scholarly journals Efficient in-depth analysis and optimum design parameter estimation of MEMS capacitive pressure sensor utilizing analytical approach for square diaphragm

2021 ◽  
Author(s):  
SUMIT KUMAR JINDAL ◽  
ISHAN PATEL ◽  
KRISH SETHI ◽  
SIMRIT KAUL ◽  
SREEKANTH P K ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Sensors ◽  
Optimal Operation ◽  
Design Parameters ◽  
Capacitive Pressure Sensor ◽  
Computationally Efficient ◽  
Analytical Technique ◽  
Operating Modes ◽  
Depth Analysis ◽  
Piezoresistive Pressure Sensors

Abstract Capacitive pressure sensors have become more popular as compared to piezoresistive pressure sensors as they yield superior sensitivity and lesser non-linearity. Efficient analysis for modelling capacitive pressure sensors is thus increasingly becoming more important due to their innumerable use cases. The higher sensitivity of square diaphragm for the same side length in comparison to circular diaphragm makes it ideal for sensor design. In this work, a complete formulation for analysis of capacitive pressure sensor with the square diaphragm in normal and touch mode operation has been presented as these two modes are established operating modes for these sensors. A comprehensive study of sensor parameters like capacitance, diaphragm deflection, capacitive and mechanical sensitivity has been formulated to aid the choice of sensor characteristics. This work also focuses on the method to determine core design parameters for optimal operation. Computationally complex methods have been used in the past for analysis of square diaphragms. In contrast to the finite element system, the analytical technique proposed in this study is less complex and computationally efficient (FEM). The results were computed and simulated using MATLAB.

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

Assembly and Testing of Surface Micromachined, Piezoresistive Polysilicon Pressure Sensors

1999 ◽  
Author(s):  
Todd F. Miller ◽  
David J. Monk ◽  
Gary O’Brien ◽  
William P. Eaton ◽  
James H. Smith
Keyword(s):  
Pressure Sensor ◽  
Microelectromechanical Systems ◽  
Pressure Sensors ◽  
Single Crystal Silicon ◽  
Surface Micromachining ◽  
Process Technology ◽  
Crystal Silicon ◽  
Noise Characteristics ◽  
Testing Techniques ◽  
Piezoresistive Pressure Sensors

Abstract Surface micromachining is becoming increasingly popular for microelectromechanical systems (MEMS) and a new application for this process technology is pressure sensors. Uncompensated surface micromachined piezoresistive pressure sensors were fabricated by Sandia National Labs (SNL). Motorola packaged and tested the sensors over pressure, temperature and in a typical circuit application for noise characteristics. A brief overview of surface micromachining related to pressure sensors is described in the report along with the packaging and testing techniques used. The electrical data found is presented in a comparative manner between the surface micromachined SNL piezoresistive polysilicon pressure sensor and a bulk micromachined Motorola piezoresistive single crystal silicon pressure sensor.

Modeling and Simulation of the Thermal Drift Characteristics of the Piezoresistive Pressure Sensor

2010 ◽  
Vol 2010 (HITEC) ◽  
pp. 000373-000378
Author(s):  
R. Otmani ◽  
N. Benmoussa ◽  
K. Ghaffour
Keyword(s):  
Thermal Behavior ◽  
Modeling And Simulation ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Thermal Drift ◽  
Piezoresistive Pressure Sensor ◽  
Output Characteristics ◽  
Piezoresistive Pressure Sensors

Piezoresistive pressure sensors based on Silicon have a large thermal drift because of their high sensitivity to temperature (ten times more sensitive to temperature than metals). So the study of the thermal behavior of these sensors is essential to define the parameters that cause the drift of the output characteristics. In this study, we adopted the behavior of 2nd degree gauges depending on the temperature. Then we model the thermal behavior of the sensor and its characteristics.

scholarly journals A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on a Porous Three-Dimensional PDMS/Microsphere Composite

Polymers ◽  
2020 ◽  
Vol 12 (6) ◽  
pp. 1412 ◽  
Author(s):  
Young Jung ◽  
Wookjin Lee ◽  
Kyungkuk Jung ◽  
Byunggeon Park ◽  
Jinhyoung Park ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Sacrificial Layer ◽  
Three Dimensional ◽  
Pressure Sensors ◽  
Capacitive Pressure Sensor ◽  
Mechanical Stimuli ◽  
Highly Sensitive ◽  
Flexible Pressure Sensors ◽  
Fast Rise ◽  
Better Than

In recent times, polymer-based flexible pressure sensors have been attracting a lot of attention because of their various applications. A highly sensitive and flexible sensor is suggested, capable of being attached to the human body, based on a three-dimensional dielectric elastomeric structure of polydimethylsiloxane (PDMS) and microsphere composite. This sensor has maximal porosity due to macropores created by sacrificial layer grains and micropores generated by microspheres pre-mixed with PDMS, allowing it to operate at a wider pressure range (~150 kPa) while maintaining a sensitivity (of 0.124 kPa−1 in a range of 0~15 kPa) better than in previous studies. The maximized pores can cause deformation in the structure, allowing for the detection of small changes in pressure. In addition to exhibiting a fast rise time (~167 ms) and fall time (~117 ms), as well as excellent reproducibility, the fabricated pressure sensor exhibits reliability in its response to repeated mechanical stimuli (2.5 kPa, 1000 cycles). As an application, we develop a wearable device for monitoring repeated tiny motions, such as the pulse on the human neck and swallowing at the Adam’s apple. This sensory device is also used to detect movements in the index finger and to monitor an insole system in real-time.

Design and Optimization of a Highly Sensitive and Linearity Piezoresistive Pressure Sensor Based on a Combination of Cross Beam-Peninsula-Membrane Structure

2017 ◽  
Author(s):  
Tran Anh Vang ◽  
Xianmin Zhang ◽  
Benliang Zhu
Keyword(s):  
Pressure Sensor ◽  
Pressure Sensors ◽  
Single Crystal Silicon ◽  
High Sensitivity ◽  
Crystal Silicon ◽  
Nonlinearity Error ◽  
Trade Off ◽  
Design And Optimization ◽  
Piezoresistive Pressure Sensor ◽  
Piezoresistive Pressure Sensors

The sensitivity and linearity trade-off problem has become the hotly important issues in designing the piezoresistive pressure sensors. To solve these trade-off problems, this paper presents the design, optimization, fabrication, and experiment of a novel piezoresistive pressure sensor for micro pressure measurement based on a combined cross beam - membrane and peninsula (CBMP) structure diaphragm. Through using finite element method (FEM), the proposed sensor performances as well as comparisons with other sensor structures are simulated and analyzed. Compared with the cross beam-membrane (CBM) structure, the sensitivity of CBMP structure sensor is increased about 38.7 % and nonlinearity error is reduced nearly 8%. In comparison with the peninsula structure, the maximum non-linearity error of CBMP sensor is decreased about 40% and the maximum deflection is extremely reduced 73%. Besides, the proposed sensor fabrication is performed on the n-type single crystal silicon wafer. The experimental results of the fabricated sensor with CBMP membrane has a high sensitivity of 23.4 mV/kPa and a low non-linearity of −0.53% FSS in the pressure range 0–10 kPa at the room temperature. According to the excellent performance, the sensor can be applied to measure micro-pressure lower than 10 kPa.

scholarly journals Investigation of High Sensitivity Piezoresistive Pressure Sensors for -0.5…+0.5 kPa

2021 ◽  
Author(s):  
Mikhail Basov ◽  
Denis Prigodskiy
Keyword(s):  
Pressure Sensor ◽  
Thermal Hysteresis ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Differential Pressure ◽  
Sensor Chip ◽  
Burst Pressure ◽  
Average Sensitivity ◽  
Optimum Geometry ◽  
Piezoresistive Pressure Sensors

Abstract The investigation of the pressure sensor chip’s design developed for operation in ultralow differential pressure ranges has been conducted. The optimum geometry of a membrane has been defined using available technological resources. The pressure sensor chip with an area of 6.15х6.15 mm has an average sensitivity S of 34.5 mV/кPa/V at nonlinearity 2KNL = 0.81 %FS and thermal hysteresis up to 0.6 %FS was created. Owing to the chip connection with stop elements, the burst pressure reaches 450 кPa.

scholarly journals Investigation of High Sensitivity Piezoresistive Pressure Sensors for -0.5…+0.5 kPa

2021 ◽  
Author(s):  
Mikhail ◽  
Denis Prigodskiy
Keyword(s):  
Automotive Industry ◽  
Pressure Sensor ◽  
Thermal Hysteresis ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Burst Pressure ◽  
Average Sensitivity ◽  
Optimum Geometry ◽  
Developed Pressure ◽  
Piezoresistive Pressure Sensors

The investigation of the pressure sensor chip's design developed for operation in ultralow differential pressure ranges has been conducted. The optimum geometry of a diaphragm has been defined using available technological resources. The pressure sensor chip with an area of 6.15 × 6.15 mm has an average sensitivity S of 34.5 mV/ κPa/V at nonlinearity 2K NL = 0.81 %FS and thermal hysteresis up to 0.6 %FS was created. Owing to the chip connection with stop elements, the burst pressure reaches 450 κPa. The developed pressure sensor can be used in medicine, automotive industry and highly specialized scientific developments.

Static and Total Pressure Sensor Development Methodology based on Elastic Sensing Elements and Optical Rules

2021 ◽  
pp. 33-50
Author(s):  
R.A. Borisov ◽  
I.V. Antonets ◽  
A.V. Krotov
Keyword(s):  
Pressure Sensor ◽  
Total Pressure ◽  
Air Flow ◽  
Experimental Studies ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Measurement Range ◽  
Design Parameters ◽  
Signal System ◽  
Digital Information

Information on the parameters of static atmospheric pressure and total pressure of the incoming air flow is the primary information in the air signal system, which is part of the integrated aircraft control system. This information makes it possible to calculate the altitude and speed of the aircraft for automated and automatic control. Static and total pressures are measured by aerometric parameter sensors, whose technical characteristics largely determine the range and values of the measurement accuracy of the air signal system. Relying on the requirements for aircraft flight safety and in accordance with the existing standards for horizontal and vertical separation, rather stringent requirements are imposed on the accuracy of air pressure measurement. Instrumental errors in measuring static and total air flow pressures with a probability of 0.95 should not exceed 0.02 and 0.05 % of the measurement range. The considered original aerometric pressure sensor based on an optical rule, whose high sensitivity requires minimal deformation of the elastic sensitive element, makes it possible to fulfill these requirements. The non-contact digital information retrieval and the operation of the information system under vacuum conditions significantly increased the efficiency of measurement processes. The paper focuses on an algorithm for calculating the main design parameters of elastic sensitive elements in almost the entire range of their standard sizes taking into account the technical capabilities of the secondary converter. The results of the experiments and experimental studies confirmed the sufficiency of theoretical methods for calculating the parameters of elastic elements for pressure sensors

scholarly journals Modeling of a square-shape ZnO, ZnS and AlN membrane for mems capacitive pressure-sensor applications

2020 ◽  
Vol 11 ◽  
pp. 14
Author(s):  
Ahmad Dagamseh ◽  
Qais Al-Bataineh ◽  
Zaid Al-Bataineh ◽  
Nermeen S. Daoud ◽  
Ahmad Alsaad ◽  
...  
Keyword(s):  
Thermal Stress ◽  
Pressure Sensor ◽  
Membrane Structure ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Membrane Thickness ◽  
Capacitive Pressure Sensor ◽  
The Finite Element Method ◽  
Sensor Applications ◽  
Opposite Behavior

In this paper, mathematical modeling and simulation of a MEMS-based clamped square-shape membrane for capacitive pressure sensors have been performed. Three types of membrane materials were investigated (i.e. Zinc Oxide (ZnO), Zinc Sulfide (ZnS) and Aluminum Nitride (AlN)). Various performance parameters such as capacitance changes, deflection, nonlinearity, the sensitivity of the membrane structure for different materials and film-thicknesses have been considered using the Finite Element Method (FEM) and analytically determined using the FORTRAN environment. The simulation model outperforms in terms of the effective capacitance value. The results show that the membrane deflection is linearly related to the applied pressure. The ZnS membrane provides a capacitance of 0.023 pico-Farad at 25 kPa with a 42.5% relative capacitance changes to reference capacitance. Additionally, the results show that for ZnO and AlN membranes the deflection with no thermal stress is higher than that with thermal stress. However, an opposite behavior for the ZnS membrane structure has been observed. The mechanical and capacitance sensitivities are affected by the membrane thickness as the capacitance changes are inversely proportional to the membrane thickness. Such results open possibilities to utilize various materials for pressure sensor applications by means of the capacitance-based detection technique.

A capacitive sensor using resin thermoplastic elastomer and carbon fibers for monitoring pressure distribution

2020 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Guanzheng Wu ◽  
Siming Li ◽  
Jiayu Hu ◽  
Manchen Dong ◽  
Ke Dong ◽  
...  
Keyword(s):  
Electrical Conductivity ◽  
Carbon Fibers ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Thermoplastic Elastomer ◽  
Gauge Factor ◽  
Capacitive Pressure Sensor ◽  
Wearable Electronics ◽  
Content Type

Purpose This paper aims to study the working principle of the capacitive pressure sensor and explore the distribution of pressure acting on the surface of the capacitor. Herein, a kind of high sensitivity capacitive pressure sensor was prepared by overlaying carbon fibers (CFs) on the surfaces of the thermoplastic elastomer (TPE), the TPE with high elasticity is a dielectric elastomer for the sensor and the CFs with excellent electrical conductivity were designed as the conductor. Design/methodology/approach Due to the excellent mechanical properties and electrical conductivity of CFs, it was designed as the conductor layer for the TPE/CFs capacitive pressure sensor via laminating CFs on the surfaces of the columnar TPE. Then, a ‘#' type structure of the capacitive pressure sensor was designed and fabricated. Findings The ‘#' type of capacitive pressure sensor of TPE/CFs composite was obtained in high sensitivity with a gauge factor of 2.77. Furthermore, the change of gauge factor values of the sensor under 10 per cent of applied strains was repeated for 1,000 cycles, indicating its outstanding sensing stability. Moreover, the ‘#' type capacitive pressure sensor of TPE/CFs was consisted of several capacitor arrays via laminating CFs, which could detect the distribution of pressure. Research limitations/implications The TPE/CFs capacitive pressure sensor was easily fabricated with high sensitivity and quick responsiveness, which is desirably applied in wearable electronics, robots, medical devices, etc. Originality/value The outcome of this study will help to fabricate capacitive pressure sensors with high sensitivity and outstanding sensing stability.

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