Radiation Hardness of 4H-SiC JFETs in MGy Dose Ranges

2020 ◽  
Vol 1004 ◽  
pp. 1109-1114
Author(s):  
Akinori Takeyama ◽  
Keigo Shimizu ◽  
Takahiro Makino ◽  
Yuichi Yamazaki ◽  
Shin Ichiro Kuroki ◽  
...  

Silicon carbide junction field effect transistors (SiC JFETs) were irradiated with gamma-rays up to 9 MGy (H2O). With increasing dose, apparent shift of drain current-gate voltage (ID-VG) curves to negative voltage side as observed for SiC metal oxide semiconductor (MOS) FETs did not take place. No significant difference is observed between drain and gate leakage currents of irradiated JFETs. This strongly indicates that defects as leakage paths were introduced into not bulk region but the interface between bulk and the passivation layer of SiO2. While, the transfer characteristics including threshold voltage and transconductance were slightly changed compared with the pristine sample. After drain voltage (VD) was abruptly applied to 6 V, ID at VG= 0 V increased slowly as a function of time. This indicates that variation of transfer characteristics is attributed to capture and emission process at defects generated in channel region.

2002 ◽  
Vol 743 ◽  
Author(s):  
Z. Y. Fan ◽  
J. Li ◽  
J. Y. Lin ◽  
H. X. Jiang ◽  
Y. Liu ◽  
...  

ABSTRACTThe fabrication and characterization of AlGaN/GaN metal-oxide-semiconductor heterostructure field-effect transistors (MOSHFETs) with the δ-doped barrier are reported. The incorporation of the SiO2 insulated-gate and the δ-doped barrier into HFET structures reduces the gate leakage and improves the 2D channel carrier mobility. The device has a high drain-current-driving and gate-control capabilities as well as a very high gate-drain breakdown voltage of 200 V, a cutoff frequency of 15 GHz and a maximum frequency of oscillation of 34 GHz for a gate length of 1 μm. These characteristics indicate a great potential of this structure for high-power-microwave applications.


2016 ◽  
Vol 858 ◽  
pp. 860-863 ◽  
Author(s):  
Takuma Matsuda ◽  
Takashi Yokoseki ◽  
Satoshi Mitomo ◽  
Koichi Murata ◽  
Takahiro Makino ◽  
...  

Radiation response of 4H-SiC vertical power Metal-Oxide-Semiconductor Field Effect Transistors (MOSFETs) was investigated at 150°C up to 10.4 MGy. Until irradiation at 1.2 MGy, the drain current – gate voltage curves of the SiC MOSFETs shifted to the negative voltage side, and the leakage of drain current at gate voltages below threshold voltage increased with increasing absorbed dose. However, no significant change in the electrical characteristics of SiC MOSFETs was observed at doses above 1.2 MGy. For blocking characteristics, there were no degradations of the SiC MOSFETs irradiated at 150°C even after irradiated at 10.4 MGy.


MRS Bulletin ◽  
2009 ◽  
Vol 34 (7) ◽  
pp. 514-521 ◽  
Author(s):  
M. Hong ◽  
J. Kwo ◽  
T.D. Lin ◽  
M.L. Huang

AbstractAn overview is given on scientific and device advances for InGaAs metal oxide semiconductor heterostructures and inversion channel metal oxide semiconductor field-effect transistors (MOSFETs), with emphasis on results using ultrahigh vacuum-deposited Ga2O3(Gd2O3) [GGO] as high-κ dielectrics. Regardless of the approaches used to deposit high-κ dielectrics on InGaAs, critical material and electrical parameters of fabricating inversion channel InGaAs MOSFETs must be ready for complementary MOS technology beyond the 16-nm node, and some of these parameters have been achieved. These parameters include low interfacial density of states; low electrical leakage currents; high-temperature (800–900°C) thermal stability for high-κ dielectrics/InGaAs heterostructures, where the amorphous oxide structure and atomically smooth and sharp interfaces are retained; and oxide scalability with a capacitance equivalent thickness of ≤1 nm. Interfacial chemical properties and band parameters, which are important for device design in the high κs/InGaAs, have been thoroughly studied. Representative enhancement-mode InGaAs MOSFETs are compared and correlated with the interfacial structures. Deposition methods and electrical characteristics of high-κ dielectrics on InGaA are discussed. The inversion channel InGaAs MOSFETs of 0.4–1.0 μm gate length have exhibited excellent device performance in terms of drain current and transconductance.


2014 ◽  
Vol 778-780 ◽  
pp. 1197-1200
Author(s):  
Masato Hori ◽  
Yuki Asai ◽  
Masashi Yoneoka ◽  
Isao Tsunoda ◽  
Kenichiro Takakura ◽  
...  

To solve the problem of the limitation to improve device performance in standard Si integration technologies and to develop radiation-harsh devices, the irradiation effects of Si1-xCx source/drain (S/D) n-type metal oxide semiconductor field effect transistors (n-MOSFETs) have been investigated. It is shown that the drain current and the maximum electron mobility of Si1-xCx n-MOSFETs decrease by electron irradiation. The reduction of the device performance can be explained by the radiation-induced lattice defects in the devices. However, the electron mobility enhancement effect by adding C remained after an electron irradiation up to 5×1017 e/cm2.


Aggressive scaling of Metal-oxide-semiconductor Field Effect Transistors (MOSFET) have been conducted over the past several decades and now is becoming more intricate due to its scaling limit and short channel effects (SCE). To overcome this adversity, a lot of new transistor structures have been proposed, including multi gate structure, high-k/metal gate stack, strained channel, fully-depleted body and junctionless configuration. This paper describes a comprehensive 2-D simulation design of a proposed transistor that employs all the aforementioned structures, named as Junctionless Strained Double Gate MOSFETs (JLSDGM). Variation in critical design parameter such as gate length (Lg ) is considered and its impact on the output properties is comprehensively investigated. The results shows that the variation in gate length (Lg ) does contributes a significant impact on the drain current (ID), on-current (ION), off-current (IOFF), ION/IOFF ratio, subthreshold swing (SS) and transconductance (gm). The JLSDGM device with the least investigated gate length (4nm) still provides remarkable device properties in which both ION and gm(max) are measured at 1680 µA/µm and 2.79 mS/µm respectively


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