Theory of Vertical Amorphous Silicon Thin-Film Transistors

1989 ◽  
Vol 149 ◽  
Author(s):  
J. G. Shaw ◽  
M. Hack

ABSTRACTWe describe a vertical amorphous silicon thin-film transistor which is easy to fabricate and has a very short channel length that is determined by deposition, not lithography. Our vertical TFTs are compatible with large-area processing techniques andd have suitable terminal characteristics for use in practical circuits. Unlike a conventional thin-film transistor, the current path is primarily parallel to the electric field created by an insulated gate electrode. A two-dimensional computer program is used to analyze these devices and guide their design and optimization. We show how to suppress excessive leakage currents and improve the saturation of the output characteristics by a novel current-blocking technique.

1993 ◽  
Vol 297 ◽  
Author(s):  
R.F. Kwasnick ◽  
G.E. Possin ◽  
W.L. Hill II

We have measured the device characterisics of short and long channel inverted- staggered hydrogenated amorphous silicon thin film transistors (TFTs) with either Mo or Cr source/drain metal after annealing at temperatures from 225 C to 275 C. The TFT deposition temperature at the substrate surface was about 270 C. From the slope of the transfer characteristic an effective mobility is extracted. Devices with Mo source/drain metal exhibit an initial effective mobility increase at short times (within about 30 min), while those with Cr do not. At long times the mobility of all devices decreases. The mobility changes are greatest for short channel length devices because of contact effects. The channel length dependence of the behavior permits a separation of the device behavior into contact and intrinsic mobility components.


1998 ◽  
Vol 508 ◽  
Author(s):  
P. Mei ◽  
J. B. Boyce ◽  
D. K. Fork ◽  
G. Anderson ◽  
J. Ho ◽  
...  

AbstractDistinct features of amorphous and polycrystalline silicon are attractive for large-area electronics. These features can be utilized in a hybrid structure which consists of both amorphous and polycrystalline silicon materials. For example, an extension of active matrix technology is the integration of peripheral drivers for the improvement of reliability, cost reduction and compactness of the packaging for large-area electronics. This goal can be approached by a combination of amorphous silicon pixel switches and polysilicon drivers. A monolithic fabrication process has been developed based on a simple modification of the amorphous silicon transistor process which uses selective area laser crystallization. This approach allows us to share many of the process steps involved in making both the amorphous and polysilicon devices. Another example of the hybrid device structure is a self-aligned amorphous silicon thin film transistor with polysilicon source and drain contacts. The advantages of the self-aligned transistor are reduction of the parasitic capacitance and scaling down of the device dimension. With a selective laser doping technique, self-aligned and short-channel amorphous silicon thin film transistors have been demonstrated.


1992 ◽  
Vol 258 ◽  
Author(s):  
Yong S. Kim ◽  
Jin S. Park ◽  
Seong K. Lee ◽  
Jung R. Hwang ◽  
Hong S. Choi ◽  
...  

ABSTRACTWe presents a new model for the series resistance of an amorphous silicon (a-Si) thin film transistor (TFT) with an inverted-staggered configuration, considering the current spreading under the source and the drain contacts as well as the space charge limited current. The calculated results of our model have been in good agreements with the measured data over a wide range of applied voltage, gate-to-source and gate-to-drain overlap length, channel length, and operating temperature. Our model shows that the relative contribution of the series resistances to the current-voltage (I-V) characteristics of the a-Si TFT in the linear regime is more significant at low drain and high gate voltages, for short channel and small overlap length, and at low operating temperature, which has been verified successfully by the experimental measurements.


1984 ◽  
Vol 33 ◽  
Author(s):  
H. C. Tuan

ABSTRACTIn this paper, the amorphous silicon thin film transistor (a-Si:HTFT) technology is reviewed. Its applications to both one- and two-dimensional large-area devices are described. The issues related to the fabrication of TFT arrays on large-area substrates are also discussed.


2000 ◽  
Vol 609 ◽  
Author(s):  
D. Caputo ◽  
L. Colalongo ◽  
F. Irrera ◽  
F. Lemmi ◽  
F. Palma

ABSTRACTPractical use of amorphous silicon stacked-junction color detectors in large-area arrays requires periodic readout of the photo-charge stored in the capacitance of the device by a transient technique of sensing. In any stacked-junction devices, color information is obtained by the “self-biasing” process: during an integration time, the three junctions independently lose charge; during the readout pulse, the capacitances of the three junctions in electrical series are re-charged. Equilibrium is reached after a few cycles, when the charge integrated in a cycle by each junction is the same, and equals the readout charge. The amount of charge is determined by the reverse biased junction and accounts for the light intensity.Dimensioning the amorphous silicon Thin Film Transistor (TFT) used as a pixel switch for the detector is a critical part of the project of a color imager. The actual design determines the self-bias process duration and the readout accuracy. The typical large thickness difference between the detector junctions makes the constraints for the switching process extremely demanding: since a greater capacitance is expected in the thinner top junction detecting blue radiation, the on-resistance must be reduced. Since the front junction does not ensure full rejection of green and red light, a calculation must be performed to extract the information on blue radiation. This requires further precision in the readout process.In this work we present a simulation study of the self-biasing process. Both a-Si:H TFT and the a-Si:H p-i-n-i-p two-color detectors are simulated by a finite-elements two-dimensional simulator ensuring a correct modeling of both the devices. Simulations allow to study in detail the timing and the accuracy of the self-biasing process. Including electrostatic capacitance and trapped charge, a set of design rules for the TFT is achieved in terms of on-state design. Similar considerations can be extended to the case of ATCD three-color detectors.


1994 ◽  
Vol 345 ◽  
Author(s):  
Kola R Olasupo ◽  
Professor M. K. Hatalis

AbstractThe polysilicon thin film transistor has been actively studied for the large area display applications like active matrix liquid crystal displays and for load cell in static random access memories. Due to low effective carrier mobility in polysilicon, the circuit speed is limited. Since the circuit delay time is directly proportional to the square of the channel length, short channel TFTs will be advantageous for high speed applications. In this work, we have studied the current voltage characteristics of an inverted sub-micron P-channel polysilicon thin-film transistor with self-aligned LDD structure to obtain a well-controlled channel and drain offset lengths. The particular features we examined are the leakage current and mobility. The leakage current and the ON current were found to be in the picoamp and micro-amp range respectively for devices having channel length in the range of 1.0μm to 0.35μm. Even very small devices having L&W = 0.35μm × 0.35μm exhibited characteristics similar to wider devices. The on/off current ratio was in the order of 105 before hydrogenation.


1986 ◽  
Vol 70 ◽  
Author(s):  
M. Yang ◽  
Z. Yaniv ◽  
M. Vijan ◽  
V. Cannella

ABSTRACTThere is a rapid growth of interest in the application of amorphous silicon alloy thin film devices to large area microelectronic circuits. Increased current levels are a constant goal since gains in device current result in proportional gains in power and speed. Mobility limitations in amorphous silicon thin film transistors have directed interest toward short conduction channel devices to achieve higher current levels; furthermore, compatibility with large area processing makes photolithography with 10μm feature size very attractive. Consequently, innovative techniques, which define channel lengths by processing parameters rather than by mask feature size are necessary. Previous work has applied such techniques to vertical structure TFT's which define channel lengths by the vertical height of deposited layers. Here, we report on a technique which achieves short channel lengths in planar structures using etching parameters to define short channel lengths. Amorphous silicon alloy TFTs have been fabricated with channel lengths of ≈2μm which reach currents of lma. These techniques broaden the range of application of amorphous silicon alloy TFTs by providing devices capable of operating at higher currents and higher speeds.


1998 ◽  
Vol 507 ◽  
Author(s):  
P. Mei ◽  
J. B. Boyce ◽  
D. K. Fork ◽  
G. Anderson ◽  
J. Ho ◽  
...  

ABSTRACTDistinct features of amorphous and polycrystalline silicon are attractive for large-area electronics. These features can be utilized in a hybrid structure which consists of both amorphous and polycrystalline silicon materials. For example, an extension of active matrix technology is the integration of peripheral drivers for the improvement of reliability, cost reduction and compactness of the packaging for large-area electronics. This goal can be approached by a combination of amorphous silicon pixel switches and polysilicon drivers. A monolithic fabrication process has been developed based on a simple modification of the amorphous silicon transistor process which uses selective area laser crystallization. This approach allows us to share many of the process steps involved in making both the amorphous and polysilicon devices. Another example of the hybrid device structure is a self-aligned amorphous silicon thin film transistor with polysilicon source and drain contacts. The advantages of the self-aligned transistor are reduction of the parasitic capacitance and scaling down of the device dimension. With a selective laser doping technique, self-aligned and shortchannel amorphous silicon thin film transistors have been demonstrated.


1987 ◽  
Vol 95 ◽  
Author(s):  
R. L. Weisfield ◽  
H. C. Tuan ◽  
L. Fennell ◽  
M. J. Thompson

AbstractAmorphous silicon (a-Si:H) thin-film transistor (TFT) array technology has been developed for new applications in low-cost, high-quality electronic printing. We have fabricated page-wide arrays of low-voltage pass transistors using a-Si:H TFTs for ionographic printing, in which voltages of 0 to 15 volts applied to a line of output electrodes modulate the flow of ions charging a dielectric receptor. High-voltage a-Si:H TFTs have been used in an electrographic printer to modulate high voltages required to initiate air discharges. Combining a-Si:H photodiodes on TFT arrays, we have also designed circuits for document scanning and photosensor amplifiers. TFT performance in relation to these novel printer and sensor applications will be discussed. Issues related to process integration, circuit design, and large-area fabrication technology will be addressed.


1991 ◽  
Vol 219 ◽  
Author(s):  
Hong S. Choi ◽  
Jin S. Park ◽  
Chang H. Oh ◽  
In S. Joo ◽  
Yong S. Kim ◽  
...  

ABSTRACTWe present a new analytical model of amorphous silicon thin-film transistor (a-Si TFT) suitable for circuit simulators such as SPICE. The effects of localized gap state distributions of a-Si as well as temperatures on the a-Si TFT performances have been fully considered in the presented model. The parameters used in SPICE, such as transconductance, channel-length modulation, and power factor of source-drain current, are evaluated from the measured current-voltage and capacitance-voltage characteristics by employing the proposed extraction method. It has been found out that the analytical model is in good agreement with experimental data at both room temperature and elevated temperature and successfully implemented in a widely used circuit simulator.


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