Femtosecond Laser Micromachining of High Quality Groove on Sapphire Surface

2012 ◽  
Vol 217-219 ◽  
pp. 2213-2216
Author(s):  
Li Tao Qi ◽  
Jin Ping Hu
Keyword(s):  
Femtosecond Laser ◽  
Scanning Speed ◽  
Laser Pulses ◽  
Laser Micromachining ◽  
Femtosecond Laser Pulses ◽  
High Quality ◽  
Experimental Conditions ◽  
Sapphire Surface ◽  
Femtosecond Laser Micromachining ◽  
High Scanning Speed

In this paper, high quality grooves were fabricated by femtosecond laser pulse on sapphire surface. Grooves were fabricated under different experimental conditions. The lateral and vertical machining precision was evaluated by scanning electron microscopy and profilometer. High quality grooves could be obtained at the condition of low pulse energy, high scanning-speed and increasing the number of laser scans. The relationship between the width and depth of the groove and the key parameters of femtosecond laser micromachining system was studied. Several samples of the high quality grooves were obtained by femtosecond laser pulses. High quality grooves have a potential application of the fabrication of sapphire-based devices.

scholarly journals Editorial for the Special Issue on Femtosecond Laser Micromachining for Photonics Applications

Micromachines ◽  
2020 ◽  
Vol 11 (11) ◽  
pp. 994
Author(s):  
Andrea Crespi ◽  
Giacomo Corrielli
Keyword(s):  
Femtosecond Laser ◽  
Laser Pulses ◽  
Laser Micromachining ◽  
Femtosecond Laser Pulses ◽  
Special Issue ◽  
Femtosecond Laser Micromachining

Femtosecond laser pulses have proven, in the recent years, their formidable potential as a micromachining tool applicable to a variety of materials [...]

Interaction of the Femtosecond Laser Pulses with the New Silica Nanocomposites Containing Au and CdS

2013 ◽  
Vol 834-836 ◽  
pp. 60-63 ◽  
Author(s):  
Dmitriy Proschenko ◽  
Alexandr Mayor ◽  
Oleg Bukin ◽  
Sergey Golik ◽  
Alexey Chekhlenok ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Pulses ◽  
Component Composition ◽  
Femtosecond Laser Pulses ◽  
Cds Nanoparticles ◽  
Experimental Conditions ◽  
Silica Nanocomposites ◽  
Filament Structure

Our work is dedicated for review of the synthesis of the new nanocomposite media with Au and CdS nanoparticles. Also formation of filament structure in presented samples as result of interaction with femtosecond laser pulses in depending on the component composition of the samples and the various experimental conditions was investigated.

scholarly journals Micromachining of Transparent Biocompatible Polymers Applied in Medicine Using Bursts of Femtosecond Laser Pulses

Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1093
Author(s):  
Evaldas Kažukauskas ◽  
Simas Butkus ◽  
Piotr Tokarski ◽  
Vytautas Jukna ◽  
Martynas Barkauskas ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Femtosecond Laser ◽  
Contact Lenses ◽  
Laser Pulses ◽  
Laser Micromachining ◽  
Femtosecond Laser Pulses ◽  
Intraocular Lenses ◽  
Great Promise ◽  
Biocompatible Polymers ◽  
Mechanical Methods

Biocompatible polymers are used for many different purposes (catheters, artificial heart components, dentistry products, etc.). An important field for biocompatible polymers is the production of vision implants known as intraocular lenses or custom-shape contact lenses. Typically, curved surfaces are manufactured by mechanical means such as milling, turning or lathe cutting. The 2.5 D objects/surfaces can also be manufactured by means of laser micromachining; however, due to the nature of light–matter interaction, it is difficult to produce a surface finish with surface roughness values lower than ~1 µm Ra. Therefore, laser micromachining alone can’t produce the final parts with optical-grade quality. Laser machined surfaces may be polished via mechanical methods; however, the process may take up to several days, which makes the production of implants economically challenging. The aim of this study is the investigation of the polishing capabilities of rough (~1 µm Ra) hydrophilic acrylic surfaces using bursts of femtosecond laser pulses. By changing different laser parameters, it was possible to find a regime where the surface roughness can be minimized to 18 nm Ra, while the polishing of the entire part takes a matter of seconds. The produced surface demonstrates a transparent appearance and the process shows great promise towards commercial fabrication of low surface roughness custom-shape optics.

Sapphire surface patterning using femtosecond laser micromachining

2012 ◽  
Vol 109 (2) ◽  
pp. 441-448 ◽  
Author(s):  
Cho-Wei Chang ◽  
Chien-Yu Chen ◽  
Tien-Li Chang ◽  
Chia-Jen Ting ◽  
Chien-Ping Wang ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Micromachining ◽  
Surface Patterning ◽  
Sapphire Surface ◽  
Femtosecond Laser Micromachining

Straight and linearly tapered capillaries produced by femtosecond laser micromachining

2012 ◽  
Vol 78 (4) ◽  
pp. 355-361 ◽  
Author(s):  
S. M. WIGGINS ◽  
M. P. REIJNDERS ◽  
S. ABUAZOUM ◽  
K. HART ◽  
G. VIEUX ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Plasma ◽  
Laser Pulses ◽  
Laser Micromachining ◽  
Plasma Interaction ◽  
Laser Plasma Interaction ◽  
Femtosecond Laser Micromachining ◽  
Longitudinal Plasma ◽  
Gaussian Mode ◽  
Interaction Efficiency

AbstractGas-filled capillary discharge waveguides are a commonly employed medium in laser–plasma interaction applications, such as the laser wakefield accelerator, because they can simultaneously guide high-power laser pulses while acting as the medium for acceleration. In this paper, the production of both straight and linearly tapered capillaries using a femtosecond laser micromachining technique is presented. A tapered capillary is shown to possess a smooth variation in diameter (from 305 μm to 183 μm) along its entire 40 mm length, which would lead to a longitudinal plasma density gradient, thereby dramatically improving the laser–plasma interaction efficiency in applications. Efficient guiding with up to 82% energy transmission of the fundamental Gaussian mode of a low intensity, 50 fs duration laser pulse is shown for both types of capillary waveguide.

Rapid Prototyping of Glass Microfluidic Devices using Femtosecond Laser Pulses

2004 ◽  
Vol 820 ◽  
Author(s):  
Myung-Il Park ◽  
Jun Rye Choi ◽  
Mira Park ◽  
Dae Sik Choi ◽  
Sae Chae Jeoung ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Rapid Prototyping ◽  
Laser Fluence ◽  
Femtosecond Laser Ablation ◽  
Microfluidic Devices ◽  
Soda Lime ◽  
Laser Pulses ◽  
Laser Micromachining ◽  
Femtosecond Laser Pulses ◽  
Mems Devices

AbstractLaser micromachining technology with 150 femtosecond pulses is developed to fabricate glass microfluidic devices. A short theoretical analysis of femtosecond laser ablation is reported to characterize the femtosecond laser micromachining. The ablated crater diameter is measured as a function of the number of laser pulses as well as laser fluence. Two different ablation regimes are observed and the transition between the regimes is dependent on both the laser fluence and the number of laser shots. Based on the ablation phenomena described, microfluidic devices are fabricated with commercially available soda lime glasses (76 mm × 26 mm × 1 mm, Knittel Glaser, Germany). In addition to a microchannel for microfluidics, the capillary as well as optical fiber for detecting is integrated on the same substrate. The substrate is successively packaged with a lid slide glass by a thermal direct bonding. The presented developments are suitable for fast turn-around design cycle and inexpensive procedure, which provide rapid prototyping of MEMS devices.

scholarly journals Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining

2014 ◽  
Vol 22 (12) ◽  
pp. 14792 ◽  
Author(s):  
Jiangxin Song ◽  
Jintian Lin ◽  
Jialei Tang ◽  
Yang Liao ◽  
Fei He ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Quality Factor ◽  
Laser Micromachining ◽  
High Quality Factor ◽  
High Quality ◽  
High Q ◽  
Femtosecond Laser Micromachining

scholarly journals Femtosecond Laser-Based Modification of PDMS to Electrically Conductive Silicon Carbide

Nanomaterials ◽  
2018 ◽  
Vol 8 (7) ◽  
pp. 558 ◽  
Author(s):  
Yasutaka Nakajima ◽  
Shuichiro Hayashi ◽  
Akito Katayama ◽  
Nikolay Nedyalkov ◽  
Mitsuhiro Terakawa
Keyword(s):  
Electrical Conductivity ◽  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Scanning Speed ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Mems Devices ◽  
Direct Writing ◽  
X Ray Diffraction ◽  
Electrically Conductive

In this paper, we experimentally demonstrate femtosecond laser direct writing of conductive structures on the surface of native polydimethylsiloxane (PDMS). Irradiation of femtosecond laser pulses modified the PDMS to black structures, which exhibit electrical conductivity. Fourier-transform infrared (FTIR) and X-ray diffraction (XRD) results show that the black structures were composed of β-silicon carbide (β-SiC), which can be attributed to the pyrolysis of the PDMS. The electrical conductivity was exhibited in limited laser power and scanning speed conditions. The technique we present enables the spatially selective formation of β-SiC on the surface of native PDMS only by irradiation of femtosecond laser pulses. Furthermore, this technique has the potential to open a novel route to simply fabricate flexible/stretchable MEMS devices with SiC microstructures.

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