Thermal Characteristics Analysis of Aerostatic Direct Drive Rotary Stage
2013 ◽
Vol 655-657
◽
pp. 287-291
Keyword(s):
A precision air bearing rotary stage driven by direct-driven motor is proposed. The structural characteristic of the rotary system is introduced, and the mechanism of structural thermal deformation and heat dissipation of aerostatic direct drive rotary stage were analyzed. The simulation models of static and transient temperature field are built, and thermal-structure coupled filed is calculated. The internal steady thermal field diagram and key nodes temperature curve of the rotary stage are obtained. Based on the temperature analysis results, the rotary stage structural deformation is established. The cooling method is provided, and result shows that the cooling way is effective.
2014 ◽
Vol 6
◽
pp. 217584
◽
2012 ◽
Vol 271-272
◽
pp. 1441-1445
2014 ◽
Vol 989-994
◽
pp. 2922-2925
2010 ◽
Vol 34-35
◽
pp. 507-511
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2015 ◽
Vol 789-790
◽
pp. 430-435
Keyword(s):
2014 ◽
Vol 986-987
◽
pp. 1864-1868
2011 ◽
Vol 217-218
◽
pp. 1510-1515
2020 ◽