Application of 3D Nanorelief Sharp-Edge Detection Method in the Optical Interference Microscope

2017 ◽  
Vol 870 ◽  
pp. 34-40
Author(s):  
Evgeny V. Sysoev ◽  
Yuri V. Chugui ◽  
Rodion V. Kulikov ◽  
Ignat A. Vykhristyuk ◽  
Liang Chia Chen ◽  
...  
Keyword(s):  
Sample Surface ◽  
Sharp Edge ◽  
Lateral Resolution ◽  
Linear Measurements ◽  
Interference Microscope ◽  
Lateral Direction ◽  
Position Detection ◽  
Reconstructed Surface ◽  
Edge Detection Method ◽  
Longitudinal Resolution

As is well known, the phase-shifting interferometry techniques allow to reach longitudinal resolution to ~ 0.1 nm, but the value of lateral resolution remains at the level of ~ 1 mm. For providing of high lateral resolution of linear measurements in the interference microscope profilometer it was proposed to use a position detection sensor of sharp edge. Principle of sensor’s measurement is based on registration of laser spot intensity scattered by the measurement sample surface under displacement of sample in the lateral direction. The paper shows the prototype scheme of measurement system containing the Linnik interferometer used for surface nanorelief measurement and a position detection module of sharp edge. Measurement process and experimental results are presented. The combining of measurement results performed by the Linnik interferometer and a position detection sensor of sharp edge can allow us to precisely (better then diffraction limit) define the position of sharp edge on the reconstructed surface nanorelief.

scholarly journals IMPROVEMENT OF LATERAL RESOLUTION UNDER DIMENSIONAL MEASUREMENTS OF NANORELIEF STEP STUCTURES

2019 ◽  
Vol 8 ◽  
pp. 183-190
Author(s):  
Ignat Vykhristyuk ◽  
Rodion Kulikov ◽  
Evgeny Sysoev
Keyword(s):  
Sample Surface ◽  
Sharp Edge ◽  
Lateral Resolution ◽  
Linear Measurements ◽  
Lateral Direction ◽  
Position Detection ◽  
Dimensional Measurements ◽  
Sharp Edges ◽  
Reconstructed Surface ◽  
Longitudinal Resolution

The phase shifting interferometry methods allow to reach longitudinal resolution up to ~ 0.1 nm, but value of lateral resolution remains on level of ~ 1 μm. For providing of high lateral resolution of linear measurements in the interference microscope profilometer it was proposed to use the sensor of sharp-edge position detection. Principle of sensor’s measurement is based on registration of laser spot intensity scattered by the measurement sample surface under displacement of sample in the lateral direction. Measurement process and experimental results are presented. The combining of measurement results performed by the profilometer and the sensor of sharp-edge position detection can allow to increase the resolution of measurement of distance between sharp edges on the reconstructed surface nanorelief.

X-Ray Scattering Studies of Interfacial Microstructures in Inx, Ga1−x As/GaAs Superlattices

1994 ◽  
Vol 375 ◽  
Author(s):  
Z. H. Ming ◽  
Y. L. Soo ◽  
S. Huang ◽  
Y. H. Kao ◽  
K. Stair ◽  
...  
Keyword(s):  
Quantum Wires ◽  
Large Angle ◽  
Sample Surface ◽  
Lateral Direction ◽  
Direction Parallel ◽  
X Ray ◽  
Periodic Arrays ◽  
X Ray Scattering ◽  
Transmission Electron ◽  
Ray Scattering

AbstractInterfacial microstructures in 100-period InxGa1−xAs(15Å)/GaAs(100Å) superlattices grown on GaAs (100) substrates by molecular beam epitaxy were studied by using large angle x-ray scattering techniques. Unusual satellite peaks in the lateral direction parallel to the sample surface were observed in a sample with x = 0.535 grown at 480°C, indicating an in-plane structural ordering. This result is confirmed by high resolution transmission electron microscopy observations that thickness modulation in the InxGa1−xAs layers gives rise to long-range lateral periodic arrays of cluster-like microstructures with spacing on the order of a few hundred Ångstroms. This thickness modulation is found to occur only in [110] direction, thus the material can be viewed as a somewhat disordered array of grown-in parallel quantum wires.

scholarly journals Numerical and Experimental Research on Identifying a Delamination in Ballastless Slab Track

Materials ◽  
2019 ◽  
Vol 12 (11) ◽  
pp. 1788 ◽  
Author(s):  
Guopeng Fan ◽  
Haiyan Zhang ◽  
Wenfa Zhu ◽  
Hui Zhang ◽  
Xiaodong Chai
Keyword(s):  
Surface Wave ◽  
Linear Array ◽  
Point Contact ◽  
Scattered Wave ◽  
Lateral Resolution ◽  
Near Surface ◽  
Slab Track ◽  
Computational Performance ◽  
Significant Difference ◽  
Longitudinal Resolution

This paper aims to adopt the total focusing method (TFM) and wavenumber method for characterizing a delamination in ballastless slab track. Twelve dry point contact (DPC) transducers located at the upper surface of the slab track compose a linear array. These transducers are employed to actuate shear waves, which are suitable for identifying the delamination. The technique of removing the surface wave has been implemented for only retaining the scattered wave caused by the delamination and the reflected wave from the bottom of bed plate. Numerical and experimental results demonstrate that the delamination and bottom of the bed plate can be identified by the proposed methods. Furthermore, the near-surface pseudomorphism is distinctly restrained after removing the surface wave. Compared to TFM, the wavenumber method has the great advantages of improving computational performance and lateral resolution. However, they have no significant difference in the longitudinal resolution. Furthermore, it has been confirmed that the lateral resolution can be affected by the amount of transducers. This paper can provide valuable suggestions on improving the computational performance and the imaging accuracy when we identify a delamination in ballastless slab track.

The Lateral Resolution of an Interference Microscope

2013 ◽  
Vol 56 (5) ◽  
pp. 486-491 ◽  
Author(s):  
G. G. Levin ◽  
G. N. Vishnyakov ◽  
N. N. Moiseev ◽  
V. L. Minaev
Keyword(s):  
Lateral Resolution ◽  
Interference Microscope

scholarly journals ATOMIC FORCE MICROSCOPY AS A TOOL FOR TESTING BIOMEDICAL SAMPLES AND ELIMINATION PROBE ARTIFACTS

2019 ◽  
Vol 10 (2) ◽  
Author(s):  
Ljubiša Petrov ◽  
Lidija Matija
Keyword(s):  
Atomic Force Microscopy ◽  
Numerical Data ◽  
Sample Surface ◽  
Pharmaceutical Products ◽  
Scanning Tunneling ◽  
Tunneling Microscopy ◽  
The Real ◽  
Force Microscopy ◽  
Atomic Force ◽  
Reconstructed Surface

One of the most perspective available techniques for investigation of the composition, structure and properties of materials, is scanning probe microscopy (SPM), respectively its components scanning tunneling microscopy (STM) and atomic force microscopy (AFM). This technique is used in multidisciplinary research in the field of medicine, pharmacy, dentistry, material science, etc., for study of biological samples, chemical compounds, pharmaceutical products, artificial tissues, implantology materials, and all other materials that have nanotechnological impact on application in these scientific fields. This is because the probes have not perfect size and geometry, which leads to the appearance of artifacts. They are defined as characteristics that appear on the image and are not present on the sample. These effects caused by convolutions between the probe and sample can be corrected to a certain extent by mathematical manipulation of topographic data. The methodology used in this paper is based on algebra of sets, and basic tools of mathematical morphology. Mathematical algorithms for the „blind reconstruction“ of the tip were used, and then in order to detect the parts of the sample surface which is not available in real-time scanning deconvolution was applied. The limit of the real probe tip is calculated from the image, using the morphological limitations inherent in the recording process. The result acuired as an image of the reconstructed surface out of the used images, with the reconstruction of the real tip. The presented results are clear proof of the usability of atomic force microscopy as a technique for imaging of biological materials on nano-level, and the applied algorithms increase the usability of the images in terms of a better conclusion based on precise numerical data taken from the processed images.

The Effect of Focusing on the Lateral Resolution of an Interference Microscope

2014 ◽  
Vol 57 (1) ◽  
pp. 69-73 ◽  
Author(s):  
G. G. Levin ◽  
N. N. Moiseev ◽  
Ya. A. Ilyushin ◽  
V. L. Minaev
Keyword(s):  
Lateral Resolution ◽  
Interference Microscope

Etalon for Nanometrology Produced by Anisotropic Etching

2021 ◽  
Vol 23 (4) ◽  
pp. 171-178
Author(s):  
Yu.V. Larionov ◽  
Keyword(s):  
Sample Surface ◽  
Anisotropic Etching ◽  
Geometric Parameters ◽  
National Scale ◽  
Linear Measurements ◽  
Important Condition ◽  
Rectangular Profile ◽  
Measurement Results

Possibilities and results of using relief structures produced by anisotropic etching as etalons for linear measurements in nanorange are discussed. Two types of the structures with different profiles and with two approaches to estimation of influence of its sophistication degree on measurement results are considered. Analyze of methods and means of measurements of its geometric parameters and comparison of uncertainness of measurement results are conducted. The important condition for diminishing the measurements uncertainness is taking into account irregularities of a sample surface. These irregularities were evaluated by TEM and CD-AFM. Results of harnessing these types of structures are different also. The bureau International des Poids et Mesures recommended the structure with rectangular profile and its attestation procedure as an example for all national committees on linewidth metrology in nanorange. The structure with trapezoid profile that induced hopes for decision of basic tasks of nanometrology in past is occurred to be poorly in demand even on national scale.

Chemical Imaging Using Microline Laser Ablation: Performance Comparison of Gaussian and Flat Top Lasers

2003 ◽  
Vol 57 (3) ◽  
pp. 343-348 ◽  
Author(s):  
M. P. Mateo ◽  
L. M. Cabalín ◽  
J. J. Laserna
Keyword(s):  
Surface Characterization ◽  
Sample Surface ◽  
Photovoltaic Cell ◽  
Steel Sample ◽  
Chemical Imaging ◽  
Plasma Electron ◽  
Performance Comparison ◽  
Lateral Resolution ◽  
Stainless Steel Sample ◽  
Distribution Maps

In previous studies, the potential of a microline imaging arrangement for surface characterization of solid samples in air at atmospheric pressure using laser-induced plasma spectrometry (LIPS) has been demonstrated. An improvement of this approach to obtain a uniform ablation along the microline focus that leads to a representative spatial distribution of elements on the sample surface is presented. For this purpose, the influence of beam energy distribution of two types of Nd: YAG pulsed lasers (a Gaussian laser and a flat top laser) on lateral resolution, intensity profiles of elements, chemical distribution maps, and plasma electron temperature has been investigated. As models of homogeneous and compositionally patterned samples, a stainless steel sample and a photovoltaic cell were chosen for this study. The results demonstrated that the Gaussian laser provides the best lateral resolution, but more redeposition at both sides of the microline crater, while the chemical maps obtained with the flat top laser matched with the distribution of the constituents of the sample surface.

Lateral resolution of the electron microbeam analysis

1978 ◽  
Vol 36 (1) ◽  
pp. 542-543
Author(s):  
H.J. Dudek
Keyword(s):  
Quantitative Analysis ◽  
Depth Resolution ◽  
Lateral Resolution ◽  
Cylindrical Particle ◽  
Correction Procedure ◽  
X Ray ◽  
Element Concentrations ◽  
Microbeam Analysis ◽  
The Matrix

The chemical inhomogenities in modern materials such as fibers, phases and inclusions, often have diameters in the region of one micrometer. Using electron microbeam analysis for the determination of the element concentrations one has to know the smallest possible diameter of such regions for a given accuracy of the quantitative analysis.In th is paper the correction procedure for the quantitative electron microbeam analysis is extended to a spacial problem to determine the smallest possible measurements of a cylindrical particle P of high D (depth resolution) and diameter L (lateral resolution) embeded in a matrix M and which has to be analysed quantitative with the accuracy q. The mathematical accounts lead to the following form of the characteristic x-ray intens ity of the element i of a particle P embeded in the matrix M in relation to the intensity of a standard S

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