Intrinsic Stress in Sputtered Thin Films

1994 ◽  
Vol 356 ◽  
Author(s):  
Tai D. Nguyen ◽  
Tue Nguyen ◽  
James H. Underwood
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Film Formation ◽  
Substrate Surface ◽  
Dynamics Simulation ◽  
Intrinsic Stress ◽  
Stress Evolution ◽  
X Ray ◽  
Measured Stress ◽  
Thin Film Formation

AbstractUnderstanding of the stress in thin films is important in controls of the properties of nanometer period x-ray multilayers. Stress evolution at the initial stages of thin film formation was studied by molecular dynamics simulation of Mo atoms impinging on a 5×5×5 unit cell Mo substrate. The simulation shows that the structure initially increases in a compressive state. The stress then decreases when the deposited atoms have covered the substrate surface. Measured stress of Ru films in Ru/C multilayers by laser curvature technique shows similar behavior to the simulated results.

Effects of Rheological Characteristics of Sol on Preferential Orientation of Pb(Mg,Zn)1/3Nb2/3O3 Thin Films

1994 ◽  
Vol 361 ◽  
Author(s):  
Hyun M. Jang ◽  
Mun K. Cho
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Film Formation ◽  
Preferential Orientation ◽  
Rheological Characteristics ◽  
X Ray ◽  
Spin Casting ◽  
X Ray Scattering ◽  
Scattering Experiment ◽  
Thin Film Formation

ABSTRACTThin films of Pb(Mg,Zn)1/3Nb2/3O3 were fabricated by spin casting the Pb-Mg-Zn-Nb-0 complex alkoxide sols on (111)Pt-coated MgO (100) planes. It was observed that the rheological characteristics of sol greatly influenced the orientation of perovskite grains after thin-film formation. A strong preferential orientation of (100)-type planes of the perovskite grains was obtained in the thin films derived from the sols exhibiting pseudoplastic behavior. Small angle X-ray scattering experiment in the Porod region was performed to correlate the observed preferential orientation with the network structure of precursors at various stages of aging. It was shown that weakly branched precursor chains led to highly oriented grains after thin-film formation.

A facile room temperature chemical transformation approach for binder-free thin film formation of Ag2Te and lithiation/delithiation chemistry of the film

2016 ◽  
Vol 45 (43) ◽  
pp. 17312-17318 ◽  
Author(s):  
Eun-Kyung Kim ◽  
Dasom Park ◽  
Nabeen K. Shrestha ◽  
Jinho Chang ◽  
Cheol-Woo Yi ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Aqueous Solution ◽  
Ion Exchange ◽  
Chemical Transformation ◽  
Room Temperature ◽  
Film Formation ◽  
Synthetic Method ◽  
Binder Free ◽  
Thin Film Formation

An aqueous solution based synthetic method for binder-free Ag2Te thin films using ion exchange induced chemical transformation of Ag/AgxO thin films.

scholarly journals Metal phthalocyanines: thin-film formation, microstructure, and physical properties

RSC Advances ◽  
2021 ◽  
Vol 11 (35) ◽  
pp. 21716-21737
Author(s):  
Rosemary R. Cranston ◽  
Benoît H. Lessard
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Physical Properties ◽  
Small Molecules ◽  
Film Formation ◽  
Proper Function ◽  
Next Generation ◽  
Metal Phthalocyanines ◽  
Thin Film Formation

Metal phthalocyanines (MPcs) are an abundant class of conjugated small molecules comprising and their integration into thin films is critial for the proper function of next generation applications.

Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing

2015 ◽  
Vol 815 ◽  
pp. 8-13
Author(s):  
Chun Min Zhang ◽  
Xiao Yong Liu ◽  
Lin Qing Zhang ◽  
Hong Liang Lu ◽  
Peng Fei Wang ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thermal Processing ◽  
Oxygen Plasma ◽  
Film Formation ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Line Process ◽  
Formation Method ◽  
Thin Film Formation

A novel Ru thin film formation method was proposed to deposit metallic Ru thin films on TiN substrate for future backend of line process in semiconductor technologies. RuO2 thin films were first grown on TiN substrate by oxygen plasma-enhanced atomic layer deposition technique. The deposited RuO2 thin films were then reduced into metallic Ru thin films by H2/N2-assisted annealing.

scholarly journals Noble Metal Alloy Thin Films by Atomic Layer Deposition & Rapid Joule Heating

2021 ◽  
Author(s):  
Yuanyuan Guo ◽  
Yiming Zou ◽  
Chunyu Cheng ◽  
Leyan Wang ◽  
Riko I Made ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Atomic Layer Deposition ◽  
Joule Heating ◽  
Atomic Layer ◽  
Metal Alloy ◽  
Dynamics Simulation ◽  
Alloy Films ◽  
X Ray ◽  
Layer Deposition

Abstract Metal alloys are usually fabricated by melting constituent metals together or sintering metal alloy particles made by high energy ball milling (mechanical alloying). All these methods only allow for bulk alloys to be formed. This manuscript details a new method of fabricating Rhodium/Iridium (Rh/Ir) metal alloy films using atomic layer deposition (ALD) and rapid Joule heating induced alloying that gives functional thin film alloys, enabling conformal thin films with high aspect ratios on 3D nanostructured substrate. In this work, ALD was used to deposit Rh thin film on an Al2O3 substrate, followed by an Ir overlayer on top of the Rh film. The multilayered structure was then alloyed / sintered using rapid Joule heating. We can precisely control the thickness of the resultant alloy films down to the atomic scale. The Rh@Ir alloy thin films were characterized using scanning and transmission electron microscopy (SEM/TEM) and energy dispersive spectroscopy (EDS) to study their microstructural characteristics. Grazing-incidence X-ray diffraction (GIXRD) and X-ray photoelectron spectroscopy (XPS) were also carried out to confirm the composition and formation of Rh-Ir thin film alloys. All the characterization results reveal that the Rh-Ir alloy thin film was prepared successfully with one single phase and homogeneous distribution of Rh and Ir throughout the film. Molecular Dynamics simulation experiments of Rh/Ir alloys using Large-Scale Atomic/Molecular Massively Parallel Simulator (LAMMPS) were performed to elucidate the alloying mechanism during the rapid heating process, corroborating the experimental results.

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