scholarly journals IMPROVEMENT OF LATERAL RESOLUTION UNDER DIMENSIONAL MEASUREMENTS OF NANORELIEF STEP STUCTURES

2019 ◽  
Vol 8 ◽  
pp. 183-190
Author(s):  
Ignat Vykhristyuk ◽  
Rodion Kulikov ◽  
Evgeny Sysoev

The phase shifting interferometry methods allow to reach longitudinal resolution up to ~ 0.1 nm, but value of lateral resolution remains on level of ~ 1 μm. For providing of high lateral resolution of linear measurements in the interference microscope profilometer it was proposed to use the sensor of sharp-edge position detection. Principle of sensor’s measurement is based on registration of laser spot intensity scattered by the measurement sample surface under displacement of sample in the lateral direction. Measurement process and experimental results are presented. The combining of measurement results performed by the profilometer and the sensor of sharp-edge position detection can allow to increase the resolution of measurement of distance between sharp edges on the reconstructed surface nanorelief.

2017 ◽  
Vol 870 ◽  
pp. 34-40
Author(s):  
Evgeny V. Sysoev ◽  
Yuri V. Chugui ◽  
Rodion V. Kulikov ◽  
Ignat A. Vykhristyuk ◽  
Liang Chia Chen ◽  
...  

As is well known, the phase-shifting interferometry techniques allow to reach longitudinal resolution to ~ 0.1 nm, but the value of lateral resolution remains at the level of ~ 1 mm. For providing of high lateral resolution of linear measurements in the interference microscope profilometer it was proposed to use a position detection sensor of sharp edge. Principle of sensor’s measurement is based on registration of laser spot intensity scattered by the measurement sample surface under displacement of sample in the lateral direction. The paper shows the prototype scheme of measurement system containing the Linnik interferometer used for surface nanorelief measurement and a position detection module of sharp edge. Measurement process and experimental results are presented. The combining of measurement results performed by the Linnik interferometer and a position detection sensor of sharp edge can allow us to precisely (better then diffraction limit) define the position of sharp edge on the reconstructed surface nanorelief.


1994 ◽  
Vol 375 ◽  
Author(s):  
Z. H. Ming ◽  
Y. L. Soo ◽  
S. Huang ◽  
Y. H. Kao ◽  
K. Stair ◽  
...  

AbstractInterfacial microstructures in 100-period InxGa1−xAs(15Å)/GaAs(100Å) superlattices grown on GaAs (100) substrates by molecular beam epitaxy were studied by using large angle x-ray scattering techniques. Unusual satellite peaks in the lateral direction parallel to the sample surface were observed in a sample with x = 0.535 grown at 480°C, indicating an in-plane structural ordering. This result is confirmed by high resolution transmission electron microscopy observations that thickness modulation in the InxGa1−xAs layers gives rise to long-range lateral periodic arrays of cluster-like microstructures with spacing on the order of a few hundred Ångstroms. This thickness modulation is found to occur only in [110] direction, thus the material can be viewed as a somewhat disordered array of grown-in parallel quantum wires.


Materials ◽  
2019 ◽  
Vol 12 (11) ◽  
pp. 1788 ◽  
Author(s):  
Guopeng Fan ◽  
Haiyan Zhang ◽  
Wenfa Zhu ◽  
Hui Zhang ◽  
Xiaodong Chai

This paper aims to adopt the total focusing method (TFM) and wavenumber method for characterizing a delamination in ballastless slab track. Twelve dry point contact (DPC) transducers located at the upper surface of the slab track compose a linear array. These transducers are employed to actuate shear waves, which are suitable for identifying the delamination. The technique of removing the surface wave has been implemented for only retaining the scattered wave caused by the delamination and the reflected wave from the bottom of bed plate. Numerical and experimental results demonstrate that the delamination and bottom of the bed plate can be identified by the proposed methods. Furthermore, the near-surface pseudomorphism is distinctly restrained after removing the surface wave. Compared to TFM, the wavenumber method has the great advantages of improving computational performance and lateral resolution. However, they have no significant difference in the longitudinal resolution. Furthermore, it has been confirmed that the lateral resolution can be affected by the amount of transducers. This paper can provide valuable suggestions on improving the computational performance and the imaging accuracy when we identify a delamination in ballastless slab track.


2017 ◽  
Vol 2017 ◽  
pp. 1-10 ◽  
Author(s):  
Ji-Yeon Shim ◽  
Bong-Yong Kang

Electrohydraulic forming (EHF), high-velocity forming technology, can improve the formability of a workpiece. Accordingly, this process can help engineers create products with sharper edges, allowing a product’s radius of curvature to be less than 2 mm radius of curvature. As a forming process with a high-strain rate, the EHF process produces a shockwave and pressure during the discharge of an electrical spark between electrodes, leading to high-velocity impact between the workpiece and die. Therefore, the objective of this research is to develop an EHF process for forming a lightweight materials case with sharp edges. In order to do so, we employed A5052-H32, which has been widely used in the electric appliance industry. After drawing an A5052-H32 Forming Limit Diagram (FLD) via a standard limiting dome height (LDH) test, improvements to the formability via the EHF process were evaluated by comparing the strain between the LDH test and the EHF process. From results of the combined formability, it is confirmed that the formability was improved nearly twofold, and a sharp edge with less than 2 mm radius of curvature was created using the EHF process.


2019 ◽  
Vol 10 (2) ◽  
Author(s):  
Ljubiša Petrov ◽  
Lidija Matija

One of the most perspective available techniques for investigation of the composition, structure and properties of materials, is scanning probe microscopy (SPM), respectively its components scanning tunneling microscopy (STM) and atomic force microscopy (AFM). This technique is used in multidisciplinary research in the field of medicine, pharmacy, dentistry, material science, etc., for study of biological samples, chemical compounds, pharmaceutical products, artificial tissues, implantology materials, and all other materials that have nanotechnological impact on application in these scientific fields. This is because the probes have not perfect size and geometry, which leads to the appearance of artifacts. They are defined as characteristics that appear on the image and are not present on the sample. These effects caused by convolutions between the probe and sample can be corrected to a certain extent by mathematical manipulation of topographic data. The methodology used in this paper is based on algebra of sets, and basic tools of mathematical morphology. Mathematical algorithms for the „blind reconstruction“ of the tip were used, and then in order to detect the parts of the sample surface which is not available in real-time scanning deconvolution was applied. The limit of the real probe tip is calculated from the image, using the morphological limitations inherent in the recording process. The result acuired as an image of the reconstructed surface out of the used images, with the reconstruction of the real tip. The presented results are clear proof of the usability of atomic force microscopy as a technique for imaging of biological materials on nano-level, and the applied algorithms increase the usability of the images in terms of a better conclusion based on precise numerical data taken from the processed images.


2009 ◽  
Vol 2009 ◽  
pp. 120-120 ◽  
Author(s):  
E Rius-Vilarrasa ◽  
L Bünger ◽  
S Brotherstone ◽  
K Matthews ◽  
W Haresign ◽  
...  

Automatic technologies based on video image analysis (VIA) to assess lamb carcass value offer an accurate measure of weight of individual carcass components (Rius-Vilarrasa et al., 2008). In addition, VIA systems offer the possibility to record linear and area traits (dimensional measurements) on the carcass. Linear measurements on the body and carcass have been suggested by several authors as good indicators of live weight, conformation score and production traits in beef and sheep (Maiwashe et al., 2002; Janssens et al., 2004). Therefore, the aims of this study were (1) to estimate genetic parameters for VIA dimensional measurements (VIA-DM) and (2) to investigate the associations between VIA-DM with carcass conformation and fatness.


2013 ◽  
Vol 562-565 ◽  
pp. 286-291
Author(s):  
Hai Feng Zhang ◽  
Xiao Shu Zhang ◽  
Xiao Wei Liu ◽  
Yin Chun Liang ◽  
Rui Weng

A liquid floating rotational micro-gyroscope is proposed in this paper, whose stability is improved by liquid suspension. High rotor velocity is needed to improve its sensitivity. Edge effect is the phenomenon that sharp edges cause much more viscous drag. This work researches edge effect's influence on viscous drag to speed up the rotor. Flow field models of the sharp edge structure and fillet structure are established separately. Viscous drag is measured by simulation and experiment. Edge effect causes a lot of viscous drag and it can be reduced significantly by filleting the rotor. The maximal reduction is one third relative to the sharp edge structure, and it is reached when fillet curvature radius is half of rotor thickness.


2005 ◽  
Vol 11 (S03) ◽  
pp. 2-5 ◽  
Author(s):  
H. U. Danzebrink ◽  
G. Dai ◽  
F. Pohlenz ◽  
G. Wilkening

Quantitative dimensional measurements of micro- and nanometre-sized structures are urgently required from science and industry. Due to their very high vertical resolution (down to sub nanometres) and high lateral resolution (<10 nm) scanning probe microscopes (SPMs) are of great interest for such metrological applications. Additionally, SPM methods are able to measure surfaces in a number of modes like contact, intermittent-contact and non-contact mode. The forces between tip and sample are low during the measurement and, even in contact mode, reach only a few nanonewtons. This fact prevents scratching of the measured surface during the SPM scanning procedure even when very sharp tips are used.


2021 ◽  
Vol 23 (4) ◽  
pp. 171-178
Author(s):  
Yu.V. Larionov ◽  

Possibilities and results of using relief structures produced by anisotropic etching as etalons for linear measurements in nanorange are discussed. Two types of the structures with different profiles and with two approaches to estimation of influence of its sophistication degree on measurement results are considered. Analyze of methods and means of measurements of its geometric parameters and comparison of uncertainness of measurement results are conducted. The important condition for diminishing the measurements uncertainness is taking into account irregularities of a sample surface. These irregularities were evaluated by TEM and CD-AFM. Results of harnessing these types of structures are different also. The bureau International des Poids et Mesures recommended the structure with rectangular profile and its attestation procedure as an example for all national committees on linewidth metrology in nanorange. The structure with trapezoid profile that induced hopes for decision of basic tasks of nanometrology in past is occurred to be poorly in demand even on national scale.


2003 ◽  
Vol 57 (3) ◽  
pp. 343-348 ◽  
Author(s):  
M. P. Mateo ◽  
L. M. Cabalín ◽  
J. J. Laserna

In previous studies, the potential of a microline imaging arrangement for surface characterization of solid samples in air at atmospheric pressure using laser-induced plasma spectrometry (LIPS) has been demonstrated. An improvement of this approach to obtain a uniform ablation along the microline focus that leads to a representative spatial distribution of elements on the sample surface is presented. For this purpose, the influence of beam energy distribution of two types of Nd: YAG pulsed lasers (a Gaussian laser and a flat top laser) on lateral resolution, intensity profiles of elements, chemical distribution maps, and plasma electron temperature has been investigated. As models of homogeneous and compositionally patterned samples, a stainless steel sample and a photovoltaic cell were chosen for this study. The results demonstrated that the Gaussian laser provides the best lateral resolution, but more redeposition at both sides of the microline crater, while the chemical maps obtained with the flat top laser matched with the distribution of the constituents of the sample surface.


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