Integration of Numerical Simulation and Flow Visualization in the Design of Equipment for the Manufacture of Submicron Semiconductor Devices
Keyword(s):
Improved room and equipment aerodynamics can have a significant impact on the ability to obtain acceptable yields on high density semiconductor products.1 Goals for the equipment engineer/vendor are presented here, a set of design guidelines is established, and a design and test regimen formulated to achieve aerodynamically acceptable equipment designs is proposed.
2013 ◽
Vol 483
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pp. 75-78
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1982 ◽
Vol 1
(1)
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pp. 1-5
2008 ◽
Vol 575-578
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pp. 959-971
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2014 ◽
Vol 2014
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pp. 1-17
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2020 ◽
Vol 171
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pp. 105391
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Keyword(s):
1992 ◽
Vol 11
(12)
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pp. 1508-1521
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