scholarly journals Synthesis of thin layer of fluorinated polymer by laser CVD. Direct synthesis of perfluoropolyether thin film on surface by oxidative polymerization of a perfluoropropene-oxygen mixture using an ArF excimer laser.

1993 ◽  
Vol 6 (3) ◽  
pp. 421-428 ◽  
Author(s):  
TETSURO MAJIMA ◽  
KYOKO SUGITA ◽  
AIKO NAKAO ◽  
SATOSHI MATSUNUMA ◽  
KATSUO ABE
Keyword(s):  
Thin Film ◽  
Thin Layer ◽  
Excimer Laser ◽  
Direct Synthesis ◽  
Oxidative Polymerization ◽  
Oxygen Mixture ◽  
Fluorinated Polymer ◽  
Arf Excimer Laser ◽  
Laser Cvd

High Resolution Displacement of Functional Groups onto Fluorocarbon Resin Surface by Using ArF Excimer Laser

1996 ◽  
Vol 451 ◽  
Author(s):  
T. Shimizu ◽  
M. Murahara
Keyword(s):  
Contact Angle ◽  
High Resolution ◽  
Laser Beam ◽  
Thin Layer ◽  
Functional Groups ◽  
Excimer Laser ◽  
Laser Fluence ◽  
Large Area ◽  
Three Solutions ◽  
Arf Excimer Laser

ABSTRACTA Fluorocarbon resin surface was selectively modified by irradiation with a ArF laser beam through a thin layer of NaAlO2, B(OH)3, or H2O solution to give a hydrophilic property. As a result, with low fluence, the surface was most effectively modified with the NaAlO2 solution among the three solutions. However, the contact angle in this case changed by 10 degrees as the fluence changed only 1mJ/cm2. When modifying a large area of the surface, high resolution displacement could not be achieved because the laser beam was not uniform in displacing functional groups. Thus, the laser fluence was successfully made uniform by homogenizing the laser beam; the functional groups were replaced on the fluorocarbon resin surface with high resolution, which was successfully modified to be hydrophilic by distributing the laser fluence uniformly.

Circuit Pattern cu Deposition on Polyimide Surface Using ArF Excimer Laser

1998 ◽  
Vol 546 ◽  
Author(s):  
M. Tomita ◽  
M. Murahara
Keyword(s):  
Thin Film ◽  
Aqueous Solution ◽  
Excimer Laser ◽  
Copper Sulfate ◽  
Electroless Plating ◽  
Atmospheric Pressure ◽  
Hydrogen Atoms ◽  
Arf Excimer Laser ◽  
Cu Thin Film ◽  
Copper Substitution

AbstractCircuit patterned nucleation of copper atoms onto polyimide surface was demonstrated by using ArF excimer laser (λ =193nm) and copper sulfate aqueous solution at an atmospheric pressure. Photo-excited C-H bonds of the polyimide surface were effectively dehydrated with hydrogen atoms which were photodissociated from the water. The dangling bonds of the dehydrated hydrogen atoms were combined with the oxygen and the copper atoms which were photodissociated by copper-sulfate aqueous solution. Thus, C-O-Cu bonds were formed on the surface. After this copper substitution, it was carried out onto the nucleated parts by usual electroless plating at 70°C. In this process, the conductive circuit pattern Cu thin film was deposited on polyimide surface.

ArF excimer laser ablation of Mg and MgO targets for MgO thin-film deposition

1993 ◽  
Author(s):  
E. Fogarassy ◽  
F. Antoni ◽  
S. de Unamuno ◽  
C. Fuchs ◽  
J. Perrière ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Ablation ◽  
Excimer Laser ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Excimer Laser Ablation ◽  
Arf Excimer Laser
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