Low Energy Xe+ PFIB Specimen Preparation for Cs-Corrected HRSTEM Imaging

2019 ◽  
Author(s):  
Lucille A. Giannuzzi ◽  
Paul A. Anzalone ◽  
Jiancun Rao ◽  
Tom Hoffman ◽  
Mike McKie ◽  
...  
Keyword(s):  
Surface Quality ◽  
Low Energy ◽  
Ex Situ ◽  
Specimen Preparation ◽  
Dumbbell Structure

Abstract Low energy (i.e., 5 keV, 3 keV) Xe+ plasma FIB methods were applied to Si ex situ lift out specimens. Cs-corrected STEM imaging reveals the Si dumbbell structure indicating excellent surface quality achieved during the low energy polishing steps.

TEM Sample Preparation by Single-Sided Low-Energy Ion Beam Etching

2011 ◽  
Author(s):  
Liew Kaeng Nan ◽  
Lee Meng Lung
Keyword(s):  
Sample Preparation ◽  
Semiconductor Device ◽  
Ion Beam ◽  
Critical Dimension ◽  
Low Energy ◽  
Ex Situ ◽  
Good Image Quality ◽  
Ion Beam Etching ◽  
Device Structures ◽  
Common Technique

Abstract Conventional FIB ex-situ lift-out is the most common technique for TEM sample preparation. However, the scaling of semiconductor device structures poses great challenge to the method since the critical dimension of device becomes smaller than normal TEM sample thickness. In this paper, a technique combining 30 keV FIB milling and 3 keV ion beam etching is introduced to prepare the TEM specimen. It can be used by existing FIBs that are not equipped with low-energy ion beam. By this method, the overlapping pattern can be eliminated while maintaining good image quality.

On the Contrast of Precipitates Observed with a FE-SEM

1999 ◽  
Vol 5 (S2) ◽  
pp. 316-317
Author(s):  
Raynald Gauvin ◽  
Pierre Hovington
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Simulations ◽  
Low Energy ◽  
Specimen Preparation ◽  
Significant Finding ◽  
Experimental Demonstration ◽  
Preparation Techniques

It has been shown recently that precipitates as small as 10 nm can be imaged with a FE-SEM using a Through-The-Lens (TTL) SE detector or the so-called Upper Detector (UD). This is a very significant finding because normally, such small precipitates are observed in the TEM where specimen preparation techniques are generally a timely process. However, from Monte Carlo simulations using CASINO, it has been shown that NbC precipitates embedded in Fe as small than 6 nm can be imaged with BE. The experimental demonstration was difficult because no good BSE detectors were available at that time for low energy work.Recently, a new BSE detector has been developed for low energy work from the GW corporation, the Centaurus BSE detector. This detector is coupled with an HITACHI S-4700 FESEM In this work, images of Mg2Zn precipitates in Al obtained with the UD and the Centaurus BSE detector are compared.

In Situ Nitride Growth Studies by Low Energy Electron Microscopy (LEEM) and Low Energy Electron Diffraction (LEED)

1997 ◽  
Vol 3 (S2) ◽  
pp. 611-612
Author(s):  
E. Bauer ◽  
A. Pavlovska ◽  
I.S.T. Tsong
Keyword(s):  
Low Energy ◽  
Energy Electron ◽  
Ex Situ ◽  
Electron Microscopic ◽  
Insulating Layer ◽  
Light Emitting ◽  
Surface Sensitivity ◽  
Microscopic Studies ◽  
Low Energy Electron

Nitride films play an increasing role in modern electronics, for example silicon nitride as insulating layer in Si-based devices or GaN in blue light emitting diodes and lasers. For this reason they have been the subject of many ex situ electron microscopic studies. A much deeper understanding of the growth of these important materials can be obtained by in situ studies. Although these could be done by SEM, LEEM combined with LEED is much better suited because of its excellent surface sensitivity and diffraction contrast. We have in the past studied the high temperture nitridation of Si(l11) by ammonia (NH3)and the growth of GaN and A1N films on Si(l11) and 6H-SiC(0001) by depositing Ga and Al in the presence of NH3 and will report some of the results of this work for comparison with more recent work using atomic nitrogen instead of NH3.

Observation of the evolution of 55-atom icosahedral Ag clusters by coherent electron nanodiffraction in a UHV stem

1994 ◽  
Vol 52 ◽  
pp. 788-789
Author(s):  
J. Liu ◽  
G. E. Spinnler
Keyword(s):  
Carbon Film ◽  
Beam Current ◽  
Scanning Transmission Electron Microscope ◽  
Nano Particles ◽  
Ex Situ ◽  
Beam Current Density ◽  
Unstable State ◽  
Specimen Preparation ◽  
Probe Size ◽  
Scanning Transmission

The morphology of metallic nano particles fluctuates and rapidly changes under the influence of electron beam irradiation. Structural transformations of small Au particles and disordering of small Pt clusters have been reported. Although the existence of a quasimolten state in nano particles has been experimentally observed there are still many unanswered questions concerning the onset of this unstable state. The previous experiments were carried out in non-UHV microscopes and the particles were prepared ex situ. We report preliminary observations of the evolution of clean Ag nano particles in a UHV scanning transmission electron microscope (STEM).The experiments were performed on a UHV STEM (VG HB-501S), known by the acronym MIDAS (Microscope for Imaging, Diffraction and Analysis of Surfaces). The probe size used for nanodiffraction was approximately 1 nm in diameter with a beam current density of 104 A/cm2. Silver nano particles were formed by evaporating Ag onto a pre-cleaned thin (< 5 nm in thickness) carbon film inside the UHV specimen preparation chamber attached to the MIDAS column.x

Ion Milling of Ex-Situ Lift-Out FIB Specimens

2017 ◽  
Author(s):  
M.J. Campin ◽  
C.S. Bonifacio ◽  
M. Boccabella ◽  
P.E. Fischione ◽  
H.H. Kang
Keyword(s):  
Semiconductor Industry ◽  
Carbon Support ◽  
Low Energy ◽  
Ex Situ ◽  
Narrow Beam ◽  
Ion Milling ◽  
New Methods ◽  
Tem Lamella

Abstract The semiconductor industry is constantly investigating new methods that can improve both the quality of TEM lamella and the speed at which they can be created. To improve throughput, a combination of FIB-based preparation and ex situ lift-out (EXLO) techniques have been used. Unfortunately, the carbon support on the EXLO grid presents problems if the lamella needs to be thinned once it is on the grid. In this paper, we present low-energy (&lt;1 keV), narrow-beam (&lt;1 μm diameter), Ar+ ion milling as a method of preparing electron-transparent and gallium-free EXLO FIB specimens

Prediction and Optimization of Parameters for the Al5083/ B4C Composite Wear Rate

2020 ◽  
Vol 16 (4) ◽  
pp. 584-594
Author(s):  
Ram Singh ◽  
Malik Shadab ◽  
Rabisankar Debnath ◽  
Ram Naresh Rai
Keyword(s):  
Wear Rate ◽  
Applied Load ◽  
Influencing Factor ◽  
Electrical Contact ◽  
Stir Casting ◽  
Ex Situ ◽  
Wear Testing ◽  
Specimen Preparation ◽  
Sliding Speed ◽  
Casting Technique

Background: Al5083 has been basically used in marine and aerospace applications where it is intended for higher corrosion resistance and better weldability. Again this, Al5083 matrix has not been suitable for various other applications such as electrical contact brushes, cylinder liners, artificial joints and helicopter blades due to its poor wear resistance properties. Objective: The aim of this research is the optimization of wear rate of the composite with Al5083 matrix, reinforced with B4C (Boron carbide) particles, and it is achieved through the investigation of the subsequent effect: wt.% of the reinforcement, applied load and sliding speed. Methods: The material used for specimen is Al5083 and Al5083/B4C composite which is melted at 750°C in an induction furnace; the composite is prepared by stir casting technique. It was developed by an ex-situ technique. The liquid melt poured into preheated cast iron mould for carrying out the specimen preparation of wear testing. Results: The wear rate of Al5083/B4C composite is less than Al5083, the most influencing factor on wear rate is applied load and mechanism of deformation induced in the sliding surface of the pin was analysed by SEM (scanning electron microscope). Conclusion: Wear rate of Al5083 and Al5083/B4C composite increases with the increase of applied load, sliding speed and decreases as the wt. % B4C increases. The contribution of applied load is more in wear rate as compared to the other two factors and the value predicted by Taguchi, obtained by RSM (Response surface methodology) and evaluated by experiment are almost similar.

Aerosol Phase Generation of Indium–Selenide Nanoparticles

2006 ◽  
Vol 6 (3) ◽  
pp. 600-611 ◽  
Author(s):  
Zs. Geretovszky ◽  
K. Deppert ◽  
L. S. Karlsson ◽  
M. N. A. Karlsson ◽  
J.-O. Malm ◽  
...  
Keyword(s):  
Heat Treatment ◽  
Sample Surface ◽  
Ex Situ ◽  
Particle Sizes ◽  
Small Particles ◽  
Intrinsic Structure ◽  
Se Nanoparticles ◽  
Indium Nanoparticles ◽  
Dumbbell Structure

Results on the generation and heat treatment of In–Se nanoparticles, made by heterogeneous condensation of selenium on indium nanoparticles synthesised via the evaporation/condensation route are reported. In-situ aerosol measurements are complemented with ex-situ analysis, to provide structural, morphological, and compositional information on the In–Se nanoparticles. Our results indicate that prior to heat treatment In–Se nanoparticles have a shape in the aerosol phase, similar to an asymmetric dumbbell. The bigger particle of the dumbbell structure is made up of amorphous Se, while the overall composition of the polycrystalline smaller particle is around InSe. The smaller particle has an intrinsic structure, and consists of different InSe-compounds, with a decreasing In content towards the shell. The shape of the In–Se nanoparticles is different in the aerosol phase and on the surface of the samples. The observed variety of particle sizes and shapes on the sample surface is shown to be partly due to the agglomeration of the aerosol phase binaries (i.e., dumbbells) via coalescence on the surface of the sample and wetting of the sample surface by the Se nanoparticles. These processes make the bigger particle of the dumbbell structure appear almost perfectly hemispherical on the sample surfaces. During heat treatment at lower temperatures mainly the evaporative removal of the big Se particle of the dumbbell structure will take place. Annealing of the smaller particles starts to dominate at temperatures above 240 °C and makes the composition of the small particles closer to that of the thermodynamically most favoured In2Se3.

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