Effect of Oxygen Pressure on Transport Propeties of Al-doped ZnO Films Grown by PED
2012 ◽
Vol 22
(2)
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pp. 155
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Keyword(s):
Al-doped ZnO films were grown by pulsed electron deposition (PED) at room temperature and 400 oC and at the oxygen pressure ranged from 3 mTorr to 20 mTorr. Transport properties were measured by van der Pauw technique. Crystallinity of the films was characterized by X-ray diffraction. It was found that the films grown at room temperature have a very high resistivity due to poor crystallinity. For the films grown at 400 o C, the obtained results indicate that the film grown at a lower pressure has a higher carrier mobility as well as a higher carrier concentration, resulting in a lower resistivity. This phenomenon has been discussed in term of the concentration of oxygen vacancies and the number of traps for carriers.
2012 ◽
Vol 2012
◽
pp. 1-7
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Keyword(s):
2011 ◽
Vol 239-242
◽
pp. 2835-2838
Keyword(s):
2009 ◽
Vol 60
(4)
◽
pp. 214-217
◽
Keyword(s):
2012 ◽
Vol 560-561
◽
pp. 820-824
Keyword(s):