Design of a SEM Compatible Slip-Stick Nano-Positioner with High Bearing Capacity
2012 ◽
Vol 433-440
◽
pp. 3052-3059
Keyword(s):
This paper presents a new structure of slip-stick positioner with a high bearing capacity, which is designed according to the requirement of nano-manipulation in the Scanning Electron Microscope (SEM). In addition, to analyze the performance of the slip-stick positioner, a dynamic model is developed in MATLAB/Simulink. The experimental results demonstrate the excellent performance of this positioner and especially its bearing capacity can be up to 400g.
2013 ◽
Vol 562-565
◽
pp. 1092-1097
2007 ◽
Vol 336-338
◽
pp. 763-764
2012 ◽
Vol 531-532
◽
pp. 527-530
2010 ◽
Vol 28
(6)
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pp. C6G5-C6G10
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Keyword(s):
2015 ◽
Vol 1096
◽
pp. 275-279
1969 ◽
Vol 47
(1)
◽
pp. 236-238
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Keyword(s):