Evaluation of PECVD a-SiC:H as a Cu Diffusion Barrier Layer of Cu Dual Damascene Process

2000 ◽  
Author(s):  
Soo Gun Lee ◽  
Hyeok-Sang Oh ◽  
Hong-Jae Shin ◽  
Jin-Gi Hong ◽  
Hyeon-Deok Lee ◽  
...  
Keyword(s):  
Barrier Layer ◽  
Diffusion Barrier ◽  
Dual Damascene ◽  
Damascene Process ◽  
Diffusion Barrier Layer ◽  
Cu Diffusion Barrier

Low Dielectric Constant 3MS α-SiC:H as Cu Diffusion Barrier Layer in Cu Dual Damascene Process

2001 ◽  
Vol 40 (Part 1, No. 4B) ◽  
pp. 2663-2668 ◽  
Author(s):  
Soo Geun Lee ◽  
Yun Jun Kim ◽  
Seung Pae Lee ◽  
Hyeok-Sang Oh ◽  
Seung Jae Lee ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Barrier Layer ◽  
Diffusion Barrier ◽  
Low Dielectric Constant ◽  
Dual Damascene ◽  
Low Dielectric ◽  
Damascene Process ◽  
Diffusion Barrier Layer ◽  
Cu Diffusion Barrier

Creep Deformation / Oxidation Behavior of Re-Cr-Ni Diffusion Barrier Coated Hastelloy-X at 970°C in Air

2008 ◽  
Vol 595-598 ◽  
pp. 107-116 ◽  
Author(s):  
Shigenari Hayashi ◽  
Mikihiro Sakata ◽  
Shigeharu Ukai ◽  
Toshio Narita
Keyword(s):  
Grain Size ◽  
Grain Boundary ◽  
Barrier Layer ◽  
Creep Deformation ◽  
Diffusion Barrier ◽  
Hastelloy X ◽  
Alloy Substrate ◽  
Barrier Coating ◽  
Diffusion Barrier Layer ◽  
Coated Alloy

High temperature oxidation / creep deformation behavior of a diffusion barrier coated Hastelloy-X alloy, with large grain size ~500μm, was investigated at 970°C in air with external tensile stress of 22.5, 27.5, 32, and 40MPa. The diffusion barrier coating formed on Hastelloy-X consisted of a duplex structure with an inner diffusion barrier layer of Re-Cr-Ni alloy, and an outer oxidation resistant layer of β-NiAl. Un coated bare Hastelloy-X alloy with same grain size was also examined under the same conditions for comparison. The composition of the as-coated diffusion barrier coating was (15~21)Ni, (33~37)Cr, (30~33)Re, (11~15)Mo, and (9~14)Fe. This composition corresponds to σ-phase in the Ni-Cr-Re ternary system, which is known as a topologically close packed, TCP phase. The composition of this diffusion barrier layer did not change during the experiment. The oxide scales formed after creep testing on the coated and un-coated alloy surfaces were needle-like θ-Al2O3, and Cr2O3 with small amount of FeCr2O4, respectively. Grain boundary oxidation was also found in the subsurface region of the un-coated alloy. The Al2O3 scale exhibited severe spallation, and many cracks were formed perpendicular to the stress direction. However, no spallation or cracks were observed in the Cr2O3. The creep rupture times for the diffusion barrier coated alloy were about 1.5 times longer than those for bare alloy at all creep stress conditions. The fracture surface after rupture indicates that fracture occurred along alloy grain boundaries in both the coated and un-coated alloy substrate. Many cavities and cracks were observed within the diffusion barrier coated alloy substrate. These cavities and cracks tended to propagate from the substrate toward the diffusion barrier layer, and then stopped at the Re-Cr-Ni / β-NiAl interface. Cracks formed in the un-coated alloy initiated at the tip of grain boundary oxides, and propagated into alloy substrate. However no major cavities were observed inside the alloy substrate. The stress index, n, for both specimens was about 6, and this indicates that the deformation mechanism of both samples was dislocation creep. These results suggest that the Re-Cr-Ni diffusion barrier layer acts as a barrier against the movement of dislocations at the interface with the alloy surface.

Influence of crystallinity on the oxidation resistance of Ni–Al film used as diffusion barrier layer

2009 ◽  
Vol 42 (6) ◽  
pp. 065419 ◽  
Author(s):  
B T Liu ◽  
X B Yan ◽  
Y N Guo ◽  
C S Cheng ◽  
F Li ◽  
...  
Keyword(s):  
Oxidation Resistance ◽  
Barrier Layer ◽  
Diffusion Barrier ◽  
Diffusion Barrier Layer

scholarly journals Multi-scale analysis of the diffusion barrier layer of gadolinia-doped ceria in a solid oxide fuel cell operated in a stack for 3000 h

2017 ◽  
Vol 344 ◽  
pp. 141-151 ◽  
Author(s):  
M. Morales ◽  
V. Miguel-Pérez ◽  
A. Tarancón ◽  
A. Slodczyk ◽  
M. Torrell ◽  
...  
Keyword(s):  
Fuel Cell ◽  
Barrier Layer ◽  
Diffusion Barrier ◽  
Solid Oxide ◽  
Doped Ceria ◽  
Oxide Fuel ◽  
Scale Analysis ◽  
Multi Scale ◽  
Diffusion Barrier Layer ◽  
Multi Scale Analysis

scholarly journals Diffusion Barrier Layer For High-temperature Protective Coatings

2016 ◽  
Vol 2016 (4) ◽  
pp. 36-44 ◽  
Author(s):  
K.Yu. Yakovchuk ◽  
◽  
A.V. Mikitchik ◽  
Yu.E. Rudoy ◽  
A.O. Akhtyrsky ◽  
...  
Keyword(s):  
High Temperature ◽  
Barrier Layer ◽  
Diffusion Barrier ◽  
Protective Coatings ◽  
Diffusion Barrier Layer

Effect of the Electroless Nickel, Electroless Palladium, and Immersion Gold Multilayer as a Diffusion Barrier on the Bonding Strength of BiTe-Based Thermoelectric Modules

2021 ◽  
Vol 21 (8) ◽  
pp. 4498-4502
Author(s):  
Yen Ngoc Nguyen ◽  
Khanh Quoc Dang ◽  
Injoon Son
Keyword(s):  
Intermetallic Compounds ◽  
Electrochemical Deposition ◽  
Barrier Layer ◽  
Diffusion Barrier ◽  
Bonding Strength ◽  
Effective Diffusion ◽  
Electroless Nickel ◽  
Thermoelectric Modules ◽  
Diffusion Barrier Layer ◽  
Plating Layer

An effective diffusion barrier layer was coated onto the surface of BiTe-based materials to avoid the formation of brittle intermetallic compounds (IMCs) by the diffusion of the constituents of Sn-based solder alloys into the BiTe-based alloys. In this study, the electrochemical deposition of multi-layers, i.e., electroless nickel/electroless palladium/immersion gold (ENEPIG) was explored to enhance the bonding strength of BiTe materials with Cu electrodes. The thermoelectric modules with the ENEPIG plating layer exhibited high bonding strengths of 8.96 MPa and 7.28 MPa for the n- and p-type, respectively that increased slightly to 9.26 MPa and 7.76 MPa, respectively after the thermoelectric modules were heated at 200 °C for 200 h. These bonding strengths were significantly higher than that of the thermoelectric modules without a plating layer.

High efficiency CIGS solar cells on flexible stainless steel substrate with SiO2 diffusion barrier layer

Solar Energy ◽  
2021 ◽  
Vol 230 ◽  
pp. 1033-1039
Author(s):  
Chen Zhang ◽  
Tongqing Qi ◽  
Wei Wang ◽  
Chenchen Zhao ◽  
Shuda Xu ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Solar Cells ◽  
Barrier Layer ◽  
Diffusion Barrier ◽  
High Efficiency ◽  
Stainless Steel Substrate ◽  
Steel Substrate ◽  
Diffusion Barrier Layer ◽  
Cigs Solar Cells
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