Optimization of Electrode Structures of PZT Acoustic Energy Harvesters Fabricated on SOI Substrate

2013 ◽  
Vol 683 ◽  
pp. 933-936
Author(s):  
Kazuki Tomii ◽  
Shungo Tomioka ◽  
Satoshi Iizumi ◽  
Kyohei Tsujimoto ◽  
Yusuke Uchida ◽  
...  
Keyword(s):  
Power Generation ◽  
Sound Pressure ◽  
Energy Harvester ◽  
Acoustic Energy ◽  
Silicon On Insulator ◽  
Microelectromechanical System ◽  
Energy Harvesters ◽  
Central Surface ◽  
Peripheral Surface ◽  
Central Energy

This paper reports on the power generation performances of a PZT microelectromechanical system (MEMS) acoustic energy harvester having dual top electrodes to utilize the different polarizations of charges on the surface of a vibrating PZT diaphragm at first resonance. The PZT acoustic energy harvester was fabricated on a silicon-on-insulator (SOI) substrate, and had a diaphragm with a diameter of 2 mm consisting of Al (0.1 μm)/PZT (1 μm)/Pt (0.1 μm)/Ti (0.1 μm)/Si (1.0μm)/ (0.5 μm), and the diaphragm vibrations were excited by sound pressure. The top Al electrodes independently cover the peripheral surface and the central surface of the PZT diaphragm. The peripheral energy harvester generated a power of W, and the central energy harvester generated a power of W at an SPL of 100 dB at 9.95 kHz.

PZT Acoustic Energy Harvester Arrays with Dual Top Electrodes

2013 ◽  
Vol 300-301 ◽  
pp. 912-915
Author(s):  
Yusuke Uchida ◽  
Satoshi Iizumi ◽  
Syungo Tomioka ◽  
Kyohei Tsujimoto ◽  
Kazuki Tomii ◽  
...  
Keyword(s):  
Power Generation ◽  
Lead Zirconate Titanate ◽  
Sound Pressure Level ◽  
Sound Pressure ◽  
Energy Harvester ◽  
Lead Zirconate ◽  
Pressure Level ◽  
Acoustic Energy ◽  
Microelectromechanical System ◽  
Energy Harvesters

This paper presents the power generation performances of an array of three microelectromechanical system (MEMS) acoustic energy harvesters equiped with lead–zirconate–titanate (PZT) capacitors. The PZT acoustic energy harvesters had a diaphragm with a　diameter of 2 mm consisting of Al (0.1 μm) / PZT (1 μm) / Pt (0.1 μm) / Ti (0.1 μm) / SiO2 (1.5 μm), and the diaphragm vibrations were excited by sound pressure. The arrayed peripheral energy harvester generated a maximum power of 2.26 × 10-10 W at a sound pressure level (SPL) of 100 dB at 5 kHz. The output power of three arraying devices was about 3 times larger than that of the single devices.

scholarly journals The effect of housing volume of a converting loudspeaker on the output electric power of a loudspeaker-based acoustic energy harvester

2020 ◽  
Vol 4 (2) ◽  
pp. 59
Author(s):  
Ikhsan Setiawan
Keyword(s):  
Electric Power ◽  
Sound Pressure ◽  
Energy Harvester ◽  
Electrical Energy ◽  
Acoustic Resonator ◽  
Acoustic Energy ◽  
Cross Sectional ◽  
Acoustic Transducer ◽  
Main Components ◽  
Output Electric Power

Acoustic energy harvester is a device that converts sound or acoustic energy into electrical energy. Generally, the main components of this instrument are an acoustic transducer and an acoustic resonator. In this study, the transducer used was a 4-inch woofer loudspeaker, without acoustic resonator but equipped with a cylindrical housing with a fixed cross-sectional area and a length that can be varied from 6 cm until 25 cm by using a piston. Experimental results for various housing volumes showed a similar pattern of the dependence of the generated electric power on the incoming sound frequencies. In addition, it was found that (within the range of the volume variations) the output electric power increased significantly when the volume of the housing was increased. The highest root-mean-square (rms) electric power obtained was 1.72 mW resulting from sound with a sound pressure level (SPL) of 105 dB and a frequency of 84 Hz and by using a length of the housing cylinder of 25 cm (housing volume of 3243.7 cm<sup>3</sup>)

Lead Zirconate Titanate Acoustic Energy Harvester Proposed for Microelectromechanical System/IC Integrated Systems

2010 ◽  
Vol 49 (4) ◽  
pp. 04DL21 ◽  
Author(s):  
Shigeki Shinoda ◽  
Takahiro Tai ◽  
Hisanori Itoh ◽  
Tomohisa Sugou ◽  
Hirohide Ichioka ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Energy Harvester ◽  
Lead Zirconate ◽  
Acoustic Energy ◽  
Integrated Systems ◽  
Microelectromechanical System ◽  
Zirconate Titanate

Energy harvesters for rotating systems: Modeling and performance analysis

2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Faiz Basheer ◽  
Elmehaisi Mehaisi ◽  
Ahmed Elsergany ◽  
Ahmed ElSheikh ◽  
Mehdi Ghommem ◽  
...  
Keyword(s):  
Power Generation ◽  
Output Power ◽  
Energy Harvester ◽  
Double Pendulum ◽  
Energy Harvesters ◽  
Rotating Systems ◽  
Optimal Power ◽  
Simulation Results ◽  
And Performance ◽  
Systems Simulation

AbstractAn exclusive reliance on batteries for miniature sensors has created the need for a self-sustained energy harvester to enable permanent power. This work introduces a pendulum-based energy harvester that is capable of harnessing kinetic energy from rotating structures to generate electric power through electromagnetic transduction. A computational model of the energy harvesting device is developed on Simscape to compute, analyze and compare the power generation capacities of the single, double and Rott’s pendulum systems. Simulation results are validated against their experimental counterparts reported in the literature. Results show an increase in the output voltage in a specific range of rotational speed for all three pendulum harvesters. The double pendulum exhibits the highest power generation potential among the simulated pendulum arrangements. A parametric study revealed that increasing the damping of the harvester decreased its output power, whereas an increase in mass and length of the harvester is observed to increase the output power and shift the optimal power generation subrange.

Modeling and parametric study of a force-amplified compressive-mode piezoelectric energy harvester

2016 ◽  
Vol 28 (3) ◽  
pp. 357-366 ◽  
Author(s):  
Zhengbao Yang ◽  
Jean Zu ◽  
Jun Luo ◽  
Yan Peng
Keyword(s):  
Power Generation ◽  
Energy Harvester ◽  
Low Frequency ◽  
Lumped Parameter Model ◽  
Small Scale ◽  
Energy Harvesters ◽  
Piezoelectric Energy ◽  
Multi Stage ◽  
Lumped Parameter ◽  
Compressive Mode

Piezoelectric energy harvesters have great potential for achieving inexhaustible power supply for small-scale electronic devices. However, the insufficient power-generation capability and the narrow working bandwidth of traditional energy harvesters have significantly hindered their adoption. To address these issues, we propose a nonlinear compressive-mode piezoelectric energy harvester. We embedded a multi-stage force amplification mechanism into the energy harvester, which greatly improved its power-generation capability. In this article, we describe how we first established an analytical model to study the force amplification effect. A lumped-parameter model was then built to simulate the strong nonlinear responses of the proposed energy harvester. A prototype was fabricated which demonstrated a superior power output of 30 mW under an excitation of 0.3 g ([Formula: see text] m/s2). We discuss at the end the effect of geometric parameters that are influential to the performance. The proposed energy harvester is suitable to be used in low-frequency weak-excitation environments for powering wireless sensors.

scholarly journals An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications

Micromachines ◽  
2020 ◽  
Vol 11 (3) ◽  
pp. 267 ◽  
Author(s):  
Chikako Sano ◽  
Manabu Ataka ◽  
Gen Hashiguchi ◽  
Hiroshi Toshiyoshi
Keyword(s):  
Sound Pressure ◽  
Low Voltage ◽  
Input Voltage ◽  
Plane Motion ◽  
Silicon On Insulator ◽  
Electrostatic Actuators ◽  
Microelectromechanical System ◽  
Acoustic Transducer ◽  
Out Of Plane ◽  
Dc Bias

Despite the development of energy-efficient devices in various applications, microelectromechanical system (MEMS) electrostatic actuators yet require high voltages to generate large displacements. In this respect, electrets exhibiting quasi-permanent electrical charges allow large fixed voltages to be integrated directly within electrode structures to reduce or eliminate the need of DC bias electronics. For verification, a − 40   V biased electret layer was fabricated at the inner surface of a silicon on insulator (SOI) structure facing a 2 μm gap owing to the high compatibility of silicon micromachining and the potassium-ion-electret fabrication method. A − 10   V electret-augmented actuator with an out-of-plane motion membrane reached a sound pressure level (SPL) of 50 dB maximum with AC input voltage of V i n = 5   V pp alone, indicating a potential for acoustic transducer usage such as microspeakers. Such devices with electret biasing require only the input signal voltage, thus contributing to reducing the overall power consumption of the device system.

Towards Optimizing DC Loads for Power Generation From Arbitrarily Excited Nonlinear Vibration Energy Harvesters

2017 ◽  
Author(s):  
Quanqi Dai ◽  
Ryan L. Harne
Keyword(s):  
Power Generation ◽  
Energy Harvester ◽  
Load Resistance ◽  
Harmonic Excitation ◽  
Vibration Energy ◽  
Energy Harvesters ◽  
Dc Power ◽  
Resistive Loads ◽  
Periodic Components ◽  
Nonlinear Energy

In order to effectively take advantage of stiffness nonlinearities in vibration energy harvesters, the harvesters must be appropriately designed to ensure optimum direct current (DC) power generation. Yet, such optimization has only previously been investigated for alternating current (AC) power generation although most electronics demand DC power for their functioning. Moreover, real world excitations contain stochastic contributions combined with periodic components that challenges conventional approaches of investigation that only give attention to the harmonic excitation parts. To fill in the knowledge gap, this research undertakes comprehensive simulations to begin formulating conclusive understanding on the relationships between rectified power generation and nonlinear energy harvester system characteristics when the platforms are subjected to realistic combinations of harmonic and stochastic excitations. According to the simulation results, the rectified power demonstrates clear dependence on the load resistance in the unique limiting cases of complete or no stochastic excitation. When the excitation vibrations include both harmonic and stochastic components, the optimal resistance to maximize DC power exhibits a smoothly correlated but nonlinear change between the limiting case values of the resistance. The results of this investigation provide direct evidence of the intricate relationships among peak DC power, optimal resistive loads, and the nonlinear energy harvester design, and encourage continued study for direct analytical expressions that define such relationships.

A Rainbow Piezoelectric Energy Harvesting System for Intelligent Tire Monitoring Applications

2019 ◽  
Vol 141 (6) ◽  
Author(s):  
Roja Esmaeeli ◽  
Haniph Aliniagerdroudbari ◽  
Seyed Reza Hashemi ◽  
Ashkan Nazari ◽  
Muapper Alhadri ◽  
...  
Keyword(s):  
Power Generation ◽  
Energy Harvesting ◽  
Wireless Communication ◽  
Data Transmission ◽  
Communication Systems ◽  
Energy Harvester ◽  
Wireless Communication Systems ◽  
Energy Harvesters ◽  
Piezoelectric Energy ◽  
Transmission Speed

Intelligent tires can be used in autonomous vehicles to insure the vehicle safety by monitoring the tire and tire-road conditions using sensors embedded on the tire. These sensors and their wireless communication systems need to be powered by energy sources such as batteries or energy harvesters. The deflection of tires during rotation is an available and reliable source of energy for electric power generation using piezoelectric energy harvesters to feed tire self-powered sensors and their wireless communication systems. The aim of this study is to design, analyze, and optimize a rainbow-shaped piezoelectric energy harvester mounted on the inner layer of a pneumatic tire for providing enough power for microelectronics devices required for monitoring intelligent tires. It is shown that the designed piezoelectric energy harvester can generate sufficient voltage, power, and energy required for a tire pressure monitoring system (TPMS) with high data transmission speed or three TPMSs with average data transmission speed. The effect of the vehicle speed on the voltage and electric energy generated by the designed piezoelectric is also studied. The geometry and the circuit load resistance of the piezoelectric energy harvester are optimized in order to increase the energy harvesting efficiency. It is shown that the optimized rainbow piezoelectric energy harvester can reach the highest power generation among all the strain-based energy harvesters that partially cover the inner layer of the tire.

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