Hot Wall Isothermal RTP for Gate Oxide Growth and Nitridation

2000 ◽  
Vol 611 ◽  
Author(s):  
Allan Laser ◽  
Christopher Ratliff ◽  
Jack Yao ◽  
Jeff Bailey ◽  
Jean-Claude Passefort ◽  
...  
Keyword(s):  
Low Cost ◽  
Gate Oxide ◽  
Thermal Systems ◽  
High Quality ◽  
Gate Oxides ◽  
Processing Module ◽  
Wafer Processing ◽  
And Control ◽  
Measurement And Control ◽  
New System

ABSTRACTA new system that incorporates many benefits of large batch furnaces (high quality films, growth of wet and dry oxides, chlorine capability, and low cost) into a single wafer processing module has been developed at SVG Thermal Systems. The problems associated with wafer temperature measurement and control in traditional lamp based RTP systems are avoided by utilizing a hot wall isothermal processing chamber. Unique fixturing is used to minimize thermal stress on the wafer during ramping. High quality gate oxides ranging in thickness from 20Å to 40Å have been grown in this system using both wet and dry oxidation ambients, with and without chlorine. Thin oxides grown in dry oxygen had 1-sigma uniformities in the range of 0.72-0.95%, while oxides grown in oxygen/HCl (1-3%) had uniformities of 0.80%. Steam grown oxides demonstrated growth rates of 100Å/min at 900°C and uniformities of 0.62%. Dry oxides annealed in NO and N2O had peak nitrogen incorporation levels ranging from 0.5 to 5.1 atomic percent depending on anneal ambient, temperature and time.

scholarly journals Quality improvement in higher education: a critical review, with reference to South Africa

2004 ◽  
Vol 23 (4) ◽  
pp. 104-113
Author(s):  
R. W. Pretorius
Keyword(s):  
Higher Education ◽  
South Africa ◽  
Quality Assurance ◽  
Quality Improvement ◽  
Critical Review ◽  
Theory And Practice ◽  
State Of Affairs ◽  
And Control ◽  
Measurement And Control ◽  
New System

In view of the controversy which characterises systems for quality assurance in higher education worldwide, this article provides a critical review of the theory and practice of quality in the higher education sector.  The state of affairs in South Africa is also reviewed, with the focus on the new system for quality assurance which is currently being implemented.  Despite good intentions, however, the new system in South Africa tends to be over-burocratic, with limited potential for deepseated change and quality improvement as a result of the focus on accountability rather than on continuous improvement. Real improvement is an internally driven process, which cannot be achieved through burocratic measurement and control.  In line with what has been experienced internationally, this article argues that a more flexible approach to the meaning of quality in the context of higher educaction is required in South Africa.  Apart from defining and assuring quality, this approach should also be directed at its improvement.  However, the point of departure has to be quality improvement, and not quality assurance and control.

Surface Contamination Measurement and Control by Nondestructive Techniques

1985 ◽  
Vol 28 (6) ◽  
pp. 30-32
Author(s):  
Arvind Arora
Keyword(s):  
Electron Emission ◽  
Printed Circuit Boards ◽  
Thickness Measurement ◽  
Circuit Boards ◽  
Limited Data ◽  
Disk Lubricant ◽  
Wafer Processing ◽  
A New Technique ◽  
And Control ◽  
Measurement And Control

This paper presents a new technique to measure thin layer contamination on the surface of a material. The technique uses low wavelength ultraviolet irradiation to generate optically stimulated electron emission, also known as photo electron emission, which can be used to evaluate surface cleanliness or surface chemical state. Limited data is presented to show application of this technique to wafer processing, disk lubricant thickness measurement and quality control of printed circuit boards.

scholarly journals An Automated Chamber System for Measurements of Whole-vine Gas Exchange

HortScience ◽  
1997 ◽  
Vol 32 (1) ◽  
pp. 64-67 ◽  
Author(s):  
S. Poni ◽  
E. Magnanini ◽  
B. Rebucci
Keyword(s):  
Gas Exchange ◽  
Low Cost ◽  
Absolute Humidity ◽  
Gas Analyzer ◽  
Custom Made ◽  
Automated Measurements ◽  
System Interfaces ◽  
And Control ◽  
Measurement And Control ◽  
Infrared Gas Analyzer

The reported system interfaces a commercially available portable infrared gas analyzer with a measurement and control module for continuous and automated measurements of whole-canopy gas exchange. Readings were taken for several days, under mostly sunny or partly cloudy conditions, on two potted vines (total leaf area per vine of ≈1.3 m2) enclosed in inflated polyethylene chambers. The air flow rate through the chambers was provided by a centrifugal blower and set at 5 L·s-1 by a butterfly valve. It prevented ΔCO2 from dropping below –40 mL·L-1. Switching of the two CO2 analysis channels to the infrared gas analyzer (operated in a differential mode) was achieved by solenoid valves, whereas wet and dry-bulb temperatures at chambers' inlet and outlet were measured by low-cost, custom-made thermocouple psychrometers. Whole-vine assimilation rate (WVA) and whole-vine transpiration rate were calculated from the inlet—outlet differences in CO2 and absolute humidity. When compared to assimilation measured on single leaves (SLA) under saturating light at equivalent times, the WVA reduction (area basis) was ≈50%, suggesting that whole-canopy photosynthetic efficiency based on SLA readings can be greatly overestimated.

Design of Full-Digital Measurement and Control System on Grain Situation

2013 ◽  
Vol 765-767 ◽  
pp. 1849-1853
Author(s):  
Xiao Fan Li ◽  
Hui Yuan Li
Keyword(s):  
Control System ◽  
Low Cost ◽  
Network Measurement ◽  
Host Computer ◽  
Digital Measurement ◽  
Measurement And Control System ◽  
Computer Measurement ◽  
Cost Efficient ◽  
And Control ◽  
Measurement And Control

A scheme for measurement and control system on grain situation is presented in this paper. This system is mainly composed of sensor network, measurement and control extension, communication host and host computer. Measurement and control extension centres on microcontroller C8051 to accomplish the measurement of grain temperature and humidity in granary. Instruction is transferred to measurement and control extension by communication host, at the same time, transferring the data measured by extension to host computer. Host computer achieves the regimentation of whole system by applying PC. Compared with traditional ones, this measurement system is much more simple, low-cost, efficient and responsive, with profoundly immediate significance and wide prospect.

Applications of In Situ Ellipsometry in RTP Temperature Measurement and Process Control

1991 ◽  
Vol 224 ◽  
Author(s):  
Hisham Z. Massoud ◽  
Ronald K. Sampson ◽  
Kevin A. Conrad ◽  
Yao-Zhi Hu ◽  
Eugene A. Irene
Keyword(s):  
Temperature Dependence ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Index Of Refraction ◽  
Strong Temperature Dependence ◽  
Heating And Cooling ◽  
Wafer Processing ◽  
And Control ◽  
Measurement And Control

AbstractThe applications of in situ automated ellipsometry in the measurement and control of temperature in rapid-thermal processing (RTP) equipment are investigated. This technique relies on the accurate measurement of the index of refraction of a wafer using ellipsometry and the strong temperature dependence of the index of refraction to determine the wafer temperature. In principle, this technique is not limited to silicon wafer processing and could be applied to any surface whose index of refraction has a strong and well known temperature dependence. This technique is non-invasive, non-contact, fast, accurate, compatible with ultraclean processing, and lends itself to monitoring the dynamic heating and cooling cycles encountered in rapid-thermal processing.

Communications in Process Control (Part 1)

1982 ◽  
Vol 15 (11) ◽  
pp. 427-432
Author(s):  
P. R. Matthews
Keyword(s):  
Process Control ◽  
Low Cost ◽  
Rapid Development ◽  
Transmission Efficiency ◽  
New Techniques ◽  
Communication Techniques ◽  
Arduous Task ◽  
And Control ◽  
Measurement And Control ◽  
Effective Transmission

The last decade has seen many new measurement and control techniques developed. This has been principally due to the development of low cost electronic circuits and, more recently, the microprocessor. As a result of this rapid development the instrument and process control engineer is faced with the arduous task of interfacing new and old equipment with differing transmission and communication requirements. The situation is further complicated by the numerous transmission and communication techniques that are available and the usual dogma of finding differing communication interfaces at either end of the connecting cable. This paper provides an insight to the array of transmission and communication techniques currently in use and looks at new techniques which are being developed. The application of the transmission and communication techniques to process control systems is a subject which is now under careful scrutiny as the establishment of an effective transmission and communication configuration can result in an appreciable cost advantage and increased transmission efficiency. A number of these configurations (networks) are discussed.

scholarly journals Distributed data acquisition and control system based on low cost Embedded Web servers

2011 ◽  
pp. 78-81
Author(s):  
Joby Antony ◽  
Basanta Mahato ◽  
Sachin Sharma ◽  
Gaurav Chitranshi
Keyword(s):  
Control System ◽  
Data Acquisition ◽  
Low Cost ◽  
Data Acquisition System ◽  
Acquisition System ◽  
Web Servers ◽  
Automation And Control ◽  
Distributed Measurement ◽  
And Control ◽  
Measurement And Control

In the present IT age, we are in need of fully automated industrial system. To design of Data Acquisition System (DAS) and its control is a challenging part of any measurement, automation and control system applications. Advancement in technology is very well reflected and supported by changes in measurement and control instrumentation. To move to highspeed serial from Parallel bus architectures has become prevalent and among these Ethernet is the most preferred switched Serial bus, which is forward-looking and backwardcompatible. Great stride have been made in promoting Ethernet use for industrial networks and factory automation. The Web based distributed measurement and control is slowly replacing parallel architectures due to its non-crate architecture which reduces complexities of cooling, maintenance etc. for slow speed field processing. A new kind of expandable, distributed large I/O data acquisition system based on low cost microcontroller based electronic web server[1] boards has been investigated and developed in this paper, whose hardware boards use 8-bit RISC processor with Ethernet controller, and software platform use AVR-GCC for firmware and Python for OS independent man machine interface. This system can measure all kinds of electrical and thermal parameters such as voltage, current, thermocouple, RTD, and so on. The measured data can be displayed on web pages at different geographical locations, and at the same time can be transmitted through RJ-45 Ethernet network to remote DAS or DCS monitoring system by using HTTP protocol. A central embedded single board computer (SBC) can act as a central CPU to communicate between web servers automatically.

scholarly journals Sensor for the Control of Vehicular Gas Turbine Combustors

1971 ◽  
Author(s):  
W. R. Lynn
Keyword(s):  
Gas Turbine ◽  
Low Cost ◽  
Inlet Temperature ◽  
Gas Generator ◽  
Turbine Inlet Temperature ◽  
Loop Control ◽  
Turbine Inlet ◽  
Radiation Sensor ◽  
And Control ◽  
Measurement And Control

The unique control problems associated with vehicular gas turbine engines are forcing the requirement for more direct measurement and control of vehicular gas turbine operating parameters. Two of the most important parameters are gas generator turbine inlet temperature and engine flameout. The major problem controlling these parameters has always been the lack of low cost sensors with sufficient accuracy and response for closed loop control along with the life required for economical operation. Two sensors have been developed which have the necessary response and accuracy for application to vehicular gas turbine controls. These sensors are also rugged and reliable and will provide the required long life. A fluidic temperature sensor measures turbine inlet temperature and an ultraviolet radiation sensor detects the presence of flame. Both sensors have electronic outputs and are readily adaptable to present electronic control systems. The principle of operation, accuracy and response data, along with application and installation information is presented for both sensors.

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