TCAD Model Calibration of High Voltage 4H-SiC Bipolar Junction Transistors
Keyword(s):
In this project, a Technology CAD (TCAD) model has been calibrated and verified against experimental data of a 15 kV silicon carbide (SiC) bipolar junction transistor (BJT). The device structure of the high voltage BJT has been implemented in the Synopsys Sentaurus TCAD simulation platform and design of experiment simulations have been performed to extract and fine-tune device parameters and 4H-SiC material parameters to accurately reflect the 15 kV SiC BJT experimental results. The set of calibrated TCAD parameters may serve as a base for further investigations of various SiC device design and device operation in electrical circuits.
1991 ◽
Vol 62
(4)
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pp. 1031-1036
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Keyword(s):
2015 ◽
Vol 1083
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pp. 185-189
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2004 ◽
Vol 48
(3)
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pp. 491-493
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2021 ◽
2021 ◽
2005 ◽
Vol 483-485
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pp. 901-904
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1981 ◽
Vol 18
(3)
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pp. 257-265