Research on PVDF Micro-Force Sensor

2014 ◽  
Vol 599-601 ◽  
pp. 1135-1138
Author(s):  
Chao Zhe Ma ◽  
Jin Song Du ◽  
Yi Yang Liu
Keyword(s):  
Power Dissipation ◽  
Polyvinylidene Fluoride ◽  
High Sensitivity ◽  
Force Sensor ◽  
Calibration Method ◽  
Pvdf Film ◽  
Force Sensors ◽  
Low Power Dissipation ◽  
Micro Force Sensor ◽  
Processing Circuit

At present, sub-micro-Newton (sub-μN) micro-force in micro-assembly and micro-manipulation is not able to be measured reliably. The piezoelectric micro-force sensors offer a lot of advantages for MEMS applications such as low power dissipation, high sensitivity, and easily integrated with piezoelectric micro-actuators. In spite of many advantages above, the research efforts are relatively limited compared to piezoresistive micro-force sensors. In this paper, Sensitive component is polyvinylidene fluoride (PVDF) and the research object is micro-force sensor based on PVDF film. Moreover, the model of micro-force and sensor’s output voltage is built up, signal processing circuit is designed, and a novel calibration method of micro-force sensor is designed to reliably measure force in the range of sub-μN. The experimental results show the PVDF sensor is designed in this paper with sub-μN resolution.

A Dynamic Calibration Test on PVDF Film Pressure Sensor with Dropping Hammer Method

2014 ◽  
Vol 933 ◽  
pp. 548-553 ◽  
Author(s):  
Yong Qiang Wang ◽  
Ying Lin Xiao
Keyword(s):  
Polyvinylidene Fluoride ◽  
Piezoelectric Materials ◽  
Dynamic Pressure ◽  
High Sensitivity ◽  
Pvdf Film ◽  
Piezoelectric Film ◽  
High Mechanical Strength ◽  
Response Range ◽  
New Type ◽  
Shock Wave Pressure

Polyvinylidene Fluoride (referred to as PVDF) piezoelectric film is a new type of polymer piezoelectric materials. Because of its light weight, thin thickness, high sensitivity, high mechanical strength, wide frequency response range and other advantages, it has the application prospect in the explosion field. In this article, film sensors were made based on the PVDF piezoelectric film, and its role in the sensors is the sensitive element. The result of the low dynamic pressure calibration tests showed that it has a very high linear degree and good reproducibility, so that it can be used for low-pressure section of the shock wave pressure measurement.

scholarly journals A Micro-Force-Tracking System Based on PVDF Static Micro-Force Sensor and Fuzzy-PID Control Method

2011 ◽  
Vol 2-3 ◽  
pp. 489-494
Author(s):  
Zhi Yong Sun ◽  
Wen Lin Chen ◽  
Yun Quan Su ◽  
Li Na Hao
Keyword(s):  
Pid Control ◽  
Polyvinylidene Fluoride ◽  
Control Method ◽  
Tracking System ◽  
Force Sensor ◽  
Fuzzy Pid ◽  
Sensing Element ◽  
Fuzzy Pid Control ◽  
Force Tracking ◽  
Micro Force Sensor

This article is intended to design a static micro-force sensor with a simple structure employing the polymer material PVDF (polyvinylidene fluoride) film as its sensing element, and will carry out some micro-force tracking tests. During the tracking tests, this paper employs a Fuzzy-PID control method and an ordinary PD control method to control the system, and will also analyze the results of them.

scholarly journals Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system

2017 ◽  
Vol 6 (1) ◽  
pp. 121-133 ◽  
Author(s):  
Gerry Hamdana ◽  
Maik Bertke ◽  
Lutz Doering ◽  
Thomas Frank ◽  
Uwe Brand ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
High Reliability ◽  
Three Dimensional ◽  
High Sensitivity ◽  
Force Sensor ◽  
Silicon On Insulator ◽  
Basic Material ◽  
Inductively Coupled ◽  
Sensor Properties ◽  
Micro Force Sensor

Abstract. A developed transferable micro force sensor was evaluated by comparing its response with an industrially manufactured device. In order to pre-identify sensor properties, three-dimensional (3-D) sensor models were simulated with a vertically applied force up to 1000 µN. Then, controllable batch fabrication was performed by alternately utilizing inductively coupled plasma (ICP) reactive ion etching (RIE) and photolithography. The assessments of sensor performance were based on sensor linearity, stiffness and sensitivity. Analysis of the device properties revealed that combination of a modest stiffness value (i.e., (8.19 ± 0.07) N m−1) and high sensitivity (i.e., (15.34 ± 0.14) V N−1) at different probing position can be realized using a meander-spring configuration. Furthermore, lower noise voltage is obtained using a double-layer silicon on insulator (DL-SOI) as basic material to ensure high reliability and an excellent performance of the sensor.

DESIGN, MODELING, AND MICROMANIPULATION EXPERIMENTS OF A NOVEL 2-D MICRO FORCE SENSOR

2010 ◽  
Vol 07 (01) ◽  
pp. 51-57
Author(s):  
YIYANG LIU ◽  
YUECHAO WANG ◽  
PENG YU ◽  
ZAILI DONG
Keyword(s):  
Force Feedback ◽  
Force Sensor ◽  
Force Sensors ◽  
Feedback Information ◽  
Set Up ◽  
Micro Force Sensor

Because of the micro/nano manipulation's complexity, the accurate feedback information of the micro interactive force acting on micro devices is quite important and necessary for micro/nano manipulation, especially the 2-D micro interactive force feedback information. At present, there are no reliable and accurate 2-D micro force sensors applied in micro/nano manipulation. To solve the above problem, a novel 2-D micro force sensor that can reliably measure force in the range of submicro Newton (μN) is designed and developed in this paper. Based on the model of 1-D micro force sensor designed by us, the model of this 2-D sensor is set up. To verify the model of the 2-D sensor, micromanipulation experiments are designed and realized. Experiment results show the submicro Newton resolution, and verify the validity of the 2-D sensor's model. The developed 2-D micro force sensor will contribute to promoting the complexity of micro/nano manipulation, and will facilitate to automate the micro/nano manipulation.

The Calibration Method of a Large Six-Axis Force Sensors

2013 ◽  
Vol 753-755 ◽  
pp. 2091-2094 ◽  
Author(s):  
Min Yang
Keyword(s):  
Force Sensor ◽  
Calibration Method ◽  
Force Sensors ◽  
Static Calibration

Based on the accelerator calibration method of six-axis force sensors, the system of static calibration for a large six-axis force sensor is build, The accelerator calibration method are introduced detail. the designed six-axis force sensor in multi-dimensional accelerators field is calibrated and the result is well used. the system of static calibrations a contraption, which is smart cheap and practicality.

scholarly journals Design and Manufacturing of a High-Sensitivity Cutting Force Sensor Based on AlSiCO Ceramic

Micromachines ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 63
Author(s):  
Taobo Gong ◽  
You Zhao ◽  
Yulong Zhao ◽  
Lukang Wang ◽  
Yu Yang ◽  
...  
Keyword(s):  
Cutting Force ◽  
High Speed ◽  
High Sensitivity ◽  
Force Sensor ◽  
High Price ◽  
Precision Machining ◽  
Force Sensors ◽  
Machining Accuracy ◽  
Status Monitoring ◽  
Ultra Precision

On-line cutting force measurement is an effective way to monitor processing quality, improve processing accuracy, and protect the tool. In high-speed and ultra-precision machining, status monitoring is particularly necessary to ensure machining accuracy. However, the cutting force is very small in high speed and ultra-precision machining. Therefore, high-sensitivity cutting force sensors are needed. Current commercial cutting force sensors have defects such as large volume, low compatibility, and high price. In particular, the sensitivity of cutting force sensor needs to be improved for high-speed and ultra-precision machining status monitoring. This paper provides a possible solution by embedding the sensor in the tool and selecting sensitive materials with high piezoresistive coefficient. In this paper, the structural design of the sensor and the fabrication of the sensitive material SiAlCO ceramic are carried out, and then the sensor is packaged and tested. The test results show that the cutting force sensor’s sensitivity was as high as 219.38 mV/N, which is a feasible way to improve cutting force sensor’s compatibility and sensitivity.

scholarly journals Flexible Shear and Normal Force Sensor Using Only One Layer of Polyvinylidene Fluoride Film

2019 ◽  
Vol 9 (20) ◽  
pp. 4339 ◽  
Author(s):  
Lee ◽  
Chung ◽  
Oh ◽  
Cha
Keyword(s):  
Real Time ◽  
Polyvinylidene Fluoride ◽  
Normal Force ◽  
Force Sensor ◽  
Applied Force ◽  
Pvdf Film ◽  
Simple Process ◽  
Flexible Sensor ◽  
Normal Forces

We have proposed a flexible sensor that can sense shear and normal forces, and can be fabricated through a simple process using only one layer of polyvinylidene fluoride (PVDF) film. For the measurement of shear and normal forces, one layer of PVDF film was sealed in a three-dimensionally structured polydimethylsiloxane (PDMS). In the structure, the sensor produced voltage signals corresponding to the shear and normal forces. Using this property, we aimed to demonstrate how to sense the magnitude and direction of the force applied to the sensor from its output voltages. Furthermore, the proposed sensor with a 2 × 2 array was able to measure the applied force in real time.

scholarly journals Hydraulic Micro Device with Force Sensing for Measurement of Mechanical Characteristics

2020 ◽  
Vol 14 (4) ◽  
pp. 625-632
Author(s):  
Tohru Sasaki ◽  
Yudai Fujiwara ◽  
Kaoru Tachikawa ◽  
Kenji Terabayashi ◽  
Kuniaki Dohda ◽  
...  
Keyword(s):  
Mechanical Characteristics ◽  
Reaction Force ◽  
Viscosity Coefficient ◽  
Force Sensor ◽  
Force Sensors ◽  
Viscoelastic Materials ◽  
Information And Communication ◽  
Micro Force Sensor ◽  
Living Tissues ◽  
Bio Engineering

The medical and bio-engineering fields have been increasingly using information and communication technology. To introduce robots into surgical procedures, data on surgical operations are required. Several studies have tried the creation of data on living tissues for mechanical actions, which makes determining the mechanical characteristics of living tissues vital, but few have been commonly used. Therefore, we previously developed a sensing system that uses a hydraulic-driven micro mechanism to measure the force applied to an object when it is touched. Micro force sensors are necessary for various manipulations requiring careful operation. Unfortunately, the measurement accuracy of sensors tends to reduce with the reduction in sensor size. The proportional output in conventional force sensors, such as piezoelectric sensors, also decreases when the size of the sensor is reduced. However, a micro force sensor using a hydraulic-driven micro mechanism can obtain a large output even when it is small. Our system uses Pascal’s principle to measure small forces acting on the end effector. We propose methods for identifying the mechanical characteristics of certain viscoelastic materials similar to those used in a living organ. A hydraulic-driven micro device pushes an object and measures the reaction force and its displacement. We have used two types of micro devices, micro cylinder and micro bellows. Its stiffness and viscosity coefficient are obtained through calculations using Kelvin-Voigt and Zenner models. Discrete displacement and load data are applied to the estimated model, and the mechanical characteristics of the materials are identified as a minimized value between the estimated value and experimental one. We conducted experiments using the proposed identification methods on viscoelastic materials, and the results indicate that the value provided from the Kelvin-Voigt model was near the truth value.

Identification of Static Loading Conditions Using Piezoelectric Sensor Arrays

2017 ◽  
Vol 85 (1) ◽  
Author(s):  
He Zhang ◽  
Mingzhou Shen ◽  
Yangyang Zhang ◽  
Yisheng Chen ◽  
Chaofeng Lü
Keyword(s):  
Sensor Arrays ◽  
High Sensitivity ◽  
Current Method ◽  
Experimental Tests ◽  
Piezoelectric Sensor ◽  
Force Sensor ◽  
Fast Response ◽  
Force Sensors ◽  
Loading Conditions ◽  
Concentrated Load

To make sure the safety, durability, and serviceability of structures in-service, health monitoring systems (HMS) are widely used in management of civil infrastructures in recent years. Compared with traditional force sensors, lead zirconium titanate (PZT) sensor performs better in smart sensing in HMS with advantages of high sensitivity, self-powering and fast response to highly dynamic load. Here, we propose to utilize PZT sensor arrays to identify the position and magnitude of external loads that are applied on a simply supported beam. An identification method is proposed based on experimental tests and theoretical electromechanical analyses, which is proved effective by comparing the identified parameters with the actually applied loading conditions and signals recorded by commercial force sensors. Experimental observations also reveal that PZT sensors respond faster to loading process than commercial force sensor, which makes it qualified in identification of transient loading such as impact processing in loading history. Results also demonstrate the applicability of the method to identify multiple concentrated load and the average moving speed of the applied load. The current method may provide a useful tool for identifying load conditions on various beam structures.

scholarly journals Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements

2021 ◽  
Vol 10 (1) ◽  
Author(s):  
Mengqiang Zou ◽  
Changrui Liao ◽  
Shen Liu ◽  
Cong Xiong ◽  
Cong Zhao ◽  
...  
Keyword(s):  
Detection Limit ◽  
Material Science ◽  
High Sensitivity ◽  
Force Sensor ◽  
Measurement Range ◽  
Force Detection ◽  
Contact Mode ◽  
Polymer Devices ◽  
Static Performance ◽  
Micro Force Sensor

AbstractMicromanipulation and biological, material science, and medical applications often require to control or measure the forces asserted on small objects. Here, we demonstrate for the first time the microprinting of a novel fiber-tip-polymer clamped-beam probe micro-force sensor for the examination of biological samples. The proposed sensor consists of two bases, a clamped beam, and a force-sensing probe, which were developed using a femtosecond-laser-induced two-photon polymerization (TPP) technique. Based on the finite element method (FEM), the static performance of the structure was simulated to provide the basis for the structural design. A miniature all-fiber micro-force sensor of this type exhibited an ultrahigh force sensitivity of 1.51 nm μN−1, a detection limit of 54.9 nN, and an unambiguous sensor measurement range of ~2.9 mN. The Young’s modulus of polydimethylsiloxane, a butterfly feeler, and human hair were successfully measured with the proposed sensor. To the best of our knowledge, this fiber sensor has the smallest force-detection limit in direct contact mode reported to date, comparable to that of an atomic force microscope (AFM). This approach opens new avenues towards the realization of small-footprint AFMs that could be easily adapted for use in outside specialized laboratories. As such, we believe that this device will be beneficial for high-precision biomedical and material science examination, and the proposed fabrication method provides a new route for the next generation of research on complex fiber-integrated polymer devices.

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