Microstructural Characterization of Low Temperature GaAs(111)B MBE Growth by AFM and Tem
Keyword(s):
ABSTRACTAtomic Force Microscopy (AFM) images are correlated with Transmission Electron Microscopy (TEM) plan-view images in a structure consisting of <111> oriented GaAs layers grown by molecular beam epitaxy (MBE) at 500°C. We present results on the applicability of AFM, which requires short sample preparation and imaging time relative to TEM, in obtaining information on twin density and growth pits of these low temperature samples. Also, we discuss the behavior of twin boundaries by comparing plan-views and cross sectional TEM images.
2017 ◽
Vol 82
(4)
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pp. 437-447
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2005 ◽
Vol 483-485
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pp. 295-298
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2012 ◽
Vol 711
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pp. 141-148
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