Photoluminescence Imaging and Discrimination of Threading Dislocations in 4H-SiC Epilayers
2013 ◽
Vol 740-742
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pp. 653-656
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Keyword(s):
X Ray
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Photoluminescence images and spectra of threading screw dislocations (TSDs) and threading edge dislocations (TEDs) were obtained and compared with synchrotron X-ray topography images. Discrimination between TSDs and TEDs by analysis of PL spot size in the imaging technique as well as PL spectra of the dislocations in a near infrared region is demonstrated. We also have succeeded in cross-sectional PL imaging of threading dislocations in a thick epilayer.