Pad Degradation During CMP Process: Effect of Soak in Slurry and Water on Thermal and Mechanical Properties of the CMP Pads

2003 ◽  
Vol 767 ◽  
Author(s):  
A. Tregub ◽  
G. Ng ◽  
M. Moinpour
Keyword(s):  
Mechanical Properties ◽  
Differential Scanning Calorimetry ◽  
Thermal Gravimetric Analysis ◽  
Mechanical Analysis ◽  
Gravimetric Analysis ◽  
Thermal And Mechanical Properties ◽  
Thermal Gravimetric ◽  
Scanning Calorimetry ◽  
Modulated Differential Scanning Calorimetry ◽  
Thermal Mechanical Analysis

AbstractSoak of polyurethane-based CMP pads in tungsten slurry and de-ionized water and its effect on retention of thermal and mechanical properties of the pads was studied using Dynamic Mechanical Analysis (DMA), Thermal Mechanical Analysis (TMA), Thermal Gravimetric Analysis (TGA), and Modulated Differential Scanning Calorimetry (MDSC). Simultaneous cross-linking and plastisizing due to soak were established using DMA and MDSC analysis. The stable operating temperature range and its dependence on soak time were determined using TMA analysis. Substantial difference in diffusion behavior of the “soft” and “hard” pads was discovered: diffusion into the hard pads followed Fickian law [1], while diffusion into the multi-layer soft pads was dominated by the fast filling of the highly porous pad surface with liquid.During a traditional CMP process, which involves application of polishing pads and slurry, the pad properties can be substantially and irreversibly changed as the result of slurry/rinse water absorption.The retention of the pad properties after exposure was monitored using such thermal and mechanical techniques, as Thermal Mechanical Analysis (TMA), Dynamical Mechanical Analysis (DMA), Modulated Differential Scanning Calorimetry (MDSC), Thermal Gravimetric Analysis (TGA).

Thermal and Mechanical Properties of Cyclized Polybutadiene Dielectrics

1986 ◽  
Vol 76 ◽  
Author(s):  
C. W. Wilkins ◽  
H. E. Bair ◽  
M. G. Chan ◽  
R. S. Hutton
Keyword(s):  
Mechanical Properties ◽  
Differential Scanning Calorimetry ◽  
Physical And Mechanical Properties ◽  
Mechanical Analysis ◽  
Infrared Analysis ◽  
Thermal And Mechanical Properties ◽  
Scanning Calorimetry ◽  
The Difference ◽  
Thermal Mechanical Analysis ◽  
Lower Glass Transition Temperature

ABSTRACTWe have studied some of the physical and mechanical properties of cyclized polybutadiene (CBR) dielectrics by dynamic mechanical analysis, thermal mechanical analysis, thermogravimetry, infrared analysis, and differential scanning calorimetry. Of interest is the difference in properties between thin (<30 μm) films which have been cured under vacuum and those which have been cured in air. Our results indicate that curing under vacuum prevents oxidation and reduces crosslinking. Vacuum cured films have 20% smaller moduli and 200 lower glass transition temperature than do films produced in air.

scholarly journals Thermal analysis of Li2-хNaxGe4O9 glasses crystallization

2020 ◽  
Vol 28 (2) ◽  
pp. 83-86
Author(s):  
A. O. Diachenko ◽  
D. V. Volynets ◽  
M. P. Trubitsyn ◽  
M. D. Volnianskii
Keyword(s):  
Thermal Analysis ◽  
Solid Solution ◽  
Differential Scanning Calorimetry ◽  
Thermal Gravimetric Analysis ◽  
Single Stage ◽  
Gravimetric Analysis ◽  
Thermal Gravimetric ◽  
Glass Crystallization ◽  
Scanning Calorimetry ◽  
Dsc Measurements

The glasses of lithium-sodium tetragermanate LiNaGe4O9 and solid solution Li1.8Na0.2Ge4O9 were prepared by quenching the melt and crystallized on heating. The glass crystallization was controlled by differential scanning calorimetry and thermal gravimetric analysis. The DSC measurements performed in the range 300–1200 K show that the crystallization of the glasses occurs through a single stage. There are no anomalies on TGA dependences. It is assumed that LiNaGe4O9 and Li 1.8Na0.2Ge4O9 glasses crystallize in accordance with a polymorphic mechanism.

The use of bisfuroic acid derivatives in the curing of bismaleimides

1994 ◽  
Vol 6 (3) ◽  
pp. 249-256 ◽  
Author(s):  
D G Hawthorne ◽  
J H Hodgkin ◽  
M B Jackson ◽  
T C Morton
Keyword(s):  
Thermal Stability ◽  
Differential Scanning Calorimetry ◽  
Thermal Behaviour ◽  
Thermal Gravimetric Analysis ◽  
Diels Alder ◽  
Gravimetric Analysis ◽  
Resin System ◽  
Thermal Gravimetric ◽  
Scanning Calorimetry ◽  
Thermal Stability Of

The use of 2,2-bis(4-[(2-carboxy-5-furyl)oxy]phenyl)propane as a Diels-Alder based co-reactant for curing bismaleimides was investigated. Differential scanning calorimetry and thermal gravimetric analysis were used to study the thermal behaviour of this reactant on its own and in the presence of 1,1'-(4methylene-4,1-phenylene)bismaleimide. The range of products formed under different cure conditions was determined by vFnR spectroscopy. The DMTA characteristics and thermal stability of cured laminates made from this resin system have been investigated. It is concluded that the thermal stability and other properties of laminates made from this system are only comparable to those of a typical commercial bismaleimide system.

Studies on bismaleimides and related materials: Part III. Synthesis and characterization of bismaleimiides derived from benzophenone, 1, 2-diphenylethane, 1, 4-diphenylbutane and condensed pyrazines

1994 ◽  
Vol 6 (1) ◽  
pp. 35-41
Author(s):  
P N Prestont ◽  
V K Shaht ◽  
S W Simpsont ◽  
I Soutar ◽  
N J Stewart
Keyword(s):  
Thermal Analysis ◽  
Differential Scanning Calorimetry ◽  
Oxidative Stability ◽  
Thermal Gravimetric Analysis ◽  
Dynamic Mechanical Thermal Analysis ◽  
Synthesis And Characterization ◽  
Gravimetric Analysis ◽  
Thermal Gravimetric ◽  
Scanning Calorimetry

New bismaleimides have been synthesised from diamines derived from benzophenone, 1,2-diphenylethane, 1,4-diphenylbutane, 2, 3-diphenylquinoxaline and 2, 3-diphenylnaphtho[2, 3-b]pyrazine. Cure profiles have been established by both differential scanning calorimetry (Dsc) and dynamic mechanical thermal analysis (DMTA). Cured resins prepared from the bismaleimide monomers were studied by thermal gravimetric analysis (TGA) with all materials exhibiting good thermal and thermo-oxidative stability.

Physico Chemical Characterization of Nanofibrous Poly(Ε-Caprolactone) Electrospun Templates for Cell Adhesion

MRS Advances ◽  
2017 ◽  
Vol 2 (49) ◽  
pp. 2689-2694
Author(s):  
Karla A. Gaspar-Ovalle ◽  
Juan V. Cauich-Rodriguez ◽  
Armando Encinas
Keyword(s):  
Mechanical Properties ◽  
Differential Scanning Calorimetry ◽  
Cell Adhesion ◽  
Tensile Modulus ◽  
Chemical Characterization ◽  
Mechanical Analysis ◽  
Scanning Calorimetry ◽  
Water Contact ◽  
Physico Chemical ◽  
Static Water

ABSTRACTNanofibrous mats of poly ε-caprolactone (PCL) were fabricated by electrospinning. The nanofiber structures were investigated and characterized by scanning electron microscope, differential scanning calorimetry, thermogravimetric analysis, dynamic mechanical analysis, static water-contact-angle analysis and mechanical properties. The results showed that the nanofibrous PCL is an ideal biopolymer for cell adhesion, owing to its biocompatibility, biodegradability, structural stability and mechanical properties. Differential scanning calorimetry results showed that the fibrous structure of PCL does not alter its crystallinity. Studies of the mechanical properties, wettability and degradability showed that the structure of the electrospun PCL improved the tensile modulus, tensile strength, wettability and biodegradability of the nanotemplates. To evaluate the nanofibrous structure of PCL on cell adhesion, osteoblasts cells were seeded on these templates. The results showed that both adhesion and proliferation of the cells is viable on these electrospun PCL membranes. Thus electrospinning is a relatively inexpensive and scalable manufacturing technique for submicron to nanometer diameter fibers, which can be of interest in the commodity industry.

Synthesis, Characterization and Application of Multi-Generations Hyperbranched Polyurethane Based on Isophorone Diisocyanate

2012 ◽  
Vol 554-556 ◽  
pp. 126-129 ◽  
Author(s):  
Shun Yin ◽  
Ning Sun ◽  
Chun Yun Feng ◽  
Zhi Mou Wu ◽  
Zhao Hua Xu ◽  
...  
Keyword(s):  
Differential Scanning Calorimetry ◽  
Raw Materials ◽  
Degradation Mechanism ◽  
Resonance Spectroscopy ◽  
Gravimetric Analysis ◽  
Thermal Gravimetric ◽  
Isophorone Diisocyanate ◽  
Scanning Calorimetry ◽  
Degradation Temperature ◽  
Hyperbranched Polyurethane

A series of different generation hyperbranched polyurethane(HBPU) was synthesized based on the raw materials of isophorone diisocyanate(IPDI) and diethanolamine(DEOA). Their structure, thermal degradation mechanism and glass transition temperature(Tg) were characterized by fourier transform infrared spectroscopy(FTIR), nuclear magnetic resonance spectroscopy(NMR), thermal gravimetric analysis(TGA) and differential scanning calorimetry(DSC). The results showed that: the yield of each generation HBPU was up to 90%, different generation HBPU had almost the same initial degradation temperature(about at 200°C) and they all had two decomposition platforms; with the increase of generation, Tg increased from 107.2°C to 132.1°C. The gloss and hardness of the HBPU coatings were significantly improved.

scholarly journals Application of Differential Scanning Calorimetry (DSC) and Modulated Differential Scanning Calorimetry (MDSC) in Food and Drug Industries

Polymers ◽  
2019 ◽  
Vol 12 (1) ◽  
pp. 5 ◽  
Author(s):  
César Leyva-Porras ◽  
Pedro Cruz-Alcantar ◽  
Vicente Espinosa-Solís ◽  
Eduardo Martínez-Guerra ◽  
Claudia I. Piñón-Balderrama ◽  
...  
Keyword(s):  
Differential Scanning Calorimetry ◽  
Heat Capacity ◽  
Thermomechanical Analysis ◽  
Mechanical Analysis ◽  
Heating Rates ◽  
Scanning Calorimetry ◽  
Modulated Differential Scanning Calorimetry ◽  
Accuracy And Precision ◽  
Wide Range ◽  
Transition Issues

Phase transition issues in the field of foods and drugs have significantly influenced these industries and consequently attracted the attention of scientists and engineers. The study of thermodynamic parameters such as the glass transition temperature (Tg), melting temperature (Tm), crystallization temperature (Tc), enthalpy (H), and heat capacity (Cp) may provide important information that can be used in the development of new products and improvement of those already in the market. The techniques most commonly employed for characterizing phase transitions are thermogravimetric analysis (TGA), dynamic mechanical analysis (DMA), thermomechanical analysis (TMA), and differential scanning calorimetry (DSC). Among these techniques, DSC is preferred because it allows the detection of transitions in a wide range of temperatures (−90 to 550 °C) and ease in the quantitative and qualitative analysis of the transitions. However, the standard DSC still presents some limitations that may reduce the accuracy and precision of measurements. The modulated differential scanning calorimetry (MDSC) has overcome some of these issues by employing sinusoidally modulated heating rates, which are used to determine the heat capacity. Another variant of the MDSC is the supercooling MDSC (SMDSC). SMDSC allows the detection of more complex thermal events such as solid–solid (Ts-s) transitions, liquid–liquid (Tl-l) transitions, and vitrification and devitrification temperatures (Tv and Tdv, respectively), which are typically found at the supercooling temperatures (Tco). The main advantage of MDSC relies on the accurate detection of complex transitions and the possibility of distinguishing reversible events (dependent on the heat capacity) from non-reversible events (dependent on kinetics).

Effect of Meta- and Para-Substitution of the Aromatic Diamines on the Properties of Poly(Amidoimidourethane)

2016 ◽  
Vol 721 ◽  
pp. 23-27 ◽  
Author(s):  
Ilya Kobykhno ◽  
Oleg Tolochko ◽  
Ekaterina Vasilyeva ◽  
Andrei Didenko ◽  
Danila Kuznetcov ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Thermal Analysis ◽  
Differential Scanning Calorimetry ◽  
Thermogravimetric Analysis ◽  
Polymer Structure ◽  
Multiblock Copolymers ◽  
Thermal And Mechanical Properties ◽  
Amino Groups ◽  
Scanning Calorimetry ◽  
Aromatic Diamines

The paper experimentally studies the effect of meta and para- substitution of the amino groups in the diamine used in the synthesis of multiblock copolymers. The way for synthesis of new multiblock copolymers with the possibility of replacing the diamine in the polymer structure was shown. Thermal and mechanical properties of synthesized copolymers had been characterized by means of differential scanning calorimetry, thermogravimetric analysis, dynamic mechanical thermal analysis and by nanoindentation and tensile test.

Preparation of Two Novel Ionic Electroconductive Polyurethanes Functionalized with the Backbone of Ionic Liquid

2013 ◽  
Vol 668 ◽  
pp. 259-262
Author(s):  
Ding Jun Zhang ◽  
Chao Yun Qu ◽  
Yu Xian Chen
Keyword(s):  
Electrical Conductivity ◽  
Differential Scanning Calorimetry ◽  
Ionic Liquid ◽  
Surface Resistance ◽  
High Yield ◽  
Gravimetric Analysis ◽  
Thermal Gravimetric ◽  
Facile Synthesis ◽  
Scanning Calorimetry ◽  
Structures And Properties

The facile synthesis of two new Ionic electroconductive polyurethanes with the framework of ionic liquids, i.e., PUR-T: synthesized with isocyanate TDI; PUR-H: synthesized with isocyanate HDL, are described. Their structures and properties were characterized by Fourier transform infrared spectroscopy (FTIR), thermal gravimetric analysis (TGA), Differential scanning calorimetry (DSC) and the surface resistance meter. The effects of the different kinds of isocyanate on electrical conductivity of PUR were also investigated. It was found that their electrical conductivity can be optimized by changing the reaction temperature. The PUR-H, which exhibits an electrical conductivity of 1.0×104 Ω surface resistance, could be obtained in high yield, up to 65% at 90 oC for 12h.

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