Normally-Off GaN Power Device Based on Stack AlGaN Barrier Structure and P-Type NiO Gate Electrode
In this study, we propose a novel normally-off AlGaN/GaN HFET based on stack AlGaN barrier structure and p-type NiO gate. The residual thin AlGaN barrier (with low Al content) is adopted to alleviate mobility degradation. Besides, p-type conductive NiO formed by thermal oxidation at 500 °C was used as gate electrode, which contribute to the positive shift of threshold voltage. Combining NiO gate and thin barrier structure, normally-off device with a threshold voltage of +1.1 V is realized. Temperature dependent transfer characteristics show that the normally-off device presents good thermally stability within the temperature range from 25 to 150 °C.
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2010 ◽
Vol 58
(9)
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pp. 2319-2325
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2016 ◽
Vol 45
(6)
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pp. 2656-2661
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