The Development of Scanning Microwave Microscope for High-Throughput Characterization of Dielectric and Conducting Materials at Low Temperatures
Keyword(s):
High Q
◽
ABSTRACTWe developed a scanning microwave microscope (SμM) designed for characterizing local electric properties at low temperatures. A high-Q λ/4coaxial cavity was used as a sensor probe, which can detect the change of quality factor due to the tip-sample interaction with enough accuracy. From the measurements of combinatorial samples, it was demonstrated that this SμM system has enough performance for high-throughput characterization of sample conductance under variable temperature conditions.
2006 ◽
Vol 252
(7)
◽
pp. 2615-2621
◽
Keyword(s):
2002 ◽
Vol 189
(3-4)
◽
pp. 222-226
◽
2013 ◽
Vol 2013
(1)
◽
pp. 000932-000936
2017 ◽
Vol 231
◽
pp. 45-52
◽
Keyword(s):