper, we conduct experimental, theoretical, and numerical studies of a lead-zirconate-titanate (PZT) thin-film microactuator probe submerged in water. The major component of the actuator is a PZT diaphragm anchored on four silicon sidewalls. There is also silicon residue at the juncture of the diaphragm and the sidewalls due to imperfect etching processes. In the experimental study, frequency response functions of actuator displacement are measured via a laser Doppler vibrometer and a spectrum analyzer. The measurements show that the first natural frequency of the microactuator reduces from 80 kHz in air to 20 kHz when the microactuator is submerged in water. A viable explanation is that the surrounding water induces significant added mass to the microactuator. Estimation of the added mass based on theories in fluid mechanics successfully reconciles the predicted frequency to the vicinity of 20 kHz confirming the effects of added mass. Finite element models are also created to study how the silicon sidewalls and residue affect the added mass. Simulations show that presence of the sidewalls or residue would modify the fluid flow thus altering the added mass and natural frequency. In general, the finite element predictions agree well with the experimental measurements within 10% difference.

Finite Element Analysis of Zirconate Titanate Ceramics Piezoelectric Effect

2013 ◽  
Vol 401-403 ◽  
pp. 623-626
Author(s):  
Xiang Xin Qiao ◽  
Feng Yu ◽  
Zhi He Liu
Keyword(s):  
Finite Element ◽  
Ceramic Material ◽  
Lead Zirconate Titanate ◽  
Output Voltage ◽  
Piezoelectric Effect ◽  
Piezoelectric Materials ◽  
Mechanical Energy ◽  
Element Analysis ◽  
Zirconate Titanate ◽  
The Relationship

The ceramic material of lead zirconate titanate has positive piezoelectric effect; Its mechanical energy can be converted to electrical energy. Finite element model is established for piezoelectric ceramic material, in addition that the transition between force and electric is simulated numerically by the analysis function of force-electric coupling field of ANSYS. We obtain the relationship between output voltage and external force, besides the relationship between different heights and the output voltage within the piezoelectric model. It indicates that pressure is proportional to the output voltage value, and it verifies the correctness of theoretical analysis. These provide a reference for the project application of piezoelectric materials.

Fabrication and Resonance Characteristics of PZT Cantilevers

2021 ◽  
Vol 23 (5) ◽  
pp. 255-260
Author(s):  
V.F. Lukichev ◽  
◽  
I.I. Amirov ◽  
I.V. Uvarov ◽  
Kamran Keshavarzdivkolaee ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Lead Zirconate Titanate ◽  
Sacrificial Layer ◽  
Lead Zirconate ◽  
Mems Devices ◽  
Zirconate Titanate ◽  
Mems Resonators ◽  
Chemical Solutions ◽  
Output Characteristics

Thin films of lead zirconate titanate Pb(Zr0,52Ti0,48)O3 (PZT) with thickness of 1.4 μm were prepared on Si/SiO2/TiO2/Pt substrates by chemical solutions deposition. Based on the obtained films, the structures of PZT cantilevers were formed, with a length from 500 to 1000 /um and wide from 100 to 500 μm. Platinum (100 nm) as the bottom and top electrode, has been deposited by magnetron sputtering. PZT cantilevers werereleased by etching the sacrificial layer in SF6. The resonance characteristics of the PZT cantilevers were determined by the light lever method using a special optical measuring stand. Output characteristics of the PZT cantilevers, can be used in MEMS devices, specially, in MEMS resonators.

Convergent-bceam diffraction studies on lead zirconate titanate Ceramics

1986 ◽  
Vol 44 ◽  
pp. 482-483
Author(s):  
M.L.A. Dass ◽  
T.A. Bielicki ◽  
G. Thomas ◽  
T. Yamamoto ◽  
K. Okazaki
Keyword(s):  
Lead Zirconate Titanate ◽  
Direct Proof ◽  
Lead Zirconate ◽  
Subsolidus Phase ◽  
Pzt Ceramics ◽  
Subsolidus Phase Diagram ◽  
Zirconate Titanate ◽  
Two Phases ◽  
Cbd Method ◽  
Titanate Ceramics

Lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), ceramics are ferroelectrics formed as solid solutions between ferroelectric PbTiO3 and ant iferroelectric PbZrO3. The subsolidus phase diagram is shown in figure 1. PZT transforms between the Ti-rich tetragonal (T) and the Zr-rich rhombohedral (R) phases at a composition which is nearly independent of temperature. This phenomenon is called morphotropism, and the boundary between the two phases is known as the morphotropic phase boundary (MPB). The excellent piezoelectric and dielectric properties occurring at this composition are believed to.be due to the coexistence of T and R phases, which results in easy poling (i.e. orientation of individual grain polarizations in the direction of an applied electric field). However, there is little direct proof of the coexistence of the two phases at the MPB, possibly because of the difficulty of distinguishing between them. In this investigation a CBD method was found which would successfully differentiate between the phases, and this was applied to confirm the coexistence of the two phases.

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