The Development of Scanning Microwave Microscope for High-Throughput Characterization of Dielectric and Conducting Materials at Low Temperatures

2003 ◽  
Vol 804 ◽  
Author(s):  
Sohei Okazaki ◽  
Noriaki Okazaki ◽  
Hidetaka Sugaya ◽  
Xiaoru Zhao ◽  
Ken Hasegawa ◽  
...  

ABSTRACTWe developed a scanning microwave microscope (SμM) designed for characterizing local electric properties at low temperatures. A high-Q λ/4coaxial cavity was used as a sensor probe, which can detect the change of quality factor due to the tip-sample interaction with enough accuracy. From the measurements of combinatorial samples, it was demonstrated that this SμM system has enough performance for high-throughput characterization of sample conductance under variable temperature conditions.

2006 ◽  
Vol 252 (7) ◽  
pp. 2615-2621 ◽  
Author(s):  
Sohei Okazaki ◽  
Noriaki Okazaki ◽  
Xiaoru Zhao ◽  
Hidetaka Sugaya ◽  
Sei-ichiro Yaginuma ◽  
...  

2002 ◽  
Vol 189 (3-4) ◽  
pp. 222-226 ◽  
Author(s):  
Noriaki Okazaki ◽  
Hiroyuki Odagawa ◽  
Yasuo Cho ◽  
Toshihiko Nagamura ◽  
Daisuke Komiyama ◽  
...  

2013 ◽  
Vol 2013 (1) ◽  
pp. 000932-000936
Author(s):  
Maria F. Cordoba-Erazo ◽  
Thomas M. Weller

In this work we demonstrate the use of a high resolution non-contact scanning microwave microscope for characterization of printed resistors. The resonant microwave probe operates at a frequency of 5.73 GHz and it is based on a dielectric resonator coupled to a gold-coated tungsten tip with radius of 200 μm protruding from a cavity wall. Direct print additive manufacturing was used to produce the resistive films. Non-contact measurements of the resonant frequency fr and quality factor Q of the resonant microwave probe at a standoff distance of 20 μm were performed. Quality factor images were obtained over a scan area of 160 μm × 1670 μm in steps of 10 μm. Measurements reveal that Q varies from 214 to 233 over the studied region. In this work, variations in Q are associated with non-uniformities on the resistor surface. The quality factor of the probe was also acquired as a function of the tip-sample distance and measured data was fitted to a polynomial equation. We converted Q images to sheet resistance images using the polynomial equation and the material resistivity (400 Ω/sq/mil). Using the proposed approach, we found that the average sheet resistance over the scan area is Rs = 1027 W/sq and that Rs variations up to 662 Ω/sq, due to non-uniformities in the resistor's thickness, were detected by the microwave microscope. The localized microwave characterization capability demonstrated by the non-contact microscope could be of interest for defect detection in printed microwave circuits.


2005 ◽  
Vol 83 (6-7) ◽  
pp. 1037-1042 ◽  
Author(s):  
Robert K Thomson ◽  
Brian O Patrick ◽  
Laurel L Schafer

A photo and thermally stable bis(amidate)–dibenzyl complex of Hf ([DMP(NO)Ph]2Hf(CH2Ph)2(THF) (2a) was formed as a monosolvated THF adduct in near quantitative yield from Hf(CH2Ph)4 and N-2,6-dimethylphenyl(phenyl)amide (1). Isomerization between the THF-bound product and the THF-free product can be observed visually by the conversion from a red-orange product at low temperatures to a pale yellow product at high temperatures. Solid-state crystallographic characterization of the orange product confirmed its constitution as a monosolvated species. Kinetic parameters for the exchange of the THF moiety were determined from variable-temperature NMR experiments. The product of the hydrolysis of the Hf dibenzyl species by water was characterized by X-ray crystallography, and was found to be a rare tetrametallic Hf oxo cluster species (3).Key words: hafnium, protonolysis, amidate, coordination chemistry, organometallic chemistry, exchange processes.


2005 ◽  
Vol 894 ◽  
Author(s):  
Noriaki Okazaki ◽  
Sohei Okazaki ◽  
Ryota Takahashi ◽  
Makoto Murakami ◽  
Parhat Ahmet ◽  
...  

AbstractWe developed a variable-temperature scanning microwave microscope (VT-SμM) that can perform high-throughput materials characterization in the temperature range between 4K and room temperature. As a sensor probe we used a high-Q coaxial cavity resonator, which was mounted on the low-temperature stage to allow variable-temperature measurements. We carried out systematic studies on the thermal degradation of the conducting polymers using the combinatorial libraries of polyaniline and polythiophene thin films, which showed rapid decrease of conductivity above 300C and 250C, respectively. The low-temperature performance of the VT-SμM was demonstrated by the measurement of composition-spread Nd1-xSrxMnO3 thin film, for which we succeeded in detecting the clear metal-insulator transition at 100K. We also propose a simple and easy method for the quantitative analysis of conductive thin films, by using the standard composition-spread thin films of Ti1-xNbxO2.


2001 ◽  
Vol 700 ◽  
Author(s):  
Noriaki Okazaki ◽  
Parhat Ahmet ◽  
Toyohiro Chikyow ◽  
Hiroyuki Odagawa ◽  
Yasuo Cho ◽  
...  

AbstractA scanning microwave microscope (Sm M) for high-throughput characterization of combinatorial dielectric materials has been developed using a lumped constant resonator probe. The probe consists of a microwave oscillator module equipped with a thin conducting needle and an outer conductor ring, which detects the dielectric constant of the sample just beneath the needle as a frequency shift of the resonator. The quantitative analysis of the dielectric constant for the bulk and the thin-film samples was carried out based on the measurement of gap-length dependence of the frequency shift. The analysis method was successfully applied to the characterization of composition-spread BaxSr1-xTiO3 thin film sample. The evaluation of far-field contribution to the frequency shift was found to be crucial for the accurate determination of dielectric constant especially in the characterization of combinatorial thin films.


Author(s):  
Alfred Ludwig ◽  
Mona Nowak ◽  
Swati Kumari ◽  
Helge S. Stein ◽  
Ramona Gutkowski ◽  
...  

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