Research on Vibration Stress Relief for Cured SU-8 Photoresist Layer

2015 ◽  
Vol 1094 ◽  
pp. 487-490
Author(s):  
Qun Feng Yang ◽  
Jian Yi Zheng ◽  
Jun Qing Wang ◽  
Xue Nan Zhao ◽  
Da Yin Wei ◽  
...  

The aim of this work is to reduce the residual stress in cured SU-8 Photoresist layer by vibration stress relief (VSR) method. The vibration device was designed according to the results of the ANSYS modal simulation, which was used for the thin film VSR. Meanwhile, some important influencing factors, such as the excitation current and the vibration time, have been discussed. The residual stress in the SU-8 layer was measured by profile method, and the values of residual stresses in the SU-8 layer before and after VSR were compared. The experimental results show that residual stress in SU-8 layer can be effectively eliminated or homogenized by VSR if the proper vibration parameters were chosen in the experiment.

2019 ◽  
Vol 25 (8) ◽  
pp. 52-61
Author(s):  
Hameed Dwech Lafta ◽  
Sarkawt Rostam ◽  
Fryad Jalal Mahmud ◽  
Ronya Osman Abdulrahman ◽  
Rebin Omer Ali ◽  
...  

This research examines the use of vibratory treatments to reduce residual stresses in small welded parts. In this experimental investigation, a post weld vibration treatment was applied to T- A106 steel pipe fitting specimens to study the effect of the treatment on the residual stress and the hardness of the material. The vibratory stress relief treatment was carried out at different vibration frequency. The results have demonstrated that post-weld vibratory stress relief of small size fittings is possible and residual stress may be relieved, and the treatment may be an alternative method for heat treatment especially when unchange in dimensions and material stability are required.  


Author(s):  
Xin Ren ◽  
Yuan Tian ◽  
Zengliang Gao ◽  
Kangda Zhang

The residual stresses of mismatch butt welds of a cylinder were measured by the blind-hole method before and after a vibratory residual stress relief treatment. The results show that this treatment could greatly reduce the maximal butt weld residual stress of dissimilar steel from 540MPa to 119MPa. The concentrated distributions of the first and the second principal residual stresses became gentle after the vibratory residual stress relief treatment.


2011 ◽  
Vol 88-89 ◽  
pp. 623-627 ◽  
Author(s):  
X.C. Zhao ◽  
Y.D. Zhang ◽  
Y.J. Ma

The process of stress vibratory relief is gaining more and more weight as manufacturing process. This is mainly due to the fact that vibratory stress relief has the advantage of low energy consumption and dramatic reduction of pollution to the environment in respect to traditional thermal stress relief process. A finite element model is developed for the simulation of vibration stress relief (VSR) process. A cantilever beam was pre-stressed and then subjected to transverse cyclic force to see the effect of vibration frequency, time and amplitude on the reduction of residual stress. It was shown that the excitation frequency and amplitude of the load on the beam had great effect on the reduction of the residual stress. Increasing vibration time can decrease the magnitude of residual stress, but its influence reduces greatly after several cycles.


2021 ◽  
Vol 1032 ◽  
pp. 135-140
Author(s):  
Shao Feng Wu ◽  
Xiang Sheng Gao ◽  
Xian Rang Zhang ◽  
Han Jun Gao

Vibration stress relief (VSR) and thermal stress relief (TSR) are important method to eliminate the residual stress of structural parts. The thermal vibratory stress relief (TVSR) is a new method to decrease and homogenize the residual stress. Based on the stress relaxation tests and the equivalent vibration equation of modal analysis, the creep constitutive model and the bilinear isotropic hardening plasticity material model (BISO) are combined to establish the numerical simulation model of TVSR of 7075 aluminum alloy ring part. The simulation results show that four different initial blank residual stress levels are obtained after quenching process, and the residual stress elimination and homogenization effect of TSR and TVSR is better than that of VSR. TVSR has a better effect on both residual stress elimination and homogenization, and the residual stress relief rate can reach more than 20%.


1994 ◽  
Vol 116 (4) ◽  
pp. 249-257 ◽  
Author(s):  
P. E. Phelan ◽  
M. N. Ghasemi Nejhad

Residual stresses are caused by nonuniform thermal expansion and chemical shrinkage taking place during processing. For thin-film high-temperature superconductors, residual stresses result because of the thermal expansion mismatch between the film and substrate, and the introduction of oxygen into the film after in-situ deposition, which makes the unit cell dimensions change (chemical shrinkage) as the oxygen stoichiometry changes. Since both the reliability of the film—especially the bond between the film and substrate—and the film critical temperature are functions of the state of stress, it is important to understand how the residual stresses vary with processing conditions. Here, a three-dimensional residual stress analysis is carried out based on laminate theory, which assumes the lateral dimensions of the entire system to be much larger than its thickness. The normal residual stress components in the film, and the peeling stress at the film/substrate interface, are calculated. The results demonstrate the crucial role that chemical shrinkage plays in the formulation of residual stresses. A large portion of the stresses arises from the initial change of the unit cell dimensions due to changes in the film oxygen stoichiometry. Therefore, the processing temperature, and especially the initial oxygen pressure in the deposition chamber, are the key variables that impact the residual stresses.


2017 ◽  
Vol 905 ◽  
pp. 31-39 ◽  
Author(s):  
Jeremy S. Robinson ◽  
Christopher E. Truman ◽  
Thilo Pirling ◽  
Tobias Panzner

The residual stresses in heat treated 7075 aluminium alloy blocks have been characterised using two neutron diffraction strain scanning instruments. The influence of uniaxial cold compression (1-10%) on relieving the residual stress has been determined. Increasing the magnitude of cold compression from 1 to 10% has been shown to have a beneficial effect on the residual stress distribution by reducing the range between the maximum and minimum residual stresses. The effect of over aging 7075 on residual stress has also been characterised using neutron diffraction and this was found to reduce the residual stress by 25-40%. A relationship between {311} peaks widths and amount of cold compression was also observed.


2003 ◽  
Vol 795 ◽  
Author(s):  
Alex A. Volinsky ◽  
Dirk C. Meyer ◽  
Tilmann Leisegang ◽  
Peter Paufler

ABSTRACTWhile there are many stress relief mechanisms observed in thin films, excessive residual and externally applied stresses cause film fracture. In the case of tensile stress a network of through-thickness cracks forms in the film. In the case of compressive stress thin film buckling is observed in the form of blisters. Thin film delamination is an inseparable phenomenon of buckling. The buckling delamination blisters can be either circular, straight, or form periodic buckling patterns commonly known as telephone cord delamination morphology.While excessive biaxial residual stress is the key for causing thin film fracture, either in tension, or compression, it is the influence of the external stress that can control the final fracture pattern. In this paper we consider phone cord buckling delamination observed in compressed W/Si and TiWN/GaAs thin film systems, as well as spiral and sinusoidal though-thickness cracks observed in Mo/Si multilayers under 3-point high-temperature bending in tension.


2010 ◽  
Vol 42 ◽  
pp. 35-38
Author(s):  
Chun Mei Li ◽  
Feng Kui Cui

In order to improve VSR(Vibration Stress Relief) effect, finite elements method is applied to study VSR process factors. Simulation on moulding process, rough machining process and heat treatment are used to study the residual stress distribution of casting. The modal analysis is carried out to determine exciting frequency, exciting position and support position. Based on residual stress distribution, harmonic response analysis is applied to find relationship between dynamic stress and exciting force. Then the exciting force can be determined. The research results indicate that finite elements method can be used to determine VSR process parameters quickly and accurately.


2014 ◽  
Vol 21 (02) ◽  
pp. 1450024 ◽  
Author(s):  
LIJUN HE ◽  
CHUAN LI ◽  
XINGZHAO LIU

Residual stresses of alumina thin film deposited on silicon substrate by using electron beam evaporation with oblique angle deposition (OAD) method are studied. The growth parameters that affect the residual stresses of alumina thin film, such as the substrate temperature, the deposition rate, the film thickness, the inclined angle, and the testing temperature are discussed. The results show that the tensile stress value decreases with the increasing substrate temperature, and the compressive stress value increases with the increasing substrate temperature at various inclined angles. Along with the deposition rate increasing, the residual stress value decreases at various inclined angles. With the increasing film thickness, the residual stress value decreases at various inclined angles. With the increasing testing temperature, the residual stress value increases at various inclined angles. While the alumina thin film residual stress value is small at high inclined angle. By choosing the appropriate film preparation parameters, the alumina thin film residual stress is effectively controlled.


2014 ◽  
Vol 941-944 ◽  
pp. 2062-2065
Author(s):  
Shu Qi Li ◽  
Hong Yuan Fang ◽  
Xue Song Liu ◽  
Wei Cui

Welded components of low alloy steels are widely used in various applications. Stress reliving is very important to these welded structures. Vibration stress relief (VSR) is an relatively new method for this purpose. In this study, Q235 and Q345 steel plates were welded. Then they were treated by VSR. The microstructure of the welded lines were investigated and the residual stresses in two directions in these welded structures were measured. The difference of the efficiency of VSR on the two materials were investigate. It is found that, the decreasing amplitude of the residual stress in the Q235 welded structures significantly exceeded that in the Q345 welded structures. The grain size in the area near the weld lines is the main factor that affects the efficiency of the VSR treatment.


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