Morphology and Microstructure of Tungsten Films by Magnetron Sputtering

2018 ◽  
Vol 913 ◽  
pp. 416-423 ◽  
Author(s):  
Jian Gang Yu ◽  
Wen Jia Han ◽  
Zhong Chao Sun ◽  
Kai Gui Zhu
Keyword(s):  
Thin Films ◽  
Electron Microscope ◽  
Magnetron Sputtering ◽  
Processing Parameters ◽  
X Ray Diffraction ◽  
Total Stress ◽  
X Ray ◽  
Grain Orientations ◽  
Morphology Of Films ◽  
Scanning Electron

In this work, tungsten thin films were deposited on different substrates by magnetron sputtering and some of the films were then annealed at 1000°C for 1 hour in order to investigate the influence of different processing parameters on morphology and microstructure of films. Scanning electron microscope and x-ray diffraction were used to detect the morphology and microstructure of films. Under the same conditions, the thin films on different substrates showed different preferred grain orientations although the morphologies were similar. After thermal treatment, the morphology of films changed significantly and the total stress parallel to film surfaces dropped off sharply.

Investigation on AZO Films Deposited by Radio-Frequency Reactive Magnetron Sputtering

2013 ◽  
Vol 320 ◽  
pp. 35-39
Author(s):  
Cheng Long Kang ◽  
Jin Xiang Deng ◽  
Min Cui ◽  
Chao Man ◽  
Le Kong ◽  
...  
Keyword(s):  
Thin Films ◽  
Electron Microscope ◽  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Rf Magnetron Sputtering ◽  
Reactive Magnetron ◽  
X Ray Diffraction ◽  
X Ray ◽  
Doped Zno ◽  
Scanning Electron

The Al2O3-doped ZnO(AZO) films were deposited on the glasses by means of RF magnetron sputtering technology. The films were characterized by scanning electron microscope (SEM), X-ray diffraction (XRD) and Profile-system respectively. The effect of substrate temperature on the structure of the AZO films is investigated.As a result, the properties of the AZO thin films are remarkably influenced by the substrate temperature , especially in the range of 200°C to 500 °C. The film prepared at the substrate temperature of 400°C possesses the best crystalline.

Mimicking the Formation of Biomineral Composites through Deposition of Calcium Carbonate Thin-Films on Modified Fiber Net Templates

2003 ◽  
Vol 774 ◽  
Author(s):  
Parayil Kumaran Ajikumar ◽  
Rajamani Lakshminarayanan ◽  
Valiyaveettil Suresh
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Electron Microscope ◽  
Calcium Carbonate ◽  
Scanning Electron Microscope ◽  
X Ray Diffraction ◽  
X Ray ◽  
Controlled Deposition ◽  
Scanning Electron

AbstractThin films of calcium carbonate were deposited on the surfaces of synthetic substrates using a simple biomimetic pathway. The Nylon 66 fiber knit pre-adsorbed with acidic polymers was used as a template for the controlled deposition of CaCO3 thin film. The presence of the soluble macromolecules on the fiber knit surface was characterized using ATR-FTIR spectroscopy. The characterization of the mineral films was carried out using scanning electron microscope (SEM), X-ray diffraction (XRD) and energy dispersive Xray scattering (EDX) studies.

Effect of Substrate Temperature on the Structural and Electrochromic Properties of Mo Doped WO3 Thin Films

2014 ◽  
Vol 781 ◽  
pp. 95-106 ◽  
Author(s):  
V. Madhavi ◽  
P. Kondaiah ◽  
S. Uthanna
Keyword(s):  
Thin Films ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Substrate Temperature ◽  
Electrochromic Property ◽  
X Ray Diffraction ◽  
X Ray ◽  
Electrochromic Properties ◽  
Substrate Temperatures ◽  
Scanning Electron

Thin films of Mo (1.3 at.%) doped WO3 films were deposited on glass and ITO coated glass substrates held at substrate temperatures in the range 473 673 K by RF magnetron sputtering technique. The effect of substrate temperature on the structural and morphological, and electrochromic properties of the deposited films were investigated by X-ray diffraction, scanning electron microscope, Raman spectroscope and with electrochemical cell. X-ray diffraction profiles showed that the films formed at substrate temperature of 473 K consisted of weak (020) reflection related to the orthorhombic phase of WO3 in the amorphous matrix. The films formed at substrate temperatures 473 K were of polycrystalline in nature. The crystallite size of the films increased from 12 to 43 nm with increase of substrate temperature from 473 to 673 K. The scanning electron microscope images of the films formed at 473 K showed the leaf like structure with grain size of 1.2 μm. When substrate temperature increased to 573 K the size of the grains enhanced to 2.4 μm. Raman spectra of the films confirmed the presence of characteristic vibration modes of W = O, W - O - W and O - W - O. The optical band gap of the films increased with increase of substrate temperature. The electrochromic property, that is the color efficiency increased from 42.5 to 50.5 cm2/C with the increase of substrate temperature from 473 to 673 K respectively. The structural and electrochromic properties of the Mo doped WO3 films will be correlated with the substrate temperature maintained during growth of the films.

PENGGUNAAN TiO2 PARTIKEL NANO HASIL SINTESIS BERBASIS AIR MENGGUNAKAN METODA SOL-GEL PADA BAHAN KAPAS SEBAGAI APLIKASI UNTUK TEKSTIL ANTI UV

Arena Tekstil ◽  
2013 ◽  
Vol 28 (1) ◽  
Author(s):  
Maya Komalasari ◽  
Bambang Sunendar
Keyword(s):  
Fourier Transform ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Sol Gel ◽  
Crosslinking Agent ◽  
X Ray Diffraction ◽  
Nano Tio2 ◽  
X Ray ◽  
Infra Red ◽  
Scanning Electron

Partikel nano TiO2 berbasis air dengan pH basa telah berhasil disintesis dengan menggunakan metode sol-gel dan diimobilisasi pada kain kapas dengan menggunakan kitosan sebagai zat pengikat silang. Sintesis dilakukan  dengan prekursor TiCl4 pada konsentrasi 0,3 M, 0,5 M dan 1 M, dan menggunakan templat kanji dengan proses kalsinasi pada suhu 500˚C selama 2 jam. Partikel nano TiO2 diaplikasikan ke kain kapas dengan metoda pad-dry-cure dan menggunakan kitosan sebagai crosslinking agent. Berdasarkan hasil Scanning Electron Microscope (SEM),diketahui bahwa morfologi partikel TiO2 berbentuk spherical dengan ukuran nano (kurang dari 100 nm). Karakterisasi X-Ray Diffraction (XRD) menunjukkan adanya tiga tipe struktur kristal utama, yaitu (100), (101) dan (102) dengan fasa kristal yang terbentuk adalah anatase dan rutile. Pada karakterisasi menggunakan SEM terhadap serbuk dari TiO2 yang telah diaplikasikan ke permukaan kain kapas, terlihat adanya imobilisasi partikel nano TiO2 melalui ikatan hidrogen silang dengan kitosan pada kain kapas. Hasil analisa tersebut kemudian dikonfirmasi dengan FTIR (Fourier Transform Infra Red) yang hasilnya memperlihatkan puncak serapan pada bilangan gelombang 3495 cm-1, 2546 cm-1, dan 511 cm-1,  yang masing-masing diasumsikan sebagai adanya vibrasi gugus fungsi O-H, N-H dan Ti-O-Ti. Hasil SEM menunjukkan pula bahwa kristal nano yang terbentuk diantaranya adalah fasa rutile , yang berdasarkan literatur terbukti dapatberfungsi sebagai anti UV.

scholarly journals Reactive Dual Magnetron Sputtering: A Fast Method for Preparing Stoichiometric Microcrystalline ZnWO4 Thin Films

Surfaces ◽  
2021 ◽  
Vol 4 (2) ◽  
pp. 106-114
Author(s):  
Yannick Hermans ◽  
Faraz Mehmood ◽  
Kerstin Lakus-Wollny ◽  
Jan P. Hofmann ◽  
Thomas Mayer ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Photoelectron Spectroscopy ◽  
Fast Method ◽  
X Ray Diffraction ◽  
X Ray ◽  
Glass Substrates ◽  
Post Annealing ◽  
Rf Signal ◽  
First Time

Thin films of ZnWO4, a promising photocatalytic and scintillator material, were deposited for the first time using a reactive dual magnetron sputtering procedure. A ZnO target was operated using an RF signal, and a W target was operated using a DC signal. The power on the ZnO target was changed so that it would match the sputtering rate of the W target operated at 25 W. The effects of the process parameters were characterized using optical spectroscopy, X-ray diffraction, and scanning electron microscopy, including energy dispersive X-ray spectroscopy as well as X-ray photoelectron spectroscopy. It was found that stoichiometric microcrystalline ZnWO4 thin films could be obtained, by operating the ZnO target during the sputtering procedure at a power of 55 W and by post-annealing the resulting thin films for at least 10 h at 600 °C. As FTO coated glass substrates were used, annealing led as well to the incorporation of Na, resulting in n+ doped ZnWO4 thin films.

Effect of the Neodymium Content on Mechanical Properties of the Electro-Brush Plated Nano-Al2O3/Ni Composite Coating

2012 ◽  
Vol 525-526 ◽  
pp. 277-280
Author(s):  
Guo Jin ◽  
Xiu Fang Cui ◽  
Er Bao Liu ◽  
Qing Fen Li
Keyword(s):  
Mechanical Properties ◽  
Rare Earth ◽  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Composite Coating ◽  
Nanoindentation Test ◽  
X Ray Diffraction ◽  
X Ray ◽  
Small Cracks ◽  
Scanning Electron

The effect of the neodymium content on mechanical properties of the electro-brush plated nanoAl2O3/Ni composite coating was investigated in this paper. The microstructure and phase structure were studied with scanning electron microscope (SEM) and X-ray diffraction (XRD). The hardness and abrasion properties of several coatings with different neodymium content were studied by nanoindentation test and friction / wear experiment. Results show that the coatings are much finer and more compact when the neodymium was added, and the hardness and abrasion property of the coatings with neodymium were improved obviously. Besides, the small cracks conduced by the upgrowth stress in the coatings were ameliorated when the rare earth neodymium was added. The improvement mechanism was further discussed.

Effect of Briquetting Pressure on the Performance of In Situ Formed Sialon in Al2O3-C Refractory Bricks

2014 ◽  
Vol 881-883 ◽  
pp. 1049-1052 ◽  
Author(s):  
Nai Peng ◽  
Cheng Ji Deng ◽  
Hong Xi Zhu
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
X Ray Diffraction ◽  
X Ray ◽  
Z Value ◽  
Refractory Bricks ◽  
Scanning Electron

In this paper, the effects of briquetting pressure on the performance of in-situ formed Sialon in Al2O3-C refractory bricks are investigated. The phase compositions and microstructure of the Al2O3-C refractory were investigated by X-ray diffraction (XRD) and scanning electron microscope (SEM).The results show the briquetting pressure hardly has effect on the phase of the sintered specimens, two new phases of Sialon with a Z value of 2 and SiC formed. The micrographs of Sialon crystals have the shape of both column and tabular column, but with a cone tip in the specimens sintered at 200MPa and 300MPa and smooth tip in specimens sintered at 400MPa and 500MPa.

Solvothermal Synthesis of Bi2Se3 Hexagonal Nanosheet Crystals

2011 ◽  
Vol 236-238 ◽  
pp. 1712-1716 ◽  
Author(s):  
Hai Tao Liu ◽  
Jun Dai ◽  
Jia Jia Zhang ◽  
Wei Dong Xiang
Keyword(s):  
Electron Microscope ◽  
Solvothermal Synthesis ◽  
Solvothermal Method ◽  
Raw Materials ◽  
X Ray Diffraction ◽  
Uniform Size ◽  
X Ray ◽  
Selected Area Electron Diffraction ◽  
Transmission Electron ◽  
Scanning Electron

Bismuth selenide (Bi2Se3) hexagonal nanosheet crystals with uniform size were successfully prepared via a solvothermal method at 160°C for 22 h using bismuth trichloride(BiCl3) and selenium powder(Se) as raw materials, sodium bisulfite(NaHSO3) as a reducing agent, diethylene glycol(DEG) as solvent, and ammonia as pH regulator. Various techniques such as X-ray diffraction (XRD), field-emission scanning electron microscope (FESEM), high-resolution transmission electron microscope (HRTEM), and selected area electron diffraction (SAED) were used to characterize the obtained products. Results show that the as-synthesized samples are pure Bi2Se3 hexagonal nanosheet crystals. A possible growth mechanism for Bi2Se3 hexagonal nanosheet crystals is also discussed based on the experiment.

Substrate Temperature and La0.9Sr0.1Ga0.8Mg0.2O3-δ Electrolyte Film Growth by Radio Frequency Magnetron Sputtering

2015 ◽  
Vol 833 ◽  
pp. 127-133
Author(s):  
Jie Yu ◽  
Jie Xing ◽  
Xiu Hua Chen ◽  
Wen Hui Ma ◽  
Rui Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Radio Frequency ◽  
Film Growth ◽  
Rf Magnetron Sputtering ◽  
X Ray Diffraction ◽  
X Ray ◽  
Electrolyte Film ◽  
Porous Anode

La0.9Sr0.1Ga0.8Mg0.2O3-δ (LSGM) electrolyte thin films were fabricated on La0.7Sr0.3Cr0.5Mn0.5O2.75 (LSCM) porous anode substrates by Radio Frequency (RF) magnetron sputtering method. The compatibility between LSGM and LSCM was examined. Microstructures of LSGM thin films fabricated were observed by scanning electron microscope (SEM). The effect of substrate temperature on LSGM thin films was clarified by X-ray Diffraction (XRD). Deposition rate increases firstly at the range of 50°C~150°C, and then decreases at the range of 150°C ~300°C. After annealing, perovskite structure with the same growth orientation forms at different substrate temperature. Crystallite size decreases at first, to the minimum point at 150°C, then increases as substrate temperature rises.

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