Tungsten Oxide Based Sensor for Oxygen Detection
Keyword(s):
Dry Air
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In this paper we report on the development tungsten oxide based chemiresistive sensors for the monitoring of oxygen at low temperatures (T ≤ 400 °C) in dry and humid air. The sensors were deposited onto alumina substrate by a combination of spin coating and a photolithographic process to define the sensing area. Our results show that the sensors comply with a linear relationship over a 0 to 20% concentration range, with a high response towards oxygen. The highest response was observed at 350 °C (ΔR/Ra = 7.8) in humid and in dry air (ΔR/Ra = 18). This result is a significant improvement over our previous experiments and we believe to take the concept of a metal-oxide based oxygen sensor a step closer.
Keyword(s):
2003 ◽
Vol 123
(7)
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pp. 851-856
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2020 ◽
Vol 7
(9)
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pp. 1822-1844
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2020 ◽
Vol 276
◽
pp. 119110
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Keyword(s):
2014 ◽
Vol 1023
◽
pp. 137-140
Keyword(s):