1000 V, 30 A SiC Bipolar Junction Transistors and Integrated Darlington Pairs

2005 ◽  
Vol 483-485 ◽  
pp. 901-904 ◽  
Author(s):  
Sumi Krishnaswami ◽  
Anant K. Agarwal ◽  
Craig Capell ◽  
Jim Richmond ◽  
Sei Hyung Ryu ◽  
...  

1000 V Bipolar Junction Transistor and integrated Darlington pairs with high current gain have been developed in 4H-SiC. The 3.38 mm x 3.38 mm BJT devices with an active area of 3 mm x 3 mm showed a forward on-current of 30 A, which corresponds to a current density of 333 A/cm2, at a forward voltage drop of 2 V. A common-emitter current gain of 40 was measured on these devices. A specific on-resistance of 6.0 mW-cm2 was observed at room temperature. The onresistance increases at higher temperatures, while the current gain decreases to 30 at 275°C. In addition, an integrated Darlington pair with an active area of 3 mm x 3 mm showed a collector current of 30 A at a forward drop of 4 V at room temperature. A current gain of 2400 was measured on these devices. A BVCEO of 1000 V was measured on both of these devices.

2010 ◽  
Vol 645-648 ◽  
pp. 1025-1028 ◽  
Author(s):  
Qing Chun Jon Zhang ◽  
Robert Callanan ◽  
Anant K. Agarwal ◽  
Albert A. Burk ◽  
Michael J. O'Loughlin ◽  
...  

4H-SiC Bipolar Junction Transistors (BJTs) and hybrid Darlington Transistors with 10 kV/10 A capability have been demonstrated for the first time. The SiC BJT (chip size: 0.75 cm2 with an active area of 0.336 cm2) conducts a collector current of 10 A (~ 30 A/cm2) with a forward voltage drop of 4.0 V (forced current gain βforced: 20) corresponding to a specific on-resistance of ~ 130 mΩ•cm2 at 25°C. The DC current gain, β, at a collector voltage of 15 V is measured to be 28 at a base current of 1 A. Both open emitter breakdown voltage (BVCBO) and open base breakdown voltage (BVCEO) of ~10 kV have been achieved. The 10 kV SiC Darlington transistor pair consists of a 10 A SiC BJT as the output device and a 1 A SiC BJT as the driver. The forward voltage drop of 4.5 V is measured at 10 A of collector current. The DC forced current gain at the collector voltage of 5.0 V was measured to be 440 at room temperature.


2006 ◽  
Vol 527-529 ◽  
pp. 1417-1420 ◽  
Author(s):  
Jian Hui Zhang ◽  
Jian Wu ◽  
Petre Alexandrov ◽  
Terry Burke ◽  
Kuang Sheng ◽  
...  

This paper reports recent progress in the development of high power 4H-SiC BJTs based on an improved device design and fabrication scheme. Near theoretical limit high blocking voltage of VCEO=1,836 V has been achieved for 4H-SiC BJTs based on a drift layer of only 12 μm, doped to 6.7x1015 cm-3. The collector current measured for a single cell BJT with an active area of 0.61 mm2 is up to IC=9.87 A (JC=1618 A/cm2). The collector current is 7.64 A (JC=1252 A/cm2) at VCE=5.9 V in the saturation region, corresponding to an absolute specific on-resistance (RSP_ON) of 4.7 m9·cm2. From VCE=2.4 V to VCE= 5.8 V, the BJT has a differential RSP_ON of only 3.9 m9·cm2. The current gain is about 8.8 at Ic=5.3 A (869 A/cm2). This 4H-SiC BJT shows a V2/RSP_ON of 717 MW/cm2, which is the highest value reported to date for high-voltage and high-current 4H-SiC BJTs. A verylarge area 4H-SiC BJT with an active area of 11.3 mm2 is also demonstrated.


2020 ◽  
Vol 1004 ◽  
pp. 923-932
Author(s):  
Besar Asllani ◽  
Pascal Bevilacqua ◽  
Hervé Morel ◽  
Dominique Planson ◽  
Luong Viet Phung ◽  
...  

This paper reports the device design, fabrication and characterisation of 10 kV-class Bipolar Junction Transistor (BJT). Manufactured devices have been packaged in single BJT, two paralleled BJTs and Darlington configurations. The static and switching characteristics of the resulting devices have been measured. The BJTs (2.4mm² active area) show a specific on-resistance as low as 198 mΩ·cm² at 100 A/cm² and room temperature for a βMax of 9.6, whereas the same active area Darlington beats the unipolar limit with a specific on-resistance of 102 mΩ·cm² at 200 A/cm² (β=11) for a βMax of 69. Double pulse tests reveal state of the art switching with very sharp dV/dt and di/dt. Turn-on is operated at less than 100 ns for an EON lower than 4mJ, whereas the turn-off takes longer times due to tail current resulting in EOFF of 17.2 mJ and 50 mJ for the single BJT and Darlington respectively when operated at high current density. Excellent parallelisation have been achieved.


2013 ◽  
Vol 740-742 ◽  
pp. 970-973
Author(s):  
M. Domeij ◽  
A. Konstantinov ◽  
B. Buono ◽  
M. Bast ◽  
R. Eisele ◽  
...  

Epoxy moulded power modules with a small footprint of 40 mm x 55 mm were fabricated with two switches, each consisting of six parallel 1200 V 50 A rated BJTs and Schottky diodes. The SiC-based power modules have very low on-resistance of 3.3 mΩ and a current gain of 80, both at room temperature. An inverter with specially designed drive circuits was constructed using the power modules and an efficiency of 98.5 % was shown for an output power of 12 kW.


2008 ◽  
Vol 600-603 ◽  
pp. 1151-1154 ◽  
Author(s):  
Hyung Seok Lee ◽  
Martin Domeij ◽  
Carl Mikael Zetterling ◽  
Reza Ghandi ◽  
Mikael Östling ◽  
...  

This paper reports a 4H-SiC bipolar junction transistor (BJT) with a breakdown voltage (BVCEO) of 1200 V, a maximum current gain (β) of 60 and the low on-resistance (Rsp_on)of 5.2 mΩcm2. The high gain is attributed to an improved surface passivation SiO2 layer which was grown in N2O ambient in a diffusion furnace. The SiC BJTs with passivation oxide grown in N2O ambient show less emitter size dependence than reference SiC BJTs, with conventional SiO2 passivation, due to a reduced surface recombination current. SiC BJT devices with an active area of 1.8 mm × 1.8 mm showed a current gain of 53 in pulsed mode and a forward voltage drop of VCE=2V at IC=15 A (JC=460 A/cm2).


2012 ◽  
Vol 717-720 ◽  
pp. 1059-1064 ◽  
Author(s):  
Sei Hyung Ryu ◽  
Lin Cheng ◽  
Sarit Dhar ◽  
Craig Capell ◽  
Charlotte Jonas ◽  
...  

We present our recent developments in 4H-SiC power DMOSFETs. 4H-SiC DMOSFETs with a room temperature specific on-resistance of 3.7 mΩ-cm2 with a gate bias of 20 V, and an avalanche voltage of 1550 V with gate shorted to source, was demonstrated. A threshold voltage of 3.5 V was extracted from the power DMOSFET, and a subthreshold swing of 200 mV/dec was measured. The device was successfully scaled to an active area of 0.4 cm2, and the resulting device showed a drain current of 377 A at a forward voltage drop of 3.8 V at 25oC.


2008 ◽  
Vol 600-603 ◽  
pp. 1155-1158 ◽  
Author(s):  
Jian Hui Zhang ◽  
Petre Alexandrov ◽  
Jian Hui Zhao

This paper reports a newly achieved best result on the common emitter current gain of 4H-SiC high power bipolar junction transistors (BJTs). A fabricated 1600 V – 15 A 4H-SiC power BJT with an active area of 1.7 mm2 shows a high DC current gain (b) of 70, when it conducts 9.8 A collector current at a base current of only 140 mA. The maximum AC current gain (DIC/DIB) is up to 78. This high performance BJT has an open base collector-to-emitter blocking voltage (VCEO) of over 1674 V with a leakage current of 1.6 μA, and a specific on-resistance (RSP-ON) of 5.1 mW.cm2 when it conducts 7.0 A (412 A/cm2) at a forward voltage drop of VCE = 2.1 V. A large area 4H-SiC BJT with a footprint of 4.1 mm x 4.1 mm has also shown a DC current gain over 50. These high-gain, high-voltage and high-current 4H-SiC BJTs further support a promising future for 4H-SiC BJT applications.


2007 ◽  
Vol 556-557 ◽  
pp. 767-770 ◽  
Author(s):  
Hyung Seok Lee ◽  
Martin Domeij ◽  
Carl Mikael Zetterling ◽  
Mikael Östling

4H-SiC BJTs have been fabricated with varying geometrical designs. The maximum value of the current gain was about 30 at IC=85 mA, VCE=14 V and room temperature (RT) for a 20 μm emitter width structure. A collector-emitter voltage drop VCE of 2 V at a forward collector current 55 mA (JC = 128 A/cm2) was obtained and a specific on-resistance of 15.4 m2·cm2 was extracted at RT. Optimum emitter finger widths and base-contact implant distances were derived from measurement. The temperature dependent DC I-V characteristics of the BJTs have been studied resulting in 45 % reduction of the gain and 75 % increase of the on-resistance at 225 oC compared to RT. Forward-bias stress on SiC BJTs was investigated and about 20 % reduction of the initial current gain was found after 27.5 hours. Resistive switching measurements with packaged SiC BJTs were performed showing a resistive fast turn-on with a VCE fall-time of 90 ns. The results indicate that significantly faster switching can be obtained by actively controlling the base current.


2019 ◽  
Vol 963 ◽  
pp. 651-654 ◽  
Author(s):  
Sei Hyung Ryu ◽  
Daniel J. Lichtenwalner ◽  
Michael O’Loughlin ◽  
Craig Capell ◽  
Jim Richmond ◽  
...  

High performance 15 kV n-GTOs were demonstrated for the first time in 4H-SiC. The device utilized a 140 μm thick, lightly doped n-type drift layer, with 1450°C lifetime enhancement oxidation, which resulted in a carrier lifetime of 17.5 μs. The p+ backside injector layer was thinned to minimize parasitic resistances. A room temperature forward voltage drop of 5.18 V was observed at a current density of 100A/cm2. A 1 cm2 device showed a leakage current of 0.17 μA at 15 kV. The 4H-SiC n-GTO showed latching characteristics, and showed a turn-off time of 170 ns in a resistive load switching setup, which represents about a factor of 45 improvement in turn-off speed over 4H-SiC p-GTOs with comparable voltage and current ratings.


2018 ◽  
Vol 924 ◽  
pp. 629-632 ◽  
Author(s):  
Satoshi Asada ◽  
Jun Suda ◽  
Tsunenobu Kimoto

Effects of a parasitic region in SiC BJTs on conductivity modulation and a forced current gain (βF) were investigated by using TCAD simulation with various device structures. By introducing an Al+-implanted region below the base parasitic region, βF can be improved because the implanted region can reduce the base spreading resistance, leading to alleviation of debiasing effect. βF in devices with various parasitic areas, whose base spreading resistances were reduced by the Al+-implantation, were compared. We found that βF can be enhanced by expanding the parasitic area if the base spreading resistance is sufficiently reduced. The higher βF is attributed to an expanded conductivity-modulated region. The collector current spreading in the collector layer and the hole injection from the parasitic region as well as from the intrinsic region can play a role to evoke the conductivity modulation. Thus, the larger parasitic region can expand the conductivity-modulated region, resulting in expansion of an active area and the enhancement of βF.


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