The variations in composition and bonding configuration of SiNx film under high annealing temperature treatment
2021 ◽
Vol 1016
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pp. 1636-1641
2019 ◽
Vol 30
(5)
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pp. 1821-1828
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2006 ◽
Vol 118
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pp. 31-34
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2007 ◽
Vol 115
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Keyword(s):
1996 ◽
pp. 473-490
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