scholarly journals In-Situ Electrical Biasing of Electrically Connected TEM Lamellae with Embedded Nanodevices

2021 ◽  
Author(s):  
Maria Brodovoi ◽  
Kilian Gruel ◽  
Lucas Chapuis ◽  
Aurélien Masseboeuf ◽  
Cécile Marcelot ◽  
...  
Keyword(s):  
Electric Fields ◽  
High Performance ◽  
Low Cost ◽  
Electron Holography ◽  
Device Architecture ◽  
Quantitative Studies ◽  
Transmission Electron ◽  
Microelectronics Industry

Abstract In response to a continually rising demand for high performance and low-cost devices, and equally driven by competitivity, the microelectronics industry excels in meeting innovation challenges and further miniaturizing products. However, device shrinkage and the increasing complexity of device architecture require local quantitative studies. In this paper, we demonstrate with a case study on a nanocapacitor, the capability of transmission electron microscopy in electron holography mode to be a unique in-situ technique for mapping electric fields and charge distributions on a single device.

In situ observations of electromigration induced void behavior

1995 ◽  
Vol 53 ◽  
pp. 244-245
Author(s):  
T. Marieb ◽  
J. C. Bravman ◽  
P. Flinn ◽  
D. Gardner ◽  
M. Madden
Keyword(s):  
Electron Microscopy ◽  
Void Nucleation ◽  
Plan View ◽  
Transmission Electron ◽  
Nucleation Sites ◽  
Microelectronics Industry ◽  
In Situ Observations ◽  
Backscatter Electron Detector ◽  
Voltage Scanning

Electromigration and stress voiding have been active areas of research in the microelectronics industry for many years. While accelerated testing of these phenomena has been performed for the last 25 years[1-2], only recently has the introduction of high voltage scanning electron microscopy (HVSEM) made possible in situ testing of realistic, passivated, full thickness samples at high resolution.With a combination of in situ HVSEM and post-testing transmission electron microscopy (TEM) , electromigration void nucleation sites in both normal polycrystalline and near-bamboo pure Al were investigated. The effect of the microstructure of the lines on the void motion was also studied.The HVSEM used was a slightly modified JEOL 1200 EX II scanning TEM with a backscatter electron detector placed above the sample[3]. To observe electromigration in situ the sample was heated and the line had current supplied to it to accelerate the voiding process. After testing lines were prepared for TEM by employing the plan-view wedge technique [6].

To Eliminate Curtain Effect of FIB TEM Samples by a Combination of Sample Dicing and Backside Milling

2014 ◽  
Author(s):  
Jian-Shing Luo ◽  
Hsiu Ting Lee
Keyword(s):  
Sample Preparation ◽  
Focused Ion Beam ◽  
Preparation Method ◽  
Low Cost ◽  
Ion Beam ◽  
Sample Preparation Method ◽  
Site Specific ◽  
Dual Beam ◽  
Transmission Electron

Abstract Several methods are used to invert samples 180 deg in a dual beam focused ion beam (FIB) system for backside milling by a specific in-situ lift out system or stages. However, most of those methods occupied too much time on FIB systems or requires a specific in-situ lift out system. This paper provides a novel transmission electron microscopy (TEM) sample preparation method to eliminate the curtain effect completely by a combination of backside milling and sample dicing with low cost and less FIB time. The procedures of the TEM pre-thinned sample preparation method using a combination of sample dicing and backside milling are described step by step. From the analysis results, the method has applied successfully to eliminate the curtain effect of dual beam FIB TEM samples for both random and site specific addresses.

Fim/Iap/Tem Studies of Ion Implanted Nickel Emitters

1984 ◽  
Vol 41 ◽  
Author(s):  
S. D. Walck ◽  
J. J. Hren
Keyword(s):  
Electric Fields ◽  
Depth Profiling ◽  
Atom Probe ◽  
Hydrogen Trapping ◽  
Transmission Electron ◽  
Microscope Imaging ◽  
Important Field ◽  
High Electric Fields ◽  
Field Ion Microscope

AbstractAccurate depth profiling of implanted hydrogen and its isotopes in metals is extremely important. Field ion microscopy and atom-probe techniques provide the most accurate depth profiling analytical method of any available. In addition, they are extremely sensitive to hydrogen. This paper reports our early work on hydrogen trapping at defects in metals using the Field Ion Microscope/Imaging Atom Probe (FIM/IAP). Our results deal primarily with the control experiments required to overcome instrumental difficulties associated with in situ implantation and the influence of a high electric field. Transmission Electron Microscopy (TEM) has been used extensively to independently examine the influence of high electric fields on emitters.

A novel 3D porous electrode of polyaniline and PEDOT:PSS coated SiNWs for low-cost and high-performance supercapacitors

2021 ◽  
Author(s):  
Xiaojuan Shen ◽  
Xuan Zhang ◽  
Tongfei Wang ◽  
Songjun Li ◽  
Zhaoqiang Li
Keyword(s):  
High Performance ◽  
Solution Method ◽  
In Situ Polymerization ◽  
Low Cost ◽  
Porous Electrode ◽  
Simple Solution ◽  
Porous Si ◽  
Supercapacitor Electrode

In this study, a novel 3D porous Si-based supercapacitor electrode was developed by the simple solution method, which involved firstly the in-situ polymerization of polyaniline particles (PANI) on the Si...

Applying multi-scale silica-like three-dimensional networks in PEO matrix via in-situ crosslinking for high-performance solid composite electrolyte

2021 ◽  
Author(s):  
Jiawei Wu ◽  
Jing Chen ◽  
Xiaodong Wang ◽  
An'an Zhou ◽  
Zhenglong Yang
Keyword(s):  
Solid State ◽  
High Performance ◽  
Low Cost ◽  
Three Dimensional ◽  
Electrochemical Stability ◽  
Composite Electrolyte ◽  
Solid State Electrolyte ◽  
Multi Scale ◽  
In Situ Crosslinking

For the higher safety and energy density, solid-state electrolyte with better mechanical strength, thermal and electrochemical stability is a perfect choice. To improve the performance of PEO, usage of low-cost...

Complex optical elements for scanning helium microscopy through 3D printing

2021 ◽  
Author(s):  
Matthew Bergin ◽  
Thomas Myles ◽  
Aleksandar Radić ◽  
Christopher Hatchwell ◽  
Sam Lambrick ◽  
...  
Keyword(s):  
3D Printing ◽  
Multiple Scattering ◽  
Low Cost ◽  
Optical Element ◽  
Next Generation ◽  
Background Signal ◽  
Optical Elements ◽  
Cost Components

Abstract Developing the next generation of scanning helium microscopes requires the fabrication of optical elements with complex internal geometries. We show that resin stereolithography (SLA) 3D printing produces low-cost components with the requisite convoluted structures whilst achieving the required vacuum properties, even without in situ baking. As a case study, a redesigned pinhole plate optical element of an existing scanning helium microscope was fabricated using SLA 3D printing. In comparison to the original machined component, the new optical element minimised the key sources of background signal, in particular multiple scattering and the secondary effusive beam.

Growth and Characterization of Cobalt-filled Carbon Nanotubes Prepared by a Simple Catalytic Method

2003 ◽  
Vol 776 ◽  
Author(s):  
Xicheng Ma ◽  
Yuanhua Cai ◽  
Xia Li ◽  
Ning Lun ◽  
Shulin Wen
Keyword(s):  
Carbon Nanotubes ◽  
Metallic Nanoparticles ◽  
Low Cost ◽  
Catalytic Method ◽  
Selected Area Electron Diffraction ◽  
Transmission Electron ◽  
High Resolution Tem ◽  
One Step

AbstractHigh-quality cobalt-filled carbon nanotubes (CNTs) were prepared in situ in the decomposition of benzene over Co/silica-gel nano-scale catalysts. Unlike the previous reports, the catalysts needn't be pre-reduced prior to the forming of Co-filled CNTs, thus the advantage of this method is that Co-filled CNTs can be produced in one step, at a relatively low cost. Transmission electron microscopy (TEM) investigation showed that the products contained abundance of CNTs and most of them were filled with metallic nanoparticles or nanorods. High-resolution TEM (HRTEM), selected area electron diffraction (SAED) patterns and energy dispersive X-ray spectroscopy (EDS) confirmed the presence of Co inside the nanotubes. The encapsulated Co was further identified always as high temperature alpha-Co phase with fcc structure, which frequently consists of twinned boundaries and stacking faults. Based on the experimental results, a possible growth mechanism of the Co-filled CNTs was proposed.

An Easy Preparation of Hybrid SiO2@Poly Acrylic Acid Nanoparticles

2013 ◽  
Vol 475-476 ◽  
pp. 1340-1343
Author(s):  
Hai Wang Wang ◽  
Xiu Juan Ding ◽  
Jie Sun ◽  
Jin Peng Luan
Keyword(s):  
Acrylic Acid ◽  
High Performance ◽  
In Situ Polymerization ◽  
Polymer Materials ◽  
Performance Ratio ◽  
Nanometer Materials ◽  
Transmission Electron ◽  
Comprehensive Performance ◽  
Nanometer Particles

Nanometer materials are widely used in the modification of polymer materials such as polypropylene because of its unique performance. nanocomposite material,which expended the application field of polymer ,is a kind of new composite materials with high performance ratio and widely application prospect .This paper adopted the surface-initiated technology to coat and modify the surface of nanosilica,which solved the problem of the agglomeration and interface compatibility of the nanometer particles and improved its dispersion in the acrylic acid,then prepared SiO2/PAA nanocomposite .The composite was characterized by infrared spectrum and transmission electron microscopy (TEM) ,etc.The research results showed that the nanocomposite prepared by in-situ polymerization technology had higher toughness ,strength and more excellent comprehensive performance.

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