14.6 mΩcm2 3.3 kV DIMOSFET on 4H-SiC (000-1)
2014 ◽
Vol 778-780
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pp. 935-938
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Keyword(s):
Silicon carbide double-implanted metal-oxide-semiconductor field-effect transistors (DIMOSFETs) were fabricated on 4H-SiC (000-1) carbon face. The effect of current spread layer (CSL) structure was studied. 1.9 mm × 1.9 mm DIMOSFETs were characterized from room temperature to 200°C. At room temperature, the specific on-resistance of this MOSFET was 14.8 mΩcm2 at a gate bias of 20 V and a drain voltage of 0.5 V. The blocking voltage of this MOSFET was 3300 V. At 300 °C, the specific on-resistance increased from 14.8 mΩcm2 to 83.9 mΩcm2 and the threshold voltage decreased from 5.3 V to 3.4 V.
2010 ◽
Vol 645-648
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pp. 987-990
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2011 ◽
Vol 679-680
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pp. 607-612
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2017 ◽
Vol 16
(1)
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pp. 69-74
2013 ◽
Vol 28
(4)
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pp. 415-421
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2006 ◽
pp. 1011-1014
Keyword(s):
2005 ◽
pp. 593-596
Keyword(s):
2005 ◽
Vol 483-485
◽
pp. 593-596
◽