Fabrication of ordered Ta2O5 nanodots using an anodic aluminum oxide template on Si substrate

2007 ◽  
Vol 22 (4) ◽  
pp. 1064-1071 ◽  
Author(s):  
Ching-Jung Yang ◽  
Chih Chen ◽  
Pu-Wei Wu ◽  
Jia-Min Shieh ◽  
Shun-Min Wang ◽  
...  

Ordered arrays of Ta2O5 nanodots were prepared using anodic aluminum oxide (AAO) as a template to support localized oxidation of TaN. Films of TaN (50 nm) and Al (1.5 μm) were deposited successively on p-type Si wafers and followed by a two-step anodization process at 40 V using oxalic acid as the electrolyte. The first anodization promoted growth of irregular AAO from overlying Al film. After chemical etching, the second anodization was performed to develop well-organized AAO channels and initiate oxidation of underlying TaN film to form tantalum oxide nanodots at the AAO pore bottoms. X-ray photoelectron spectroscopy results confirmed the chemical nature of nanodots as stoichmetric Ta2O5. X-ray diffraction demonstrated the amorphous characteristic of Ta2O5. As shown in field-emission scanning electron microscopy and transmission electron results, the Ta2O5 nanodots exhibited a hillock structure 80 nm in diameter at the bottom and 50 nm in height. We also synthesized 30-nm nanodots by adjusting AAO formation electrochemistry. This demonstrates the general applicability of the AAO template method for nanodot synthesis from nitride to oxide at a desirable size.

2006 ◽  
Vol 05 (02n03) ◽  
pp. 273-278
Author(s):  
LIFANG CHENG ◽  
XINGTANG ZHANG ◽  
YUNCAI LI ◽  
YABIN HUANG ◽  
ZULIANG DU

Aligned silicon dioxide ( SiO 2) submicro-wires have been synthesized from tetraethyl orthosilicate (TEOS) by anodic aluminum oxide (AAO) template method. The products were characterized by Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), X-ray Photoelectron Spectroscopy (XPS) and X-ray diffraction (XRD).


2013 ◽  
Vol 539 ◽  
pp. 255-258
Author(s):  
Miao Miao Cui ◽  
Xiu Chun Yang ◽  
Jun Wei Hou

Firstly, porous anodic aluminum oxide template was prepared by a two-step anodization process, then AgBr nanowire arrays were successfully synthesized by paired cell deposition. X-ray diffraction (XRD) indicates that the as-synthesized samples are composed of face-centered AgBr. Field-emission scanning electron microscopy (FESEM) shows that the average diameter of the nanowire arrays is about 70nm.


2007 ◽  
Vol 14 (06) ◽  
pp. 1039-1045
Author(s):  
HANSONG XUE ◽  
HUAJI LI ◽  
YU YI ◽  
HUIFANG HU

Porous Anodic Aluminum Oxide (AAO) films were prepared by two-step anodizing in sulfuric and oxalic acid solutions and observed by transmission electron microscope (TEM) and X-ray diffraction. The results show that the form of AAO film is affected by the varieties and concentrations of electrolyte, anodizing voltage, and the anodizing time; the formation and evolution processes of the AAO film are relative with the anodizing voltage severely, and the appropriate voltage is helpful to the ordering of the holes. The formation of the AAO film could be explained based on the present experiment and some former models.


2009 ◽  
Vol 23 (29) ◽  
pp. 3497-3501 ◽  
Author(s):  
SONG YUE ◽  
JUAN DU ◽  
YUAN ZHANG ◽  
DAPENG CHEN

Nanoporous anodic aluminum oxide membranes (AAM) were fabricated in oxalic acid electrolytes using a two-step anodization process. Membranes' structure and morphology were examined using scanning electron microscopy and X-ray diffraction after the annealing treatment. It was found that the crystallization temperature of the AAM are greatly dependent on their thickness. Aluminum is maintained under the protection of AAM even at 1100°C when the AAM's melting manifests.


2008 ◽  
Vol 8 (9) ◽  
pp. 4488-4493 ◽  
Author(s):  
Feng Chen ◽  
Adrian H. Kitai

Indium nanowires with diameters approximately 300 nm have been synthesized by a hydraulic pressure technique using anodic aluminum oxide (AAO) templates. The indium melt is injected into the AAO template and solidified to form nanostructures. The nanowires are dense, continuous and uniformly run through the entire ∼60 μm thickness of the AAO template. X-ray diffraction (XRD) reveals that the nanowires are polycrystalline with a preferred orientation. SEM is performed to characterize the morphology of the nanowires.


2012 ◽  
Vol 583 ◽  
pp. 199-202
Author(s):  
Su Wen Li ◽  
Shu Guang Ju

Uniform Eu3+ doped Y2O3 nanowires with diameters of 50 nm in the anodic aluminum oxide template (AAO) have been fabricated. The Y2O3:Eu3+/AAO composite nanowires were characterized by using powder X-ray diffraction (XRD), scanning electron microscope (SEM) and spectrofluorometer techniques. The results indicate that with the increasing annealing temperature and time the excitation band of Eu3+ in Y2O3: Eu3+/AAO composite blue shifted, the intensity ratio of 5D0-7F2 to 5D0-7F1 decreased and the lifetime of the Eu3+ ions in composite became longer. In the composite annealed at 1000 °C, two spectral components were detected, corresponding to two different local environments, i.e. the Eu3+ ions in cubic phase and in amorphous phase, respectively.


2013 ◽  
Vol 760-762 ◽  
pp. 821-824
Author(s):  
Su Wen Li ◽  
Ming Yue

Uniform Y2O3:Tb3+nanowires with diameters of about 70 nm were fabricated using the anodic aluminum oxide template (AAO). The Y2O3:Tb3+nanowires and Y2O3:Tb3+/AAO composite were characterized by using powder X-ray diffraction (XRD), scanning electron microscope (SEM) and spectrofluorometer techniques. The Y2O3:Tb3+nanowires are amorphous phase in symmetry as the annealing temperature was lower than 1000 °C. And the cubic Y2O3: Tb3+nanowires were formed partly as the annealing temperature approached to 1000 °C. The spectral measurements indicate that the excitation and emission intensity increased with the increasing annealing temperature as well as annealing time. The lifetime of5D4-7F5transition becomes longer with the increasing annealing temperature and time in Y2O3:Tb3+/AAO composite.


2011 ◽  
Vol 2011 ◽  
pp. 1-5 ◽  
Author(s):  
Yan Xu ◽  
Yantian Liang ◽  
Lijuan Jiang ◽  
Huarui Wu ◽  
Hongzhi Zhao ◽  
...  

Ordered ZnFe2O4nanotube arrays with the average outer diameter of 100 nm were prepared in porous anodic aluminum oxide template using an improved sol-gel approach. The morphology was studied by transmission electron and field emission scanning electron microscope. X-ray diffraction result shows that the nanotubes were polycrystalline in structure. The magnetic properties of the prepared ZnFe2O4nanotubes were also studied. The results show that the sample shows typical superparamagnetism at room temperature and obvious ferromagnetism below blocking temperature.


2020 ◽  
Vol 20 (5) ◽  
pp. 3157-3163
Author(s):  
Osamah Ali Fayyadh ◽  
Intan Nur Ain Arifin ◽  
Azelah Khairudin ◽  
Jumiah Hassan ◽  
Shamsu Abubakar ◽  
...  

Indium antimonide nanowires were synthesized by electrochemical deposition using anodic aluminum oxide template in the presence of gold film as conductive layers. Field emission scanning electron microscopy and energy dispersive X-ray spectrometry measurements were carried out to investigate the effect of adhesive insulated tape covered below the conductive layer. Results showed that the anodic aluminum oxide template covered with insulating tapes had better morphology with less presence of overgrown rough film on the topside of the anodic aluminum oxide template and it exhibited a smoother nanowire sidewall as compared to the uncovered ones. Additionally, the unique properties of anodic aluminum oxide were controllable pore diameter with a narrow size distribution at some intervals. It was evident from the energy dispersive X-ray spectrum that the nanowires synthesized from the covered template condition exhibited better InSb composition and stoichiometric ratio compared to the uncovered template condition.


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