Nanoprecision Micromechanical Fabrication

2008 ◽  
Vol 2 (1) ◽  
pp. 24-33 ◽  
Author(s):  
Hitoshi Ohmori ◽  
◽  
Weimin Lin ◽  
Yoshihiro Uehara ◽  
Yutaka Watanabe ◽  
...  

ELID grinding is a method that realizes high quality mirror surface grinding in the nanometer order by use of electrolytic dressing metal bonded wheels consisting of fine abrasives. Currently, ELID grinding is increasingly being applied as an ultraprecision grinding method to achieve desired surface roughness, high surface accuracy, high surface quality, and high grinding performance. This paper introduces the ELID grinding and discusses some applications of ELID grinding to mirror surface grinding. For ultraprecision optical components, ultra fine smooth surface quality of sub-nanometer or sub-angstrom in Ra may be required. To satisfy these requirements, ultraprecision on machine measurement system had been developed. Synergistic the nano precision mechanical method, nano precision measurement method with nano resolution machine, the ultraprecision components can successful to fabricate.

2013 ◽  
Vol 581 ◽  
pp. 211-216 ◽  
Author(s):  
Jiří Čop ◽  
Imrich Lukovics

This research paper focuses on grinding of materials used for tools (100Cr6 (CSN 4 14109), X210Cr12 ( CSN 4 19436) and epoxy resin) using grinding wheels from cubic boron nitride and diamond. The disadvantage of grinding of difficult-to-machine materials is higher wear of grinding wheels. The modern grinding wheels are able to achieve high accuracy of dimensions and high surface quality with a smaller wear of grinding wheels then grinding wheels from conventional materials. Correctly selected technological conditions are one of the most important matters to achieve the required surface quality. The main aim of this research is to determine the influence of technological conditions to quality of surface after planar grinding. The research determines the influence of the grain type of grinding wheels, feed rate and cutting depth on the quality of functional surfaces.


2006 ◽  
Vol 532-533 ◽  
pp. 225-228 ◽  
Author(s):  
Wei Liang Zeng ◽  
Zhen Long Wang ◽  
Qiang Gao ◽  
Wen Zhuo Li ◽  
Wan Sheng Zhao

This paper presents new machining technology of micro-EDM with lower working voltage in RC pulse power source. How to control the discharging energy of one pulse supplied by RC power is crucial to the technology of micro-EDM. The process of discharging has been studied, then the feasibility of machining with lower working voltage has been put forward, in order to reduce the discharge energy of one pulse effectively. On the basis of a great deal of experiments, the effect of working voltage on surface quality is studied, also the effect of working voltage on machining efficiency has been found out and been analyzed theoretically. The result shows that lower working voltage can reduce the working energy observably, and then improve the machining surface quality attended by reducing of machining efficiency. However, there is a good machining effect when the working voltage is about 15~20V. Considering working efficiency, a new technology of block electro-discharge grinding (BEDG) with lower working voltage has been applied. As shown by the experimental result with the technology, the minimum diameter of micro-shaft reaches 32m. Moreover, the micro-shaft has very high surface quality of Ra 0.1252m and its coaxial diameter error is controlled within 0.152m.


2011 ◽  
Vol 487 ◽  
pp. 303-307
Author(s):  
Jia Liang Guan ◽  
H.W. Lu ◽  
X.H. Xiao ◽  
Y.C. Wu ◽  
Z.D. Chen

A new way of precision machining was studied through the experiments of Electrolytic In-Process Dressing (ELID) precision grinding and ultra precision lapping and polishing for W-Mo metal alloy. First a 22nm(Ra) surface was obtained through the ELID grinding, last a 11nm(Ra) surface was obtained after the process of lapping and polishing with 0.1~0.3 N/cm2pressure, 60~100 r/min rotational speed and other optimized parameters. Meanwhile, the formation mechanism of ultra precision mirror surface of the alloy was also analyzed. The experiments prove surface quality of the work piece was guaranteed by ELID grinding, and which was also greatly affected by some parameters in lapping and polishing such as pressure, rotational speed.


2004 ◽  
Vol 471-472 ◽  
pp. 317-320 ◽  
Author(s):  
Gui Wen Kang ◽  
Fei Hu Zhang ◽  
Shen Dong

ELID grinding is widely used as a high-productivity and super-precision grinding method for hard and brittle materials. It continues grinding stably with metal bonded diamond wheel due to its in-process dressing. Magnetorheological finishing (MRF) is a novel precision finishing process for hard and brittle materials. In this paper, ELID grinding and MRF are adopted to get high surface quality and remove subsurface damage of hard and brittle materials. The results show that this combination gives attention to both efficiency and quality and can be used to replace conventional optics manufacturing.


2012 ◽  
Vol 268-270 ◽  
pp. 378-381
Author(s):  
Fu Qu ◽  
Jian Zhong Cui

The microstructures of the aluminum billets could be improved markedly by low-frequency electro-magnetic casting (LFEC) processing. In fact, the low-frequency electromagnetic field (LFEF) also has favorite effect on the surface quality of billet. However, few public reports on the surface quality of LFEC aluminum billets could be found. Therefore, a new crystallizer together with a kind of lubricant was designed aiming at lowing surface turning quantity, and the effects of casting velocity, electromagnetic condition and lubrication on the surface quality of aluminum billets were investigated. The results indicate that LFEF together with the lubricate condition would be responsible for the surface quality of the billets, and the high surface quality billets could be achieved by optimizing the casting conditions.


2010 ◽  
Vol 126-128 ◽  
pp. 311-315 ◽  
Author(s):  
Pei Lum Tso ◽  
Yao Cheng Chang

Chemical Mechanical Polishing(CMP) is currently the most effective planarization method used in the semiconductor industry. Because of the continuous improvement of the wafer size and line width, the CMP process must be promoted and improved. Many studies have been undertaken to try and achieve both a high material remval rate (MRR) while maintaing a high surface quality of silicon wafer, however up until this point it appears that the two objectives are mutually exclusive. In this paper, an innovative method which integrated ultrasonic vibration assisted machining and CMP (UCMP) has been developed. With the use of ultrasonic vibration, the CMP efficiency and the quality of ploished suface improves considerably as shown in this paper. The basic principle effects of ultrasonic vibration are further illustrated and the experiments had been done to demostrate the proper procedure. The results showed that UCMP achieves a higher material removal rate (MRR) and better surface quality at the same time.


Author(s):  
Lukas Seeholzer ◽  
Stefan Süssmaier ◽  
Fabian Kneubühler ◽  
Konrad Wegener

AbstractEspecially for slicing hard and brittle materials, wire sawing with electroplated diamond wires is widely used since it combines a high surface quality with a minimum kerf loss. Furthermore, it allows a high productivity by machining multiple workpieces simultaneously. During the machining operation, the wire/workpiece interaction and thus the material removal conditions with the resulting workpiece quality are determined by the material properties and the process and tool parameters. However, applied to machining of carbon fibre reinforced polymers (CFRP), the process complexity potentially increases due to the anisotropic material properties, the elastic spring back potential of the material, and the distinct mechanical wear due to the highly abrasive carbon fibres. Therefore, this experimental study analyses different combinations of influencing factors with respect to process forces, workpiece surface temperatures at the wire entrance, and the surface quality in wire sawing unidirectional CFRP material. As main influencing factors, the cutting and feed speeds, the density of diamond grains on the wire, the workpiece thickness, and the fibre orientation of the CFRP material are analysed and discussed. For the tested parameter settings, it is found that while the influence of the grain density is negligible, workpiece thickness, cutting and feed speeds affect the process substantially. In addition, higher process forces and workpiece surface temperatures do not necessarily deteriorate the surface quality.


Machines ◽  
2021 ◽  
Vol 9 (4) ◽  
pp. 75
Author(s):  
Nikolaos E. Karkalos ◽  
Panagiotis Karmiris-Obratański ◽  
Szymon Kurpiel ◽  
Krzysztof Zagórski ◽  
Angelos P. Markopoulos

Surface quality has always been an important goal in the manufacturing industry, as it is not only related to the achievement of appropriate geometrical tolerances but also plays an important role in the tribological behavior of the surface as well as its resistance to fatigue and corrosion. Usually, in order to achieve sufficiently high surface quality, process parameters, such as cutting speed and feed, are regulated or special types of cutting tools are used. In the present work, an alternative strategy for slot milling is adopted, namely, trochoidal milling, which employs a more complex trajectory for the cutting tool. Two series of experiments were initially conducted with traditional and trochoidal milling under various feed and cutting speed values in order to evaluate the capabilities of trochoidal milling. The findings showed a clear difference between the two milling strategies, and it was shown that the trochoidal milling strategy is able to provide superior surface quality when the appropriate process parameters are also chosen. Finally, the effect of the depth of cut, coolant and trochoidal stepover on surface roughness during trochoidal milling was also investigated, and it was found that lower depths of cut, the use of coolant and low values of trochoidal stepover can lead to a considerable decrease in surface roughness.


2017 ◽  
Vol 36 (3) ◽  
pp. 151-166 ◽  
Author(s):  
Christian Hopmann ◽  
Nicolai Lammert ◽  
Yuxiao Zhang

Thermoplastic foam injection moulding offers various advantages for both processing and product design. Despite its many benefits, the moderate surface quality still constitutes a major disadvantage of this process. The mould temperature can be controlled dynamically to improve the surface quality. Different dynamic temperature control strategies are employed and analysed regarding their effectiveness and scope of application. Mould temperatures above the specific material transition temperatures allow the surface defects to be cured and enable the production of foamed thermoplastic parts with surface qualities comparable to those of the compact reference samples. The high mould temperatures during the injection phase alter the foam structure and the skin layer thicknesses, which impacts the mechanical properties.


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