A piezoelectric micro gas compressor with parallel-serial hybrid chambers

2021 ◽  
pp. 1045389X2110639
Author(s):  
Song Chen ◽  
Zhen He ◽  
Chaoping Qian ◽  
Jianping Li ◽  
Zhonghua Zhang ◽  
...  
Keyword(s):  
Flow Rate ◽  
Maximum Flow ◽  
Stage I ◽  
Stage Ii ◽  
Driving Voltage ◽  
Driving Frequency ◽  
Output Pressure ◽  
New Ideas ◽  
Further Development ◽  
Large Flow

A piezoelectric micro gas compressor with parallel-serial hybrid chambers (PMGCPS) is presented, which consists of two compression stages of stage I and stage II. The stage I is composed of two piezoelectric driving units connected in parallel, while stage II is composed of a piezoelectric driving unit, forming an integral tower compression structure. Based on the tower compression structure, the PMGCPS owns the dual advantages of large flow rate and high output pressure. The prototype of PMGCPS is designed and manufactured. The driving frequency and voltage characteristics of PMGCPS are experimented. Under the driving frequency of 300 Hz and the driving voltage of 300 Vpp, the maximum flow rate and output pressure of PMGCPS is 795.6 mL/min and 13.4 kPa, respectively. PMGCPS provides new ideas for the further development of piezoelectric micro gas compressor.

scholarly journals Research on a Piezoelectric Pump with Flexible Valves

2021 ◽  
Vol 11 (7) ◽  
pp. 2909
Author(s):  
Weiqing Huang ◽  
Liyi Lai ◽  
Zhenlin Chen ◽  
Xiaosheng Chen ◽  
Zhi Huang ◽  
...  
Keyword(s):  
Flow Rate ◽  
Fluid Transport ◽  
Smooth Transition ◽  
Driving Voltage ◽  
Piezoelectric Pump ◽  
Venous Valve ◽  
Output Pressure ◽  
Small Flow ◽  
Working Principle ◽  
Opening And Closing

Imitating the structure of the venous valve and its characteristics of passive opening and closing with changes in heart pressure, a piezoelectric pump with flexible valves (PPFV) was designed. Firstly, the structure and the working principle of the PPFV were introduced. Then, the flexible valve, the main functional component of the pump, was analyzed theoretically. Finally, an experimental prototype was manufactured and its performance was tested. The research proves that the PPFV can achieve a smooth transition between valved and valveless by only changing the driving signal of the piezoelectric (PZT) vibrator. The results demonstrate that when the driving voltage is 100 V and the frequency is 25 Hz, the experimental flow rate of the PPFV is about 119.61 mL/min, and the output pressure is about 6.16 kPa. This kind of pump can realize the reciprocal conversion of a large flow rate, high output pressure, and a small flow rate, low output pressure under the electronic control signal. Therefore, it can be utilized for fluid transport and pressure transmission at both the macro-level and the micro-level, which belongs to the macro–micro combined component.

scholarly journals Improving Output Performance of a Resonant Piezoelectric Pump by Adding Proof Masses to a U-Shaped Piezoelectric Resonator

Micromachines ◽  
2021 ◽  
Vol 12 (5) ◽  
pp. 500
Author(s):  
Jian Chen ◽  
Wenzhi Gao ◽  
Changhai Liu ◽  
Liangguo He ◽  
Yishan Zeng
Keyword(s):  
Flow Rate ◽  
Maximum Flow ◽  
Working Fluid ◽  
Driving Voltage ◽  
Piezoelectric Resonator ◽  
Piezoelectric Pump ◽  
Compact Structure ◽  
Output Performance ◽  
Volume Efficiency ◽  
Working Efficiency

This study proposes the improvement of the output performance of a resonant piezoelectric pump by adding proof masses to the free ends of the prongs of a U-shaped piezoelectric resonator. Simulation analyses show that the out-of-phase resonant frequency of the developed resonator can be tuned more efficiently within a more compact structure to the optimal operating frequency of the check valves by adjusting the thickness of the proof masses, which ensures that both the resonator and the check valves can operate at the best condition in a piezoelectric pump. A separable prototype piezoelectric pump composed of the proposed resonator and two diaphragm pumps was designed and fabricated with outline dimensions of 30 mm × 37 mm × 54 mm. Experimental results demonstrate remarkable improvements in the output performance and working efficiency of the piezoelectric pump. With the working fluid of liquid water and under a sinusoidal driving voltage of 298.5 Vpp, the miniature pump can achieve the maximum flow rate of 2258.9 mL/min with the highest volume efficiency of 77.1% and power consumption of 2.12 W under zero backpressure at 311/312 Hz, and the highest backpressure of 157.3 kPa under zero flow rate at 383 Hz.

Experimental Study on Small Hydraulic Pump Using Visualization Technique

2019 ◽  
Author(s):  
Jangmi Woo ◽  
Yeonghyeon Gim ◽  
Dong Kee Sohn ◽  
Han Seo Ko
Keyword(s):  
Flow Rate ◽  
Smart Materials ◽  
Maximum Flow ◽  
Sine Wave ◽  
Piezo Actuator ◽  
Driving Frequency ◽  
Hydraulic Pump ◽  
Recent Developments ◽  
Reed Valve ◽  
Critical Components

Abstract Recent developments of smart materials such as piezo devices have been applied to small hydraulic pumps, enabling to meet various demands. For the compact pump, the valves are critical components in the aspect of fluid dynamics. In this study, the flow inside the reed valve port driven by the piezo actuator was experimentally observed. When a sine wave with a driving frequency of 90 Hz was applied, the maximum flow rate could be obtained. It was found that the developed flow opposite to the outlet direction at the root portion of the valve prevented further increase of the flow rate according to the operating frequency.

scholarly journals DNA Printing Integrated Multiplexer Driver Microelectronic Mechanical System Head (IDMH) and Microfluidic Flow Estimation

Micromachines ◽  
2020 ◽  
Vol 12 (1) ◽  
pp. 25
Author(s):  
Jian-Chiun Liou ◽  
Chih-Wei Peng ◽  
Philippe Basset ◽  
Zhen-Xi Chen
Keyword(s):  
Mechanical System ◽  
Flow Rate ◽  
Pulse Width ◽  
Flow Distribution ◽  
Internal Flow ◽  
Maximum Flow ◽  
Maximum Flow Rate ◽  
Driving Voltage ◽  
Generation Process ◽  
Injection Nozzle

The system designed in this study involves a three-dimensional (3D) microelectronic mechanical system chip structure using DNA printing technology. We employed diverse diameters and cavity thickness for the heater. DNA beads were placed in this rapid array, and the spray flow rate was assessed. Because DNA cannot be obtained easily, rapidly deploying DNA while estimating the total amount of DNA being sprayed is imperative. DNA printings were collected in a multiplexer driver microelectronic mechanical system head, and microflow estimation was conducted. Flow-3D was used to simulate the internal flow field and flow distribution of the 3D spray room. The simulation was used to calculate the time and pressure required to generate heat bubbles as well as the corresponding mean outlet speed of the fluid. The “outlet speed status” function in Flow-3D was used as a power source for simulating the ejection of fluid by the chip nozzle. The actual chip generation process was measured, and the starting voltage curve was analyzed. Finally, experiments on flow rate were conducted, and the results were discussed. The density of the injection nozzle was 50, the size of the heater was 105 μm × 105 μm, and the size of the injection nozzle hole was 80 μm. The maximum flow rate was limited to approximately 3.5 cc. The maximum flow rate per minute required a power between 3.5 W and 4.5 W. The number of injection nozzles was multiplied by 100. On chips with enlarged injection nozzle density, experiments were conducted under a fixed driving voltage of 25 V. The flow curve obtained from various pulse widths and operating frequencies was observed. The operating frequency was 2 KHz, and the pulse width was 4 μs. At a pulse width of 5 μs and within the power range of 4.3–5.7 W, the monomer was injected at a flow rate of 5.5 cc/min. The results of this study may be applied to estimate the flow rate and the total amount of the ejection liquid of a DNA liquid.

A PZT Micropump With Planar Passive Valves and its Flow Measurements

2009 ◽  
Author(s):  
Chia-Jui Hsu ◽  
Horn-Jiunn Sheen
Keyword(s):  
Flow Rate ◽  
Excitation Frequency ◽  
Maximum Flow ◽  
Driving Frequency ◽  
Flow Measurements ◽  
Piv Measurements ◽  
Optimum Flow Rate ◽  
Micro Piv ◽  
Valve Motion ◽  
Pumping Efficiency

In this paper, a simply-designed reciprocating-type micropump is presented. We also report the coupling effects between the valve motion and the flow behaviors, which were studied using a micro-PIV technique. The fluids were easily driven by a PZT plate and net flow was directed toward the outlet after rectification by two planar passive valves. The results revealed that good pumping performance was obtained even at a low excitation voltage of 10V. The optimum flow rate was measured at a frequency of 0.8kHz and the maximum flow rate was 275μl/min at 30V. The micropump was uniquely characterized by the existence of a linear relationship between the flow rate and the driving frequency, which enabled this micropump to be easily operated and controlled. The experimental results showed that the micropump was reliable in terms of the high linearity and repeatability, which is very favorable for portable microfluidic systems. The micro-PIV measurements of the transient motions of the valve and the flow behaviors clearly revealed that the valve efficiency depended on the mass inertia of the moving part, excitation frequency, and voltage. The present results are useful for the optimum design of this planar passive valve to improve the pumping efficiency.

Valveless Micropump with Saw-Tooth Microchannel

2014 ◽  
Vol 613 ◽  
pp. 228-235 ◽  
Author(s):  
Ying Hua Xu ◽  
Wei Ping Yan ◽  
Li Guo
Keyword(s):  
Flow Rate ◽  
Maximum Flow ◽  
Width Ratio ◽  
Driving Voltage ◽  
Tooth Structure ◽  
Valveless Micropump ◽  
Micro Pump ◽  
Pump Flow Rate ◽  
Mems Technology ◽  
Micro Total Analysis Systems

The micropump is the executive component in a microfluidic chip which impels the sample to flow. Its performance directly affects the precision and reliability of Micro Total Analysis Systems (μTAS), and it also plays a key role in the targeting transport of trace substances. The single and double chamber valveless micropumps with saw-tooth microchannel were designed. The saw-tooth diffuser/nozzle pipe was fabricated on chrome glass substrate using MEMS technology and the pump diaphragm was manufactured by PMMA material. The piezoelectric bimorph with cantilever beam was adopted as driving pump actuator and PDMS material as pump diaphragm. The valveless micropumps for both single and double chambers were formed with different saw-tooth structure parameters. The flow rate increased about 25% when the sidewall of microchannel changed from smooth to saw-tooth, and with the driving voltage increasing, the positive and negative flow difference of saw-tooth diffuser/nozzle pipe increased significantly, so does the micro pump flow rate. The best diffused angle θ was determined by the microchannel length L of saw-tooth diffuser/nozzle pipe, and the micro pump operated with its maximum flow rate only when the length-width ratio A reached the best value. The flow rate of a saw-tooth diffuser/nozzle valveless micropump with parallel double chambers increased approximately 30% than that of a single chamber.

scholarly journals Modeling, Vibration Analysis and Fabrication of Micropumps Based on Piezoelectric Transducers

2020 ◽  
Vol 25 (3) ◽  
pp. 383-391
Author(s):  
Yanfang Guan ◽  
Xiangxin Meng ◽  
Yansheng Liu ◽  
Mingyang Bai ◽  
Fengqian Xu
Keyword(s):  
Flow Rate ◽  
Forced Vibration ◽  
Sine Wave ◽  
Piezoelectric Transducers ◽  
Driving Voltage ◽  
Driving Frequency ◽  
External Diameter ◽  
Maximum Displacement ◽  
Wave Signal ◽  
Before And After

The parametric and vibrational characteristics of PZTs (Piezoelectric Transducers) with different diameters before and after coupling are discussed by finite element analysis. It is shown that the vibration stability of the piezoelectric transducer decreases with increasing driving frequency. The PZT's variation of maximum displacement with frequency shows the same trend for different driving conditions according to vibration measurement under conditions of both free and forced vibration (before and after sealing with the pump body). The maximum displacement under forced vibration is less than that under free vibration. The maximum displacement is inversely proportional to the diameter of the transducer and directly proportional to the driving voltage under both free and forced vibration. Micropumps with diffuser/nozzle microvalves are designed and fabricated with different external diameters of the PZTs. Finally, the flow rate and pressure of the micropumps are measured, which are consistent with the vibrational results. Moreover, the maximum displacement is larger under a square-wave driving signal, followed by a sine-wave signal, and then a triangle-wave signal. For a PZT with an external diameter of $12$ mm, the maximum flow rate and pressure value are $150$~$upmu$l/min and $346$ Pa, respectively, under sine-wave driving at $100$ Vpp driving voltage.

Electroosmotic Pumps Fabricated From Porous Silicon Membranes

2004 ◽  
Author(s):  
Shuhuai Yao ◽  
Alan M. Myers ◽  
Jonathan D. Posner ◽  
Juan G. Santiago
Keyword(s):  
Porous Silicon ◽  
Flow Rate ◽  
Maximum Flow ◽  
Applied Potential ◽  
Flow Rates ◽  
Pump Performance ◽  
Silicon Membranes ◽  
Electroosmotic Pumps ◽  
The Impact ◽  
Large Flow

Large flow rates per applied potential are obtained from electroosmotic (EO) pumps fabricated from n-type porous silicon. Porous silicon membranes have ideal geometries for EO pumping. These membranes have hexagonally packed, uniform pores with near-unity tortuosity and are well suited to maximize flow rate for a given applied voltage. The 350 μm thick membranes were passivated with a SiO2 layer and exhibit a maximum flow rate of 1.2 ml/min/cm2/V. This is 4.4 times higher than previously demonstrated silica-based frit EO pumps. LPCVD polysilicon deposition followed by wet oxidation was used to control the pore size. The impact of these coatings on the pump performance has also been characterized.

scholarly journals Miniature 3D-Printed Centrifugal Pump with Non-Contact Electromagnetic Actuation

Micromachines ◽  
2019 ◽  
Vol 10 (10) ◽  
pp. 631
Author(s):  
Luca Joswig ◽  
Michael J. Vellekoop ◽  
Frieder Lucklum
Keyword(s):  
Hydrostatic Pressure ◽  
Flow Rate ◽  
Permanent Magnets ◽  
Maximum Flow ◽  
Electromagnetic Actuation ◽  
Flow Rates ◽  
Output Pressure ◽  
Hall Effect Sensor ◽  
3D Printed ◽  
Dynamic Pump

We present a miniature 3D-printed dynamic pump using the centrifugal operating principle. Dynamic pumps typically yield higher flow rates than displacement pumps at reasonable output pressure. Realizing smaller devices suitable for millifluidic and microfluidic applications brings challenges in terms of design, fabrication and actuation. By using microstereolithography printing we have reduced the overall size to an effective pumping volume of 2.58 mL. The free-moving rotor consists of an impeller and permanent magnets embedded during the printing process, which allow for non-contact electromagnetic actuation. The pump is driven by periodically switching the current through stator coils, controlled by a custom built circuit using a Hall effect sensor. It achieves a maximum flow rate of 124 mL/min and a hydrostatic pressure of up to 2400 Pa.

Design and Test of Piezoelectric Resonant Diaphragm Air Pump

2012 ◽  
Vol 220-223 ◽  
pp. 539-542
Author(s):  
Hai Feng Xie ◽  
Zhi Gang Yang ◽  
Meng Jie
Keyword(s):  
Temperature Change ◽  
Flow Rate ◽  
Maximum Flow ◽  
Radius Ratio ◽  
Experimental Results ◽  
Maximum Flow Rate ◽  
Driving Ability ◽  
Driving Voltage

To improve the driving ability of gas and light fluid which is sensitive to the temperature change, based on the system resonant principle a novel kind of piezoelectric resonant diaphragm air pump has been proposed. Experimental results indicate that the maximum flow rate is 1650ml/min when the sinusoidal AC driving voltage is 200v, the vibrating spring thickness is 0.6mm, the adjusting spring thickness is 1.4mm, and it was 0.5 as the radius ratio of the rigidity transfer vibration piston and the diaphragm.

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