Design and Analysis of Capacitive Micromachined Ultrasonic Transducers Based on SU-8

2015 ◽  
Vol 645-646 ◽  
pp. 577-582 ◽  
Author(s):  
Yu Ping Li ◽  
Chang De He ◽  
Juan Ting Zhang ◽  
Jin Long Song ◽  
Wen Dong Zhang ◽  
...  

In this paper, a new capacitive micromachined ultrasonic transducer (CMUT) is designed by using SU-8 material, and the theory of elastic thin plate is used to deduce the relationship between the pressure and capacitance of the structure. Simulation has been done about SU-8 CMUT by finite element method software ANSYS. The deformation of CMUT under acoustic pressure, the relationship between frequency, thickness and sensitivity, as well as the acoustic impedance and reflection coefficient of SU-8 material also have been studied through the simulation. The results turn out that SU-8 has the advantages of big dynamic range, high sensitivity and small acoustic impedance, so it has broad application in the ultrasonic field.

Micromachines ◽  
2019 ◽  
Vol 10 (2) ◽  
pp. 152 ◽  
Author(s):  
Kevin Brenner ◽  
Arif Ergun ◽  
Kamyar Firouzi ◽  
Morten Rasmussen ◽  
Quintin Stedman ◽  
...  

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.


2013 ◽  
Vol 744 ◽  
pp. 478-483
Author(s):  
Bo Yang ◽  
Bo Dai ◽  
Hui Zhao

Resonant micro-accelerometers have good properties such as the large dynamic range, the high sensitivity, the strong anti-interference ability as well as the direct digital output. A new z-axis resonant micro-accelerometer based on electrostatic stiffness is researched. The new z-axis resonant micro-accelerometer consists of a torsional accelerometer and two plane resonators. The sensing movement of the accelerometer is decoupled with oscillation of the plane resonators by electrostatic stiffness, which will benefit to improve the performance of the new z-axis resonant micro-accelerometer. The new structure is designed. The sensitive theory of the acceleration is investigated and the equation of scale factor is deduced under ideal conditions. The simulation is implemented to verify the basic principle by the Ansys and Matlab. The structure simulation results prove that the effective frequency of the torsional accelerometer and the resonator are 0.66kHz and 13.3kHz separately. And the interference modes are isolated with the effective mode apparently. The system simulation results indicate that the scale factor is 37Hz/g and the system has excellent capabilities in locking and tracking natural frequency of resonators, which proves that the basic theory is feasible.


Author(s):  
Yorinobu Murata ◽  
Hiroki Toda ◽  
Masataka Ikeda ◽  
Yoshiyuki Nii ◽  
Jiro Yohso

In order to test the fretting fatigue cracks with high sensitivity, which occurred on the wheel seat of hollow axles of Shinkansen vehicles, the design of a focused ultrasonic transducer was proposed by a new method. The method was achieved by designing a suitable surface shape of the ultrasonic transducer through a reverse analysis of the wave propagation in the axle so that all radiated waves from the transducer were focused into a point region of the wheel seat with a same phase. A composite piezoelectric material was applied to the focused ultrasonic transducers in order to test with a shorter ultrasonic pulse. As the result of evaluating the performance of the developed focused ultrasound transducer, comparing with the previous plate-like ultrasonic transducer made using PZT, a great improvement was demonstrated in respect of sensitivity and directivity. Furthermore, the method inclining the ultrasonic beam slightly to the circumference direction and the method making the frequency characteristic of the transducer high were devised in order to reduce the influence of echoes by press fit. Consequently, it was demonstrated that a focused incline ultrasonic transducer of 10 MHz was possible to evaluate up to an artificial crack of about 0.17 mm depth with the SN ratio of 9 dB.


Micromachines ◽  
2019 ◽  
Vol 10 (5) ◽  
pp. 319 ◽  
Author(s):  
Mansoor Ahmad ◽  
Ayhan Bozkurt ◽  
Omid Farhanieh

This article presents a new wafer-bonding fabrication technique for Capacitive Micromachined Ultrasonic Transducers (CMUTs) using polymethyl methacrylate (PMMA). The PMMA-based single-mask and single-dry-etch step-bonding device is much simpler, and reduces process steps and cost as compared to other wafer-bonding methods and sacrificial-layer processes. A low-temperature (< 180 ∘ C ) bonding process was carried out in a purpose-built bonding tool to minimize the involvement of expensive laboratory equipment. A single-element CMUT comprising 16 cells of 2.5 mm radius and 800 nm cavity was fabricated. The center frequency of the device was set to 200 kHz for underwater communication purposes. Characterization of the device was carried out in immersion, and results were subsequently validated with data from Finite Element Analysis (FEA). Results show the feasibility of the fabricated CMUTs as receivers for underwater applications.


2013 ◽  
Vol 816-817 ◽  
pp. 892-896 ◽  
Author(s):  
Reshmi Maity ◽  
R.K. Thapa ◽  
S. Baishya

The present paper focuses on the theory of vibration of a circular micro-machined ultrasonic transducer to model a single cell of Capacitive Micromachined Ultrasonic Transducers (CMUTs) and it describes the displacement behavior of membrane with respect to applied static bias following Masons analysis of a suspended membrane under tension. Analysis of the critical parameters like collapse voltage and membrane deflection is made and compared with experimental results to verify the validity of the model.


2014 ◽  
Vol 7 (13) ◽  
Author(s):  
Reynaldo Tronco Gasparini ◽  
Vera Lúcia da Silveira Nantes Button

The study of the acoustic field generated by an ultrasonic transducer is fundamental to its construction and characterization, because it defines how it will behave before being built. It also defines whether it is feasible or not, for the application to which it was designed. It can also lead to modifications to the project so it behaves as expected. In this work, a software was implemented in MATLAB®, for computational simulation of acoustic fields generated by ultrasonic transducers of different configurations. Two models were used, Zemanek and Stepanishen. Transducers with focus and apodization and transmission medium with attenuation may also be simulated. For the simulation of Zemanek’s model, the mathematical method of discretization was used. The Stepanishen’s model used an analytical solution for the impulse response. The developed programs were aggregated into a computer package, named FSIM, and a graphic interface was created. The user can choose among some of the transducer configurations and simulation parameters already implemented. FSIM has a modular architecture and allows further simulation modules to be added. The simulations were validated comparing results to those previously published in classical papers from Zemanek, and from Lockwood and Willete, in addition to prior results from research studies conducted at the Biomedical Engineering Department of the School of Electrical and Computing Engineering at the Universidade Estadual de Campinas (UNICAMP).Resumen: El estudio del campo acústico generado por un transductor ultrasónico es fundamental para su construcción y caracterización, ya que define cómo se comportará antes de ser construido. También define si realmente es factible para la aplicación a la que fue diseñado, y también puede sugerir modificaciones al proyecto, para que se comporte como se espera. En este trabajo un software fue implementado en MATLAB®, para la simulación computacional de los campos acústicos generados por los transductores ultrasónicos de diferentes configuraciones. Dos modelos fueran usados, Zemanek y Stepanishen. Transductores con el enfoque y apodización y medios con atenuación también pueden ser simulados. Para la simulación del modelo de Zemanek, se utilizó el método matemático de discretización y para el modelo de Stepanishen, se empleó una solución analítica para la respuesta impulsiva. Los programas desarrollados fueron agregados en un paquete computacional, llamado FSIM, y una interfaz gráfica fue creada. El usuario puede elegir entre algunas configuraciones del transductor y parámetros de simulación ya implementados; FSIM tiene una arquitectura modular y permite que otros módulos de simulación sean añadidos. Las simulaciones fueron validadas comparando resultados obtenidos previamente por otros trabajos de investigación del Departamento de Ingeniería Biomédica de la Facultad de Ingeniería Eléctrica y Computación de la UNICAMP y por los artículos clásicos de Zemanek y Lockwood y Willette.


2015 ◽  
Vol 24 (05) ◽  
pp. 1550062 ◽  
Author(s):  
Linas Svilainis ◽  
Vytautas Dumbrava ◽  
Andrius Chaziachmetovas

Comparison of two high power pulser topologies is presented. Pulser design was aimed for piezoelectric transducer excitation, yet it can also be used for electromagnetic acoustic transducer (EMAT) or capacitive micromachined ultrasonic transducers (CMUTs) excitation. Pulser can produce both single rectangular pulse and trains of rectangular arbitrary duration pulses. In order to achieve the economy of the electrical power consumption and speed both high-pulling and low-pulling elements are active switches. Energy per pulse was used to evaluate the amount of energy consumed. Two topologies were selected for evaluation: transformer output push–pull topology and half bridge output. Experimental investigation results are presented.


2016 ◽  
Vol 860 ◽  
pp. 35-40 ◽  
Author(s):  
Reshmi Maity ◽  
Niladri Pratap Maity ◽  
R.K. Thapa ◽  
S. Baishya

The generation and detection of ultrasound in air has many applications in the field of ranging, non-destructive evaluation, microscopy and the most impactful in medical imaging. Conventional designs of electrostatic transducers have large electrode spacing of 50-100 μm which reduces the sensitivity of these capacitors. In the last one and a half decade silicon micromachining is used to define capacitors with gap spacing as small as 500Å, making it possible highly efficient capacitive micromachined ultrasonic transducers (CMUTs). In this paper a CMUT element is analytically characterized and FEM simulated. The observations are compared with published experimental results and excellent agreement is found between them.


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