scholarly journals Design and Fabrication of Pneumatically Actuated Valveless Pumps

Micromachines ◽  
2021 ◽  
Vol 13 (1) ◽  
pp. 16
Author(s):  
Jr-Lung Lin
Keyword(s):  
Lower Layer ◽  
Check Valve ◽  
Maximum Flow ◽  
Driving Frequency ◽  
Deformation Characteristics ◽  
Exit Channel ◽  
Thin Membrane ◽  
Outlet Port ◽  
Valveless Pump ◽  
Valveless Pumps

In this study, a valveless pump was successfully designed and fabricated for the purpose of medium transportation. Different from traditional pumps, the newly designed pump utilizes an actuated or a deflected membrane, and it serves as the function of a check valve at the same time. For achieving the valveless property, an inlet or outlet port positioned in an upper- or lower-layer thin membrane was designed to be connected to an entrance or exit channel. Theoretical analysis and numerical simulation were conducted simultaneously to investigate the large deformation characteristics of the membranes and to determine the proper location of the inlet or outlet port on the proposed pump. Then, the valveless pump was fabricated on the basis of the proposed design. In the experiment, the maximum flow rate of the proposed pump exceeded 12.47 mL/min at a driving frequency of 5.0 Hz and driving pressure of 68.95 kPa.

The Influence of Passive Valve Characteristics on the Performance of a Piezo Pump

2013 ◽  
Author(s):  
Jean-Paul Henderson ◽  
Andrew Plummer ◽  
D. Nigel Johnston ◽  
Chris Bowen
Keyword(s):  
Flow Rate ◽  
Check Valve ◽  
Driving Frequency ◽  
Hydraulic Actuator ◽  
Orifice Area ◽  
Low Duty Cycle ◽  
Pump Flow Rate ◽  
Piezoelectric Stack Actuator ◽  
High Temperature Rise ◽  
Expected Increase

In this study, a piezoelectric stack actuator is used to oscillate a piston in a single cylinder pump. The pump is intended to directly supply a hydraulic actuator for motion control, and power output of about 1kW is targeted. Flow rectification is achieved by the use of passive check valves. The valve resonant frequency is found to have a significant effect on output flow. The expected increase in pump flow rate with driving frequency has been confirmed in simulation to hold true in a certain frequency range only. In addition, check valve size and therefore orifice area has to be adequate in order not to prohibitively restrict flow. Valve spring stiffness and valve mass need to be simultaneously optimized for the area of the valve to achieve the highest flow rate. Calculations indicate that there is a power limitation due to the high current demand and also a high temperature rise for a large continuously operated piezo stack. Thus the piezo pump appears more promising for smaller scale applications, and those that require intermittent power (i.e. a low duty cycle).

Design and Fabrication of the Piezoelectrically Actuated Micropump with Implanted Check Valves

2013 ◽  
Vol 284-287 ◽  
pp. 2032-2036
Author(s):  
Chiang Ho Cheng ◽  
Yi Pin Tseng
Keyword(s):  
Stainless Steel ◽  
Flow Rate ◽  
Steel Substrate ◽  
Check Valve ◽  
Maximum Flow ◽  
Mems Fabrication ◽  
Sinusoidal Waveform ◽  
Nickel Electroforming ◽  
Bridge Type ◽  
Type Check

This paper aims to present the design, fabrication and test of a novel piezoelectrically actuated, check valve embedded micropump having the advantages of miniature size, light weight and low power consumption. The micropump consists of a piezoelectric actuator, a stainless steel chamber layer with membrane, two stainless steel channel layers with two valve seats, and a nickel check valve layer with two bridge-type check valves. The check valve layer was fabricated by nickel electroforming process on a stainless steel substrate. The chamber and the channel layer were made of the stainless steel manufactured using the lithography and etching process based on MEMS fabrication technology. The effects of check valve thickness, operating frequency and back pressure on the flow rate of the micropump are investigated. The micropump with check valve 20 μm in thickness obtained higher output values under the sinusoidal waveform of 120 Vpp and 160 Hz. The maximum flow rate and backpressure are 1.82 ml/min and 32 kPa, respectively.

Experimental Study on Small Hydraulic Pump Using Visualization Technique

2019 ◽  
Author(s):  
Jangmi Woo ◽  
Yeonghyeon Gim ◽  
Dong Kee Sohn ◽  
Han Seo Ko
Keyword(s):  
Flow Rate ◽  
Smart Materials ◽  
Maximum Flow ◽  
Sine Wave ◽  
Piezo Actuator ◽  
Driving Frequency ◽  
Hydraulic Pump ◽  
Recent Developments ◽  
Reed Valve ◽  
Critical Components

Abstract Recent developments of smart materials such as piezo devices have been applied to small hydraulic pumps, enabling to meet various demands. For the compact pump, the valves are critical components in the aspect of fluid dynamics. In this study, the flow inside the reed valve port driven by the piezo actuator was experimentally observed. When a sine wave with a driving frequency of 90 Hz was applied, the maximum flow rate could be obtained. It was found that the developed flow opposite to the outlet direction at the root portion of the valve prevented further increase of the flow rate according to the operating frequency.

The Fabrication and Test of a Phase-Change Micropump

2001 ◽  
Author(s):  
Hyeun Joong Yoon ◽  
Woo Young Sim ◽  
Sang Sik Yang
Keyword(s):  
Phase Change ◽  
Flow Rate ◽  
Flow Characteristics ◽  
Check Valve ◽  
Maximum Flow ◽  
Input Voltage ◽  
Working Fluid ◽  
Duty Ratio ◽  
Boron Diffusion ◽  
Change Type

Abstract This paper presents the fabrication and test of a phase-change type micropump with two aluminum flap valves. This micropump consists of a pair of Al flap valves and a phase-change type actuator. The actuator is composed of a heater, a silicone rubber diaphragm and a working fluid chamber. The diaphragm is actuated by the vaporization and the condensation of the working fluid. The micropump is fabricated by the anisotropic etching, the boron diffusion and the metal evaporation. The dimension of the micropump is 8.5 mm × 5 mm × 1.7 mm. The forward and the backward flow characteristics of the flap valve illustrate the appropriateness as a check valve. Also, the flow rate of the micropump is measured. When the square wave input voltage of 10 V is applied to the heater, the maximum flow rate of the micropump is 6.1 μl/min at 0.5 Hz and the duty ratio of 60% for zero pressure difference.

A PZT Micropump With Planar Passive Valves and its Flow Measurements

2009 ◽  
Author(s):  
Chia-Jui Hsu ◽  
Horn-Jiunn Sheen
Keyword(s):  
Flow Rate ◽  
Excitation Frequency ◽  
Maximum Flow ◽  
Driving Frequency ◽  
Flow Measurements ◽  
Piv Measurements ◽  
Optimum Flow Rate ◽  
Micro Piv ◽  
Valve Motion ◽  
Pumping Efficiency

In this paper, a simply-designed reciprocating-type micropump is presented. We also report the coupling effects between the valve motion and the flow behaviors, which were studied using a micro-PIV technique. The fluids were easily driven by a PZT plate and net flow was directed toward the outlet after rectification by two planar passive valves. The results revealed that good pumping performance was obtained even at a low excitation voltage of 10V. The optimum flow rate was measured at a frequency of 0.8kHz and the maximum flow rate was 275μl/min at 30V. The micropump was uniquely characterized by the existence of a linear relationship between the flow rate and the driving frequency, which enabled this micropump to be easily operated and controlled. The experimental results showed that the micropump was reliable in terms of the high linearity and repeatability, which is very favorable for portable microfluidic systems. The micro-PIV measurements of the transient motions of the valve and the flow behaviors clearly revealed that the valve efficiency depended on the mass inertia of the moving part, excitation frequency, and voltage. The present results are useful for the optimum design of this planar passive valve to improve the pumping efficiency.

A MEMS-Based PDMS Micropump Utilizing Electromagnetic Actuation and Planar In-Contact Check Valves

2010 ◽  
Vol 139-141 ◽  
pp. 1574-1577 ◽  
Author(s):  
Jun Hui Ni ◽  
Bei Zhi Li ◽  
Jian Guo Yang
Keyword(s):  
Flow Rate ◽  
System Integration ◽  
Low Cost ◽  
Check Valve ◽  
Driving Frequency ◽  
Reliable Operation ◽  
Electromagnetic Actuation ◽  
Functional Layer ◽  
Flow Channels ◽  
Potential Use

This paper presents a novel low-cost poly(dimethylsiloxane) (PDMS) micropump with simple planar design featuring use of compliant in-contact check valves for reliable operation and easy system integration. The micropump mainly consists of two PDMS functional layers: one through-opening layer incorporating the planar in-contact check valves, pump chamber and flow channels, and the other thin membrane layer covering the chamber with a miniature permanent magnet on top for actuation. A special clamping molding technique was used to fabricate the through-opening functional layer, with which the flap-stopper based planar check valve was manipulated to contact each other enabling the minimized leakage flow. The micropump was then characterized by investigating the dependence of pumping flow rate on the driving frequency and backpressure. Testing results exhibit that the micropump is able to produce a flow rate at least of 3.0 μL/min, and work reliably against a backpressure of 1900 Pa, demonstrating the feasibility of this micropump for potential use in various lab-on-a-chip systems.

Comprehensive Investigation of Diffuser/Nozzle Element at Low Reynolds Number Aimed at Valveless Pump Design

2015 ◽  
Vol 07 (04) ◽  
pp. 1550058 ◽  
Author(s):  
Jiaqi Wang ◽  
K. C. Aw ◽  
Andrew McDaid ◽  
Rajnish N. Sharma
Keyword(s):  
Reynolds Number ◽  
Low Reynolds Number ◽  
Selection Criterion ◽  
Operational Parameters ◽  
Pump Design ◽  
Half Angle ◽  
Valveless Pump ◽  
Flow Through ◽  
Valveless Pumps ◽  
Low Reynolds

The performance of diffuser/nozzle element in valveless pumps depends upon a number of geometrical and operational parameters. In this study, the characteristics of low Reynolds number (Re < 100) flow through conical and planar diffuser/nozzle elements with varying half-angle and area ratio (AR) were investigated with simulations and experiments. The optimal half-angle, at which maximum diffuser efficiency occurs, was found to decrease with Reynolds number for both conical and planar elements. Therefore, the results provide a selection criterion for a diffuser/nozzle pair in a valveless micropump design, where no such criterion is available so far.

scholarly journals A large opening and high flow rate  piezoelectric pump with straight arm wheeled check valve

2020 ◽  
Author(s):  
Lipeng He ◽  
Xiaoqiang Wu ◽  
Zhe Wang ◽  
Da Zhao ◽  
Jianming Wen ◽  
...  
Keyword(s):  
Flow Rate ◽  
Cooling System ◽  
Check Valve ◽  
Maximum Flow ◽  
Low Flow ◽  
Piezoelectric Pump ◽  
Cooling Systems ◽  
Microelectronic Devices ◽  
Valve Opening ◽  
Large Opening

Abstract Piezoelectric pumps are applied in cooling systems of microelectronic devices because of their small size. However, cooling efficiency is limited by low flow rate. A Straight arm wheeled check valve made of silica gel was proposed, which can improve flow rate of piezoelectric pump, solve the influence of glue aging on the sealing ability of a wheeled check valve and reduce the size of piezoelectric pump. This paper discusses the influence of valve arm number (N=2, 3 and 4), valve arm width (W=1.0, 1.2 and 1.4mm) and valve thickness (T=0.6, 0.8 and 1.0mm) on flow rate characteristics of piezoelectric pumps. When valve opening rises, the flow rate increases. The simulation results show that valves with 2 valve arms, 0.6mm valve thickness and 1.0mm valve arm width have maximum valve opening. Experimental results show that piezoelectric pumps with different valve parameters have different optimal frequencies. In addition, maximum flow rate is 431.6mL/min at 220V and 70Hz. This paper provides a reference for the application of piezoelectric pump in cooling system.

A piezoelectric micro gas compressor with parallel-serial hybrid chambers

2021 ◽  
pp. 1045389X2110639
Author(s):  
Song Chen ◽  
Zhen He ◽  
Chaoping Qian ◽  
Jianping Li ◽  
Zhonghua Zhang ◽  
...  
Keyword(s):  
Flow Rate ◽  
Maximum Flow ◽  
Stage I ◽  
Stage Ii ◽  
Driving Voltage ◽  
Driving Frequency ◽  
Output Pressure ◽  
New Ideas ◽  
Further Development ◽  
Large Flow

A piezoelectric micro gas compressor with parallel-serial hybrid chambers (PMGCPS) is presented, which consists of two compression stages of stage I and stage II. The stage I is composed of two piezoelectric driving units connected in parallel, while stage II is composed of a piezoelectric driving unit, forming an integral tower compression structure. Based on the tower compression structure, the PMGCPS owns the dual advantages of large flow rate and high output pressure. The prototype of PMGCPS is designed and manufactured. The driving frequency and voltage characteristics of PMGCPS are experimented. Under the driving frequency of 300 Hz and the driving voltage of 300 Vpp, the maximum flow rate and output pressure of PMGCPS is 795.6 mL/min and 13.4 kPa, respectively. PMGCPS provides new ideas for the further development of piezoelectric micro gas compressor.

scholarly journals Performance of single piezoelectric vibrator micropump with check valve

2019 ◽  
Vol 31 (1) ◽  
pp. 117-126 ◽  
Author(s):  
Jingshi Dong ◽  
Yi Cao ◽  
Quanqu Chen ◽  
Yue Wu ◽  
Rui Gang Liu ◽  
...  
Keyword(s):  
Check Valve ◽  
Maximum Flow ◽  
Mass Separation ◽  
Dominant Factor ◽  
Inertia Force ◽  
Maximum Output ◽  
Sinusoidal Voltage ◽  
Piezoelectric Pump ◽  
Opening Displacement ◽  
Piezoelectric Vibrator

A new single vibrator piezoelectric micropump which integrated the check valve and the piezoelectric oscillator is designed in this research. The micropump mainly consists of a circular piezoelectric vibrator, a polyethylene terephthalate check valve, two rubber sealing rings, upper pump cover, and lower pump cover. In this research, in order to study output performance of the single vibrator piezoelectric pump, theoretical analysis and experimental verification of the piezoelectric pump check valve have been carried out by exploiting the method of check valves and vibrator mass separation. Experimental results show that the opening of the check valve is mainly caused by the pressure difference and the inertia force. The dominant factor of check valve opening is different under different drive frequencies. A maximum opening displacement of 19.625 μm of the check valve is obtained when the micropump is driven by a sinusoidal voltage of 60 V at 300 Hz. In addition, the maximum flow rate of 2034.7 mL min−1 is obtained when the micropump is driven by a sinusoidal voltage of 60 V at 320 Hz, and a maximum output pressure of 0.82 kPa is obtained when the micropump is driven by a sinusoidal voltage of 60 V at 140 Hz.

Sign in / Sign up

Export Citation Format

Share Document