Correlation of The Mechanical Properties of Silicon Oxynitride Films to Processing Parameters, Film Stoichiometry, and Hydride Bond Concentration

1995 ◽  
Vol 391 ◽  
Author(s):  
Mansour Moinpour ◽  
Farhad Moghadam ◽  
Byron Williams
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Elastic Modulus ◽  
Linear Correlation ◽  
Processing Parameters ◽  
Silicon Oxynitride ◽  
Nitrogen Hydride ◽  
Micro Indentation ◽  
Hardness Values ◽  
Measured Hardness

AbstractA selective range of hydrated silicon oxynitride thin films (SixOyNz:H) have been characterized in terms of their stress, hardness, and modulus in order to mechanically qualify them for use as an encapsulation layer for memory devices (e.g., Flash and EPROM memories). These films are analyzed by RBS and HFS for stoichiometry. The films exhibited stress values between 1.86 x 109 to -3.54 x 109 dyne/cm2 and showed a linear correlation with the hydride ratio (N-H/Si-H). An Ultra Micro-Indentation System (UMIS) measured hardness values between 10.5 GPa to 16.2 GPa while the elastic modulus varied between 119.1 to 141.2 GPa. The monatomic increase of modulus with hardness is attributed to increased amounts of nitrogen and nitrogen hydride bonding in the silicon oxynitride samples.

Effects of dynamic indentation on the mechanical response of materials

2008 ◽  
Vol 23 (6) ◽  
pp. 1604-1613 ◽  
Author(s):  
M.J. Cordill ◽  
N.R. Moody ◽  
W.W. Gerberich
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Mechanical Response ◽  
Length Scale ◽  
Polycrystalline Nickel ◽  
Dynamic Indentation ◽  
Crystalline Materials ◽  
Fused Quartz ◽  
Hardness Values ◽  
Measured Hardness

Dynamic indentation techniques are often used to determine mechanical properties as a function of depth by continuously measuring the stiffness of a material. The dynamics are used by superimposing an oscillation on top of the monotonic loading. Of interest was how the oscillation affects the measured mechanical properties when compared to a quasi-static indent run at the same loading conditions as a dynamic. Single crystals of nickel and NaCl as well as a polycrystalline nickel sample and amorphous fused quartz and polycarbonate have all been studied. With respect to dynamic oscillations, the result is a decrease of the load at the same displacement and thus lower measured hardness values of the ductile crystalline materials. It has also been found that the first 100 nm of displacement are the most affected by the oscillating tip, an important length scale for testing thin films, nanopillars, and nanoparticles.

scholarly journals Structural and Mechanical Properties of Nanostructured C-Ag Thin Films Synthesized by Thermionic Vacuum Arc Method

2018 ◽  
Vol 2018 ◽  
pp. 1-10 ◽  
Author(s):  
Rodica Vladoiu ◽  
Aurelia Mandes ◽  
Virginia Dinca-Balan ◽  
Vilma Bursikova
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Mechanical Properties ◽  
Elastic Modulus ◽  
Silicon Substrate ◽  
Vacuum Arc ◽  
Average Roughness ◽  
Thermionic Vacuum Arc ◽  
Induced Aggregation ◽  
Ag Film

Nanostructured C-Ag thin films of 200 nm thickness were successfully synthesized by the Thermionic Vacuum Arc (TVA) method. The influence of different substrates (glass, silicon wafers, and stainless steel) on the microstructure, morphology, and mechanical properties of nanostructured C-Ag thin films was characterized by High-Resolution Transmission Electron Microscopy (HRTEM), Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), and TI 950 (Hysitron) nanoindenter equipped with Berkovich indenter, respectively. The film’s hardness deposited on glass (HC-Ag/Gl = 1.8 GPa) was slightly lower than in the case of the C-Ag film deposited on a silicon substrate (HC-Ag/Si = 2.2 GPa). Also the apparent elastic modulus Eeff was lower for C-Ag/Gl sample (Eeff = 100 GPa) than for C-Ag/Si (Eeff = 170 GPa), while the values for average roughness are Ra=2.9 nm (C-Ag/Si) and Ra=10.6 (C-Ag/Gl). Using the modulus mapping mode, spontaneous and indentation-induced aggregation of the silver nanoparticles was observed for both C-Ag/Gl and C-Ag/Si samples. The nanocomposite C-Ag film exhibited not only higher hardness and effective elastic modulus, but also a higher fracture resistance toughness to the silicon substrate compared to the glass substrate.

The Mechanical Properties of Combustion-Sprayed Polymers and Blends

1996 ◽  
Author(s):  
J.A. Brogan ◽  
C.C. Berndt ◽  
A. Claudon ◽  
C. Coddet
Keyword(s):  
Mechanical Properties ◽  
Elastic Modulus ◽  
Yield Strength ◽  
Deposition Temperature ◽  
Processing Parameters ◽  
Low Energy ◽  
Melt Compounding ◽  
Acid Copolymer ◽  
Spray Processing ◽  
Break Water

Abstract The mechanical properties of EMAA copolymer are dependent upon the thermal spray processing parameters. The parameters determine coating temperatures which, in turn, affects the microstructure. If the deposition temperature is too low, (104 °C for PFl 13 and 160 °C for PFl 11) coatings have low strengths and low energy to break values. Increased coating temperatures allow the particles to fully coalesce resulting in maximized strength and elongation to break. However, at 271 °C, PFl 11 had visible porosity which decreased both strength and elastic modulus. Pigment acts as reinforcement in the sense that the modulus increased but the elongation to break decreased, thus reducing the energy to break. Water quenching reduces the elastic modulus and yield strength, but increases the elongation to break for both EMAA formulations. The mechanical properties of post consumer commingled plastic and PCCP / EMMA blends improved if the recycled plastic was pre-processed by melt-compounding. Melt compounding increased the strength and toughness by improving the compatibility among the various polymer constituents. The addition of PCCP increases the modulus and yield strength of ethylene methaciylic acid copolymer.

Size Scale Dependence of Deformation in NiTi

2000 ◽  
Author(s):  
Ken Gall ◽  
Martin L. Dunn ◽  
Yiping Liu ◽  
Paul Labossiere ◽  
Huseyin Sehitoglu ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Shape Memory ◽  
Quantitative Information ◽  
Scale Dependence ◽  
Micro Electro Mechanical Systems ◽  
Testing Techniques ◽  
Shape Memory Materials ◽  
Mems Testing ◽  
Micro Indentation

Abstract Recent work [1-5] has suggested that a lucrative future for shape memory materials such as NiTi is in the area of micro-electro-mechanical systems (MEMS). To design MEMS and predict their behavior during service, we must have quantitative information on the mechanical properties of scaled down NiTi materials. One way of obtaining the mechanical properties of scaled down materials is with unique MEMS testing fixtures. Although this approach is favorably analogous to macroscopic testing techniques it is not always feasible owing to the difficulty of handling the microscopic samples. Many smart material actuators are deposited thin films [1-5] and separating the films from their substrate and subsequently testing them is beyond our current MEMS processing and handling tools. An alternative method to quantify the properties of microscale materials is through micro-indentation, which has been previously applied to NiTi polycrystals [6]. Although micro-indentation is simple to accomplish, interpretation and quantification of the results is not as straightforward, as will be demonstrated in this work.

Nano and Micro Indentation and Scratch Tests of Mechanical Properties of Thin Films

2009 ◽  
pp. 489-490
Author(s):  
Norm V. Gitis ◽  
Suresh Kuiry ◽  
Ilja Hermann ◽  
Jun Xiao
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Scratch Tests ◽  
Micro Indentation

scholarly journals TEM observation of precipitates and their role to mechanical properties in Ti-5553 alloy heated to some temperatures up to 923 K

2020 ◽  
Vol 321 ◽  
pp. 11035
Author(s):  
E. Sukedai ◽  
E. Aeby-Gautier ◽  
M. Dehmas
Keyword(s):  
Electron Microscopy ◽  
Mechanical Properties ◽  
Hardening Mechanism ◽  
Transmission Electron ◽  
The Matrix ◽  
Higher Temperature ◽  
Shearing Mechanism ◽  
Hardness Values ◽  
Measured Hardness

A Ti-5553 specimen was continuously heated to 923 K and simultaneously in-situ HEXRD profiles were taken. In addition, specimens heated at the same rate to several temperatures up to 923 K and further quenched were observed by transmission electron microscopy. Based on both results obtained, transformation sequence was clarified, precipitations of ω-, α”iso- and α-phases were confirmed, and size and density of these precipitates were measured. Hardness values of those specimens were also measured. The hardening mechanism was considered as shearing-mechanism for specimens aged at lower temperatures and by-pass one for specimens aged at higher temperature. An attempt of distinction between α”iso - and α-precipitates was also tried. Both precipitates were in needle-like shape and a possibility was suggested by measuring angles between two needle-shape precipitates on {110} of the matrix and comparing with each other.

Production of mullite‒TiC‒с-BN‒с-ZrO2-materials by the method of plasma-spark sintering and their properties

2019 ◽  
pp. 23-29 ◽  
Author(s):  
A. V. Hmelov
Keyword(s):  
Mechanical Properties ◽  
Phase Composition ◽  
Elastic Modulus ◽  
Linear Correlation ◽  
Modulus Of Elasticity ◽  
Physical And Mechanical Properties ◽  
Linear Shrinkage ◽  
Physicomechanical Properties ◽  
Intensive Development ◽  
Crystalline Microstructure

The effect of different с-BN and с-ZrO2 ratios on the phase composition, microstructure, relative density, open porosity, linear shrinkage, physicomechanical properties, and linear correlation of the elastic modulus and toughness of samples during plasma-spark sintering at pressing load 70 MPa in the range of 1200‒1600 °C is shown. The synthesized powders of TiC, c-BN and c-ZrO2, sintered at 1400 °C by the plasma-spark method, are characterized by intense crystallization of the phases. Sintered samples with different ratios of c-BN and c-ZrO2 show the intensive development of mullite and TiC. An increase in the c-BN / c-ZrO2 ratio promotes an active increase in c-BN and a less intensive increase in с-ZrO2 in the range of 1200‒1600 °C, and it causes the formation of a less uniform and densely sintered crystalline microstructure with a large number of pores at 1500 °C. This sample has lower values of physical and mechanical properties and a lower linear correlation of the modulus of elasticity and toughness in the range of 1200‒1600 °C and lower crack resistance at 1500 °C. Ill. 9. Ref. 13. Tab. 1.

Characterization of Nanoporous Low Dielectric Polysilsesquioxane Thin Films

2005 ◽  
Vol 277-279 ◽  
pp. 907-911
Author(s):  
Jingyu Hyeon Lee ◽  
Yi Yeol Lyu ◽  
Mong Sup Lee ◽  
Jin Heong Yim ◽  
Sang Youl Kim
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Dielectric Constant ◽  
Refractive Index ◽  
Elastic Modulus ◽  
Polymer Matrix ◽  
Low Dielectric

Poly(methyl-co-cyclosiloxane bearing silsesquioxane)s (P(M-co-CSSQs)) were prepared. Using poly(e-caprolactone) (PCL) as a template, PCL / P(M-co-CSSQ) nanohybrid films were fabricated. The electrical, morphological, and mechanical properties of the PCL / P(M-co-CSSQ) films were investigated. The dielectric constant of a cured PCL / P(M-co-CSSQ) film at 420°C scaled down from 2.55 to 2.05 and refractive index from 1.41 to 1.33 when 20 vol. % of the PCL was admixed with the polymer matrix. The elastic modulus and hardness of the cured PCL / P(Mco- CSSQ) (2:8, vol./vol.) film were 2.50 and 0.32 GPa, respectively, showing dependency on the PCL content.

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