scholarly journals Design and fabrication of the trapezoidal electrostatic comb-drive actuator

2012 ◽  
Vol 34 (4) ◽  
pp. 261-269
Author(s):  
Pham Hong Phuc ◽  
Dinh Khac Toan ◽  
Dang Bao Lam ◽  
Nguyen Tuan Khoa ◽  
Nguyen Tien Dung
Keyword(s):  
Theoretical Analysis ◽  
Electrostatic Force ◽  
Slope Angle ◽  
Driving Voltage ◽  
Comb Drive ◽  
Identical Dimension ◽  
Fabrication And Characterization

This paper reports the design, fabrication and characterization process of the trapezoidal Electrostatic Comb-drive Actuator (ECA) with the slope angle α=20. Together with the trapezoidal ones, the rectangular ECA with identical dimension was also designed and fabricated for comparison purpose. In order to reduce calculating deviation, the fringing effect was also taken into consider while carrying out theoretical analysis. The obtained results pointed out the fact, that the trapezoidal ECA excels the rectangular ones with the same numbers of teeth in electrostatic force and displacement generation, while requires relatively low driving voltage. But it is also observed that with higher driving voltage (larger than 50V), the trapezoidal ECA starts to lose its stability (the lateral pull-in phenomenon occurs).

Design, Fabrication and Characterization of Micromirror Array for Display Application

1999 ◽  
Author(s):  
H. Shin ◽  
H. Ko ◽  
Y. Yoon ◽  
B. Choi
Keyword(s):  
Electrostatic Force ◽  
Point Of View ◽  
Display Device ◽  
Driving Voltage ◽  
Rest Position ◽  
Variable Character ◽  
Series Of Experiments ◽  
Fabrication And Characterization ◽  
Micromirror Array

Abstract A new design of micromachined mirror array for display purpose from Samsung Electronics is presented. Integrating multiple functions into a component and extensive use of photolithography make this design of mirror to be simple as well as easy to make. The prototype is fabricated in an array of 50 × 50 micromirrors. The size of mirror plate is 50 × 50μm2 and the gap between them is 3μm. The mirror plate is tilted by the electrostatic force, and the angle is designed to be 10°. Driving voltage for the finished micromirrors is 28v and the tilt angle is measured as 8.9°. The response time from the rest to full tilt and back to rest position takes about 20μs when it is driven at the natural frequency of 24.7kHz. In the reliability point of view, the importance of anti-stiction coating can not be over stressed. Without one, most of the mirrors couldn’t survive a few contacts with the substrate. However, when proper anti-stiction coating is applied and atmosphere is controlled to eliminate the humidity, 94.6% of micromirrors were still rocking after 1.15 × 1010 cycles. In a series of experiments, it was possible to show this new design of micromirror array could be used as a display device, when they are driven at a certain combination of addressing and bias signals. A variable character generation and PWM-type brightness control is successfully demonstrated.

Characterization of a Non-Interdigitated Comb Drive

2018 ◽  
Author(s):  
Mary Gopanchuk ◽  
Mohamed Arabi ◽  
N. Nelson-Fitzpatrick ◽  
Majed S. Al-Ghamdi ◽  
Eihab Abdel-Rahman ◽  
...  
Keyword(s):  
Quality Factor ◽  
Fundamental Frequency ◽  
High Quality Factor ◽  
Silicon On Insulator ◽  
Comb Drive ◽  
High Quality ◽  
Sensor Applications ◽  
Fabrication And Characterization

This paper reports on the design, fabrication, and characterization of non-interdigitated comb drive actuators in Silicon-on-Insulator (SOI) wafers, using a single mask surface microma-chining process. The response of the actuator is analyzed numerically and experimentally. The results show at the fundamental frequency; it behaves as a longitudinal comb drive actuator. At a higher frequency, it exhibits a high-quality factor which is appropriate for sensor applications.

Out-of-Plane Comb-Drive Lever Actuator

2000 ◽  
Author(s):  
Hung-Yi Lin ◽  
Weileun Fang
Keyword(s):  
Electrostatic Force ◽  
Plane Motion ◽  
Comb Drive ◽  
Out Of Plane ◽  
Gap Closing

Abstract In the present study, an out-of-plane motion actuator driven by the electrostatic force is designed and fabricated. The electrostatic force generated by the gap closing electrodes and the comb electrodes will be studied. Moreover, a lever motion transmitting mechanism is proposed to modulate the motion of the actuators. Although the space between the driving electrodes is limited, the lever motion transmitting mechanism could enlarge the traveling distance. The applications of the out-of-plane motion actuator are remarkably increased due to the assistant of the transmitting mechanism.

scholarly journals Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

Micromachines ◽  
2020 ◽  
Vol 11 (2) ◽  
pp. 210
Author(s):  
Zhihu Ruan ◽  
Xukai Ding ◽  
Zhengcheng Qin ◽  
Jia Jia ◽  
Hongsheng Li
Keyword(s):  
Coriolis Force ◽  
Electrostatic Force ◽  
Structural Characteristics ◽  
Structure Design ◽  
Driving Voltage ◽  
Mode Matching ◽  
Matching Method ◽  
Disk Resonator ◽  
Mode Matching Method ◽  
Automatic Mode

An automatic mode-matching method for MEMS (Micro-electromechanical Systems) disk resonator gyroscopes (DRGs) based on virtual Coriolis force is presented in this paper. For this mode-matching method, the additional tuning electrodes are not required to be designed, which simplifies the structure design. By using the quadratic relationship between the driving voltage and the electrostatic force, the virtual Coriolis force is obtained by applying an AC voltage whose frequency is half of the driving mode resonant frequency to the sense electrode. The phase difference between the virtual Coriolis force and the sense output signal is used for mode-matching. The structural characteristics and electrode distribution of the DRG are briefly introduced. Moreover, the mode-matching theories of the DRG are studied in detail. The scheme of the mode-matching control system is proposed. Simultaneously, the feasibility and effectiveness of the mode-matching method are verified by system simulation. The experimental results show that under the control of mode-matching at room temperature, the bias instability is reduced from 30.7575 ° /h to 2.8331 ° /h, and the Angle Random Walk (ARW) decreases from 1.0208 ° / h to 0.0524 ° / h . Compared with the mode mismatch condition, the ARW is improved by 19.48 times.

The Analysis of Implement of SiPM in LDRI System

2014 ◽  
Vol 556-562 ◽  
pp. 1749-1752
Author(s):  
Yi Shuo Song ◽  
Wei Cai ◽  
Xiao Ping Du
Keyword(s):  
Theoretical Analysis ◽  
High Voltage ◽  
Dynamic Range ◽  
Thermal Protection ◽  
Driving Voltage ◽  
Incident Power ◽  
Key Technology ◽  
Phase Discrimination ◽  
The Mean ◽  
Range Error

LDRI system stands for Laser Dynamic Range Imager. It has been used in STS-114 mission in 2005 as the main sensors to realize an on-orbit inspection of the thermal protection system which covers the Orbiter spacecraft. The basic of LDRI is phase discrimination and the key technology is the realization of optoelectronic mixing (OEM) using ICCD. Unfortunately, 2 main drawbacks arise from the usage of ICCD, including the high voltage (~2000V) of PMT drivers and the difficulties in high voltage modulations. SiPM is a rather novel detector which has the similar performances as PMT does but only requires a driving voltage of about 30V. Recently, the SiPM based OEM has been proved and this implies the implement of SiPM in LDRI system. In this paper, the basic of LDRI and SiPM are summerized and some theoretical analysis and simulations are made to verify the feasibility of implement of SiPM in LDRI system. The results show that SiPM is capable of realizing phase discrimination regardless of the high driving voltage and difficulties in modulations. The mean range error is found to be no more than 0.4mm within a range of 5m and an average incident power of 6nW.

Vibrational Characteristics of Micro Beams

2005 ◽  
Author(s):  
Oladipo Onipede ◽  
Ilya Avdeev ◽  
Amir Khalilollahi ◽  
Lisa Buziewicz
Keyword(s):  
Natural Frequency ◽  
Applied Voltage ◽  
Dynamic Properties ◽  
Electrostatic Force ◽  
Elastic Stiffness ◽  
Critical Parameters ◽  
Driving Voltage ◽  
Mems Devices ◽  
Non Linear ◽  
Voltage Frequency

Several high frequency MEMS devices such as resonators and filters can be modeled as electrostatically driven micro-beams. While their static structural response depends solely on the magnitude of the applied voltage and their elastic stiffness, their dynamic response also depends on their mass, damping properties and the applied voltage frequency. In designing these devices, critical parameters must include the maximum voltage, voltage frequency and the natural frequency of the system. Even though the electrostatic force developed by the voltage is non-linear, the system can be modeled as a harmonic system due to the periodic nature of the response. Results from a non-linear structural-electrostatic dynamic model show the importance of the dynamic properties and the non-linear electrostatic force. The results show significantly lower limiting voltages, especially when the driving voltage is close to the natural frequency of the system. The effect of damping is also addressed.

Study on Effect of Van Der Waals Force and Casimir Force to Microsystem

2013 ◽  
Vol 336-338 ◽  
pp. 944-948
Author(s):  
Yan Wei Guan ◽  
Shi Qiao Gao ◽  
Li Shen ◽  
Yun Li He
Keyword(s):  
Scale Effect ◽  
Relative Motion ◽  
Casimir Force ◽  
Electrostatic Force ◽  
Van Der Waals ◽  
Relative Displacement ◽  
Van Der Waals Force ◽  
Micro Structure ◽  
Comb Drive ◽  
Micro Scale

Based on the electrostatic comb drive structure, the comb will do relative motion when it is driven up, and the space between them will be less than 1μm. Considering the micro-scale effect, the Van der Waals force and the Casimir force is used to analyze the influence on the micro-structure, compared with the electrostatic force. The van der Waals force and the Casimir force is almost equivalent to the electrostatic force when the initial gap of the micro-structure and the relative displacement between the micro-structure is relatively small. Therefore the van der Waals force and the Casimir force play an important role in the micro-structure and cannot be ignored.

scholarly journals Fabrication and Characterization of a Tunable In-plane Resonator with Low Driving Voltage

Sensors ◽  
2009 ◽  
Vol 9 (3) ◽  
pp. 2062-2075 ◽  
Author(s):  
Pin-Hsu Kao ◽  
Ching-Liang Dai ◽  
Cheng-Chih Hsu ◽  
Chi-Yuan Lee
Keyword(s):  
Driving Voltage ◽  
Fabrication And Characterization ◽  
Plane Resonator

scholarly journals Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator

2014 ◽  
Vol 2014 ◽  
pp. 1-8 ◽  
Author(s):  
Megat Muhammad Ikhsan Megat Hasnan ◽  
Mohd Faizul Mohd Sabri ◽  
Suhana Mohd Said ◽  
Nik Nazri Nik Ghazali
Keyword(s):  
Electrostatic Force ◽  
Active Area ◽  
Force Density ◽  
Comb Drive ◽  
Element Analysis ◽  
Actuation Force ◽  
Dimensional Finite Element ◽  
Good Potential ◽  
Branched Structure ◽  
Actuator Design

This paper presents the design and evaluation of a high force density fishbone shaped electrostatic comb drive actuator. This comb drive actuator has a branched structure similar to a fishbone, which is intended to increase the capacitance of the electrodes and hence increase the electrostatic actuation force. Two-dimensional finite element analysis was used to simulate the motion of the fishbone shaped electrostatic comb drive actuator and compared against the performance of a straight sided electrostatic comb drive actuator. Performances of both designs are evaluated by comparison of displacement and electrostatic force. For both cases, the active area and the minimum gap distance between the two electrodes were constant. An active area of 800 × 300 μm, which contained 16 fingers of fishbone shaped actuators and 40 fingers of straight sided actuators, respectively, was used. Through simulation, improvement of drive force of the fishbone shaped electrostatic comb driver is approximately 485% higher than conventional electrostatic comb driver. These results indicate that the fishbone actuator design provides good potential for applications as high force density electrostatic microactuator in MEMS systems.

Sign in / Sign up

Export Citation Format

Share Document