scholarly journals In Situ Study of the Impact of Aberration-Corrected Electron-Beam Lithography on the Electronic Transport of Suspended Graphene Devices

Nanomaterials ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 666
Author(s):  
Naomi Mizuno ◽  
Fernando Camino ◽  
Xu Du
Keyword(s):  
Electron Beam ◽  
Electronic Transport ◽  
Electron Beam Lithography ◽  
High Energy ◽  
Suspended Graphene ◽  
Local Exposure ◽  
Non Local ◽  
The Impact ◽  
Aberration Corrected

The implementation of aberration-corrected electron beam lithography (AC-EBL) in a 200 keV scanning transmission electron microscope (STEM) is a novel technique that could be used for the fabrication of quantum devices based on 2D atomic crystals with single nanometer critical dimensions, allowing to observe more robust quantum effects. In this work we study electron beam sculpturing of nanostructures on suspended graphene field effect transistors using AC-EBL, focusing on the in situ characterization of the impact of electron beam exposure on device electronic transport quality. When AC-EBL is performed on a graphene channel (local exposure) or on the outside vicinity of a graphene channel (non-local exposure), the charge transport characteristics of graphene can be significantly affected due to charge doping and scattering. While the detrimental effect of non-local exposure can be largely removed by vigorous annealing, local-exposure induced damage is irreversible and cannot be fixed by annealing. We discuss the possible causes of the observed exposure effects. Our results provide guidance to the future development of high-energy electron beam lithography for nanomaterial device fabrication.

scholarly journals Three-Dimensional in Situ Electron-Beam Lithography Using Water Ice

Nano Letters ◽  
2018 ◽  
Vol 18 (8) ◽  
pp. 5036-5041 ◽  
Author(s):  
Yu Hong ◽  
Ding Zhao ◽  
Dongli Liu ◽  
Binze Ma ◽  
Guangnan Yao ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Three Dimensional ◽  
Water Ice

scholarly journals Novel Organic Material Induced by Electron Beam Irradiation for Medical Application

Polymers ◽  
2020 ◽  
Vol 12 (2) ◽  
pp. 306 ◽  
Author(s):  
Adrian Barylski ◽  
Krzysztof Aniołek ◽  
Andrzej S. Swinarew ◽  
Sławomir Kaptacz ◽  
Jadwiga Gabor ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Absorbed Dose ◽  
Medical Application ◽  
High Energy ◽  
Polymer Chains ◽  
Degree Of Crystallinity ◽  
Beam Irradiation ◽  
The Impact ◽  
The Degree Of Crystallinity

This study analyzed the effects of irradiation of polytetrafluoroethylene (PTFE) containing 40% of bronze using an electron beam with energy of 10 MeV. Dosages from 26 to156 kGy (2.6–15.6 Mrad) were used. The impact of a high-energy electron beam on the thermal, spectrophotometric, mechanical, and tribological properties was determined, and the results were compared with those obtained for pure PTFE. Thermal properties studies showed that such irradiation caused changes in melting temperature Tm and crystallization temperature Tc, an increase in crystallization heat ∆Hc, and a large increase in crystallinity χc proportional to the absorbed dose for both polymers. The addition of bronze decreased the degree of crystallinity of PTFE by twofold. Infrared spectroscopy (FTIR) studies confirmed that the main phenomenon associated with electron beam irradiation was the photodegradation of the polymer chains for both PTFE containing bronze and pure PTFE. This had a direct effect on the increase in the degree of crystallinity observed in DSC studies. The use of a bronze additive could lead to energy dissipation over the additive particles. An increase in hardness H and Young’s modulus E was also observed. The addition of bronze and the irradiation with an electron beam improved of the operational properties of PTFE.

scholarly journals Advanced in-situ electron-beam lithography for deterministic nanophotonic device processing

2015 ◽  
Vol 86 (7) ◽  
pp. 073903 ◽  
Author(s):  
Arsenty Kaganskiy ◽  
Manuel Gschrey ◽  
Alexander Schlehahn ◽  
Ronny Schmidt ◽  
Jan-Hindrik Schulze ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Device Processing ◽  
Nanophotonic Device

In situ patterning of organic molecules in aqueous solutions using an inverted electron-beam lithography system

2016 ◽  
Vol 55 (6S1) ◽  
pp. 06GL07 ◽  
Author(s):  
Hiroki Miyazako ◽  
Kazuhiko Ishihara ◽  
Kunihiko Mabuchi ◽  
Takayuki Hoshino
Keyword(s):  
Electron Beam ◽  
Aqueous Solutions ◽  
Electron Beam Lithography ◽  
Organic Molecules ◽  
Lithography System

EFFECT OF HEAT TREATMENT ON (Cr, Fe)7C3/γ-Fe COATINGS IN SITU SYNTHESIZED BY VACUUM ELECTRON BEAM IRRADIATION

2017 ◽  
Vol 24 (Supp02) ◽  
pp. 1850028
Author(s):  
BINFENG LU ◽  
YUNXIA CHEN ◽  
MENGJIA XU
Keyword(s):  
Heat Treatment ◽  
Wear Resistance ◽  
Electron Beam ◽  
Impact Toughness ◽  
Composite Layer ◽  
Test Machine ◽  
Iron Matrix ◽  
Heat Treated ◽  
The Impact

(Cr, Fe)7C3/[Formula: see text]-Fe composite layer has been in situ synthesized on a low carbon steel surface by vacuum electron beam VEB irradiation. The synthesized samples were then subdued to different heat treatments to improve their impaired impact toughness. The microstructure, impact toughness and wear resistance of the heat-treated samples were studied by means of optical microscope (OM), X-ray diffraction (XRD), scanning electron microscope (SEM), microhardness tester, impact test machine and tribological tester. After heat treatment, the primary and eutectic carbides remained in their original shape and size, and a large number of secondary carbides precipitated in the iron matrix. Since the Widmanstatten ferrite in the heat affected zone (HAZ) transformed to fine ferrite completely, the impact toughness of the heat-treated samples increased significantly. The microhardness of the heat-treated samples decreased slightly due to the decreased chromium content in the iron matrix. The wear resistance of 1000[Formula: see text]C and 900[Formula: see text]C heat-treated samples was almost same with the as-synthesized sample. While the wear resistance of the 800[Formula: see text]C heat-treated one decreased slightly because part of the austenite matrix had transformed to ferrite matrix, which reduced the bonding of carbides particulates.

Fabrication of quantum wires on GaAs substrates patterned by in situ electron-beam lithography

1996 ◽  
Vol 40 (1-8) ◽  
pp. 627-631 ◽  
Author(s):  
M López ◽  
N Tanaka ◽  
I Matsuyama ◽  
T Ishikawa
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Quantum Wires ◽  
Gaas Substrates
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