Traceable Dimension Metrology by AFM for Nanoscale Process Control

2008 ◽  
Vol 381-382 ◽  
pp. 549-552
Author(s):  
Tim Bao
Keyword(s):  
Process Control ◽  
Atomic Force Microscope ◽  
Significant Role ◽  
Manufacturing Industry ◽  
Shape Effect ◽  
Measurement Systems ◽  
Atomic Force ◽  
Dimension Measurement ◽  
The Impact ◽  
Reference Tool

Your 32nm is different from my 32nm! The paradoxical statement reflects one of the most essential debates in the field of nanoscale dimension metrology for process control in the modern nanoelectronic manufacturing industry. This baffling debate is all about accuracy and traceability of dimension measurement systems used on production floors. As the circuit geometry and density continues to scale to the 45nm node and below, the metrology bias and uncertainty play a more significant role, and the characterization becomes more difficult. This article assesses the capability of atomic force microscope (AFM) as an accurate inline calibration metrology tool and the correlation of AFM measurement to NIST traceable standards. It introduces the methodology of adopting AFM as a traceable reference tool for CD SEM and optical scatterometry used in inline process control. The focus is on height, linewidth, and pitch calibrations due to their critical but challenging roles for process control in today’s nanoelectronic manufacturing. Care must be taken to minimize the impact from factors that affect the traceability and accuracy in the AFM system, including tip width calibration, tip wear, tip shape effect, contamination, and linewidth roughness.

Critical-Dimension Measurement using Multi-Angle-Scanning Method in Atomic Force Microscope

2006 ◽  
Vol 45 (7) ◽  
pp. 5928-5932 ◽  
Author(s):  
Ken Murayama ◽  
Satoshi Gonda ◽  
Hajime Koyanagi ◽  
Tsuneo Terasawa ◽  
Sumio Hosaka
Keyword(s):  
Atomic Force Microscope ◽  
Critical Dimension ◽  
Scanning Method ◽  
Atomic Force ◽  
Dimension Measurement

scholarly journals Atomic Force Microscope Nanoindentation Analysis of Diffuse Astrocytic Tumor Elasticity: Relation with Tumor Histopathology

Cancers ◽  
2021 ◽  
Vol 13 (18) ◽  
pp. 4539
Author(s):  
Abraham Tsitlakidis ◽  
Anastasia S. Tsingotjidou ◽  
Aristeidis Kritis ◽  
Angeliki Cheva ◽  
Panagiotis Selviaridis ◽  
...  
Keyword(s):  
White Matter ◽  
Atomic Force Microscope ◽  
World Health ◽  
Diffuse Glioma ◽  
Diffuse Astrocytoma ◽  
Tissue Elasticity ◽  
Atomic Force ◽  
Idh Mutations ◽  
The Impact ◽  
Adjacent Brain

This study aims to investigate the influence of isocitrate dehydrogenase gene family (IDH) mutations, World Health Organization (WHO) grade, and mechanical preconditioning on glioma and adjacent brain elasticity through standard monotonic and repetitive atomic force microscope (AFM) nanoindentation. The elastic modulus was measured ex vivo on fresh tissue specimens acquired during craniotomy from the tumor and the peritumoral white matter of 16 diffuse glioma patients. Linear mixed-effects models examined the impact of tumor traits and preconditioning on tissue elasticity. Tissues from IDH-mutant cases were stiffer than those from IDH-wildtype ones among anaplastic astrocytoma patients (p = 0.0496) but of similar elasticity to IDH-wildtype cases for diffuse astrocytoma patients (p = 0.480). The tumor was found to be non-significantly softer than white matter in anaplastic astrocytomas (p = 0.070), but of similar elasticity to adjacent brain in diffuse astrocytomas (p = 0.492) and glioblastomas (p = 0.593). During repetitive indentation, both tumor (p = 0.002) and white matter (p = 0.003) showed initial stiffening followed by softening. Stiffening was fully reversed in white matter (p = 0.942) and partially reversed in tumor (p = 0.015). Tissue elasticity comprises a phenotypic characteristic closely related to glioma histopathology. Heterogeneity between patients should be further explored.

Development of a High-pressure Scanning Probe Microscope for the study of in situ corrosion mechanisms of metallic materials

2012 ◽  
Vol 1474 ◽  
Author(s):  
Christophe Harder ◽  
L. Berlu ◽  
B. Reneaume
Keyword(s):  
High Pressure ◽  
Atomic Force Microscope ◽  
Scanning Probe ◽  
Ex Situ ◽  
Scanning Tunneling ◽  
Gaseous Species ◽  
Atomic Force ◽  
Corrosion Mechanisms ◽  
The Impact

ABSTRACTCorrosion mechanisms take place at the extreme surface of materials before spreading in the bulk. In this way, in situ surface characterization techniques as scanning probe microscopy (Scanning Tunneling Microscopy (STM) and Atomic Force Microscopy (AFM)) allow the observations of the very initial reaction steps.To achieve that goal, an environmental cell has been designed ; it is able to integrate either an atomic force microscope (AFM) or a scanning tunneling microscope (STM). This cell can resist to internal pressures ranging from 10-5 to 20 atm. Heterogeneous “solid – gas” reactions that only occur with pressures above several atmospheres, can then be studied. This could be achieved by following the topographical evolution of samples reacting with gaseous species. Identification of the surface defects at the origin of corrosive attacks as well as proposition of reaction mechanisms will be describe in future works.The present work shows first in situ measurements that validate this new and unique experimental “HP-AFM” (High Pressure Atomic Force Microscope). The impact of the atmosphere’s composition as well as the pressure values on the topographical measurements recorded by the AFM system is especially studied.In this way, a calibration standard is used to detect a potential working drift of the AFM system (scanner head displacements, optical detection …) that could lead to eventual distortions of pictures recorded and misinterpretation of observations. This sample has been studied under several experimental conditions and the results have shown an identical behaviour of the AFM used ex situ and in situ under Ar or He up to 1.5 atm as well as a good stability during long recording acquisitions (up to 90 min) necessary for kinetic studies.

Heat transfer between a hot AFM tip and a cold sample: impact of the air pressure

2013 ◽  
Vol 1543 ◽  
pp. 159-164 ◽  
Author(s):  
Pierre-Olivier Chapuis ◽  
Emmanuel Rousseau ◽  
Ali Assy ◽  
Séverine Gomès ◽  
Stéphane Lefèvre ◽  
...  
Keyword(s):  
Heat Transfer ◽  
Heat Flux ◽  
Atomic Force Microscope ◽  
Air Pressure ◽  
Ballistic Regime ◽  
Sample Heat ◽  
Atomic Force ◽  
The Impact

ABSTRACTWe observe the heat flux exchanged by the hot tip of a scanning thermal microscope, which is an instrument based on the atomic force microscope. We first vary the pressure in order to analyze the impact on the hot tip temperature. Then the distance between the tip and a cold sample is varied down to few nanometers, in order to reach the ballistic regime. We observe the cooling of the tip due to the tip-sample heat flux and compare it to the current models in the literature.

scholarly journals The Quantitative Nanomechanical Mapping of Starch/Kaolin Film Surfaces by Peak Force AFM

Polymers ◽  
2021 ◽  
Vol 13 (2) ◽  
pp. 244
Author(s):  
Anita Kwaśniewska ◽  
Michał Świetlicki ◽  
Adam Prószyński ◽  
Grzegorz Gładyszewski
Keyword(s):  
Surface Roughness ◽  
Waste Management ◽  
Atomic Force Microscope ◽  
Adhesion Force ◽  
Peak Force ◽  
Kaolin Clay ◽  
Roughness Parameters ◽  
Atomic Force ◽  
Starch Films ◽  
The Impact

Starch films modified with additives are materials increasingly being used in the production of packaging. These types of biopolymers can, to a considerable degree, replace plastic, contributing to the reduction in both production and waste management costs. However, they should be characterised by specific mechanical and surface parameters which determine their application. In the presented work, the PeakForce Quantitative Nanomechanics Mapping (PFQNM) method was applied to analyse a starch-based biopolymer modified with two different kaolin clay contents (5% and 10%). The technique used facilitates the assessment of the correlation of Atomic Force Microscope AFM height parameters with nanomechanical ones which provide the definitions of mutual interactions and allow the possibility to analyse materials in respect of various details. The investigated material was mapped in the Derjaguin–Muller–Toporov (DMT) modulus, adhesion and height domains. The results obtained indicated the impact of additives on the determined parameters. Increases in the DMT modulus and the adhesion force, along with the kaolin content, were observed. The enhancement of starch films with kaolin clay also induced growth in the surface roughness parameters.

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