scholarly journals Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements

2021 ◽  
Vol 10 (1) ◽  
Author(s):  
Mengqiang Zou ◽  
Changrui Liao ◽  
Shen Liu ◽  
Cong Xiong ◽  
Cong Zhao ◽  
...  
Keyword(s):  
Detection Limit ◽  
Material Science ◽  
High Sensitivity ◽  
Force Sensor ◽  
Measurement Range ◽  
Force Detection ◽  
Contact Mode ◽  
Polymer Devices ◽  
Static Performance ◽  
Micro Force Sensor

AbstractMicromanipulation and biological, material science, and medical applications often require to control or measure the forces asserted on small objects. Here, we demonstrate for the first time the microprinting of a novel fiber-tip-polymer clamped-beam probe micro-force sensor for the examination of biological samples. The proposed sensor consists of two bases, a clamped beam, and a force-sensing probe, which were developed using a femtosecond-laser-induced two-photon polymerization (TPP) technique. Based on the finite element method (FEM), the static performance of the structure was simulated to provide the basis for the structural design. A miniature all-fiber micro-force sensor of this type exhibited an ultrahigh force sensitivity of 1.51 nm μN−1, a detection limit of 54.9 nN, and an unambiguous sensor measurement range of ~2.9 mN. The Young’s modulus of polydimethylsiloxane, a butterfly feeler, and human hair were successfully measured with the proposed sensor. To the best of our knowledge, this fiber sensor has the smallest force-detection limit in direct contact mode reported to date, comparable to that of an atomic force microscope (AFM). This approach opens new avenues towards the realization of small-footprint AFMs that could be easily adapted for use in outside specialized laboratories. As such, we believe that this device will be beneficial for high-precision biomedical and material science examination, and the proposed fabrication method provides a new route for the next generation of research on complex fiber-integrated polymer devices.

Research on PVDF Micro-Force Sensor

2014 ◽  
Vol 599-601 ◽  
pp. 1135-1138
Author(s):  
Chao Zhe Ma ◽  
Jin Song Du ◽  
Yi Yang Liu
Keyword(s):  
Power Dissipation ◽  
Polyvinylidene Fluoride ◽  
High Sensitivity ◽  
Force Sensor ◽  
Calibration Method ◽  
Pvdf Film ◽  
Force Sensors ◽  
Low Power Dissipation ◽  
Micro Force Sensor ◽  
Processing Circuit

At present, sub-micro-Newton (sub-μN) micro-force in micro-assembly and micro-manipulation is not able to be measured reliably. The piezoelectric micro-force sensors offer a lot of advantages for MEMS applications such as low power dissipation, high sensitivity, and easily integrated with piezoelectric micro-actuators. In spite of many advantages above, the research efforts are relatively limited compared to piezoresistive micro-force sensors. In this paper, Sensitive component is polyvinylidene fluoride (PVDF) and the research object is micro-force sensor based on PVDF film. Moreover, the model of micro-force and sensor’s output voltage is built up, signal processing circuit is designed, and a novel calibration method of micro-force sensor is designed to reliably measure force in the range of sub-μN. The experimental results show the PVDF sensor is designed in this paper with sub-μN resolution.

scholarly journals Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system

2017 ◽  
Vol 6 (1) ◽  
pp. 121-133 ◽  
Author(s):  
Gerry Hamdana ◽  
Maik Bertke ◽  
Lutz Doering ◽  
Thomas Frank ◽  
Uwe Brand ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
High Reliability ◽  
Three Dimensional ◽  
High Sensitivity ◽  
Force Sensor ◽  
Silicon On Insulator ◽  
Basic Material ◽  
Inductively Coupled ◽  
Sensor Properties ◽  
Micro Force Sensor

Abstract. A developed transferable micro force sensor was evaluated by comparing its response with an industrially manufactured device. In order to pre-identify sensor properties, three-dimensional (3-D) sensor models were simulated with a vertically applied force up to 1000 µN. Then, controllable batch fabrication was performed by alternately utilizing inductively coupled plasma (ICP) reactive ion etching (RIE) and photolithography. The assessments of sensor performance were based on sensor linearity, stiffness and sensitivity. Analysis of the device properties revealed that combination of a modest stiffness value (i.e., (8.19 ± 0.07) N m−1) and high sensitivity (i.e., (15.34 ± 0.14) V N−1) at different probing position can be realized using a meander-spring configuration. Furthermore, lower noise voltage is obtained using a double-layer silicon on insulator (DL-SOI) as basic material to ensure high reliability and an excellent performance of the sensor.

Structural Design of 2D Piezoresistive Micro-Force Sensor

2013 ◽  
Vol 562-565 ◽  
pp. 363-368
Author(s):  
Jie Zhou ◽  
Wei Bin Rong ◽  
Li Ning Sun
Keyword(s):  
Structural Design ◽  
Vertical Direction ◽  
Force Sensor ◽  
Interaction Force ◽  
Force Detection ◽  
Target Interaction ◽  
Sensor Structure ◽  
Parallel Direction ◽  
Simulation Results ◽  
Micro Force Sensor

In order to detect the tool-substrate contact force and the tool-target interaction force during nano-manipulation process, a novel MEMS based 2D piezoresistive micro-force sensor structure was proposed. This structure can realize the 3D hardware decoupling for the X，Y and Z axis. Thus, the force detection in the vertical direction (Z axis) and parallel direction reference to base (X axis) can be done simultaneously. Theoretical analysis shows that this structure has a good structural sensitivity. The rationality and feasibility of the structure were confirmed by simulation results.

Optimum Design of a Dual-Range Force Sensor for Achieving High Sensitivity, Broad Bandwidth, and Large Measurement Range

2015 ◽  
Vol 15 (2) ◽  
pp. 1114-1123 ◽  
Author(s):  
Jun Jiang ◽  
Weihai Chen ◽  
Jingmeng Liu ◽  
Wenjie Chen ◽  
Jianbin Zhang
Keyword(s):  
Optimum Design ◽  
High Sensitivity ◽  
Force Sensor ◽  
Measurement Range ◽  
Broad Bandwidth ◽  
Large Measurement ◽  
Range Force

Porous ZnO/rGO Nanosheet‐Based NO 2 Gas Sensor with High Sensitivity and ppb‐Level Detection Limit at Room Temperature

2021 ◽  
pp. 2101511
Author(s):  
Ziwei Chen ◽  
Haojie Guo ◽  
Fusheng Zhang ◽  
Xiaowen Li ◽  
Jiabing Yu ◽  
...  
Keyword(s):  
Detection Limit ◽  
Gas Sensor ◽  
Room Temperature ◽  
High Sensitivity

scholarly journals A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines

Micromachines ◽  
2017 ◽  
Vol 8 (10) ◽  
pp. 304
Author(s):  
Huan Liu ◽  
Zhongliang Yu ◽  
Yan Liu ◽  
Xudong Fang
Keyword(s):  
Membrane Structure ◽  
Force Sensor ◽  
Friction Torque ◽  
Micro Force Sensor

Design of Photoionization Detector Based on the Miniature Gas Chromatography

2013 ◽  
Vol 823 ◽  
pp. 291-295 ◽  
Author(s):  
Shou Chen Chai ◽  
Peng Yang ◽  
Cheng Jia Yang ◽  
Chun Li Cai ◽  
Na Yu
Keyword(s):  
Gas Chromatography ◽  
Detection Limit ◽  
Ionization Chamber ◽  
High Sensitivity ◽  
Fast Response ◽  
Low Detection Limit ◽  
Photoionization Detector ◽  
Key Factor ◽  
The Stability ◽  
Sensitivity Detection

In the space restricted airtight environment that people lives in, detecting harmful gas by miniature gas chromatography is the practical requirement at present, however, PIDs performance is key factor that restrict the application of miniature gas chromatography, the redesign of the detectors gas route in this paper aiming at improve detectors stability observably, and schemed out miniature PID with high sensitivity, low detection limit and fast response. The result of the experiment shows that the detection limit is 0.04ppm, the sensitivity is 101mv/ppm,the stability is 0.04×10-6/24h,meeting the project requirement. Keywords: photoionization detector; ionization chamber; sensitivity; detection limit;

scholarly journals A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities

Micromachines ◽  
2021 ◽  
Vol 12 (11) ◽  
pp. 1375
Author(s):  
Junji Pu ◽  
Kai Zeng ◽  
Yulie Wu ◽  
Dingbang Xiao
Keyword(s):  
Light Source ◽  
Optical System ◽  
High Sensitivity ◽  
Measurement Range ◽  
Optical Force ◽  
Zero Bias ◽  
Micro Electro Mechanical Systems ◽  
Force Effect ◽  
High Measurement ◽  
Mems Technology

In recent years, the optical accelerometer based on the optical trapping force effect has gradually attracted the attention of researchers for its high sensitivity and high measurement accuracy. However, due to its large size and the complexity of optical path adjustment, the optical force accelerometers reported are only suitable for the laboratory environment up to now. In this paper, a miniature optical force dual-axis accelerometer based on the miniature optical system and a particles cavity which is prepared by Micro-Electro-Mechanical Systems (MEMS) technology is proposed. The overall system of the miniature optical levitation including the miniature optical system and MEMS particles cavity is a cylindrical structure with a diameter of about 10 mm and a height of 33 mm (Φ 10 mm × 33 mm). Moreover, the size of this accelerometer is 200 mm × 100 mm × 100 mm. Due to the selected light source being a laser diode light source with elliptical distribution, it is sensitive to the external acceleration in both the long axis and the short axis. This accelerometer achieves a measurement range of ±0.17 g–±0.26 g and measurement resolution of 0.49 mg and 1.88 mg. The result shows that the short-term zero-bias stability of the two orthogonal axes of the optical force accelerometer is 4.4 mg and 9.2 mg, respectively. The main conclusion that can be drawn is that this optical force accelerometer could provide an effective solution for measuring acceleration with an optical force effect for compact engineering devices.

scholarly journals Bendductor—Transformer Steel Magnetomechanical Force Sensor

Sensors ◽  
2021 ◽  
Vol 21 (24) ◽  
pp. 8250
Author(s):  
Przemysław Grenda ◽  
Monika Kutyła ◽  
Michał Nowicki ◽  
Tomasz Charubin
Keyword(s):  
Electrical Steel ◽  
High Sensitivity ◽  
Deformation Mode ◽  
Force Sensor ◽  
Stress Sensitivity ◽  
Linear Characteristic ◽  
Bending Load ◽  
Load Mode ◽  
Magnetoelastic Sensors ◽  
Selection Of

In this paper, the design and investigation of an innovative force sensor, based on the Villari effect, is presented. The sensor was built from electrical steel, in a pressductor pattern, but working in bending load mode. The results of the experimental research allowed for the evaluation of transducer’s performance, mitigation of measurement hysteresis, and optimization of its functional parameters. Several issues have been examined, among them the selection of supply and measured signals, the measured values’ impact on measurement hysteresis, harmonic analysis, and the selection of proper current waveforms and frequencies. The proposed sensor is robust, made from inexpensive materials, and has high sensitivity, as compared to other magnetoelastic sensors. It has much higher stress sensitivity than other magnetoelastic sensors due to deformation mode. Based on the tests, its measuring range can be defined as 0.5–5 N with a near-linear characteristic, SNR of 46 dB, and 0.11 N uncertainty.

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