Leakage Current Control of SrTiO
3
Thin Films through Al Doping at the Interface between Dielectric and Electrode Layers via Atomic Layer Deposition
2019 ◽
Vol 13
(11)
◽
pp. 1900373
Keyword(s):
2011 ◽
Vol 115
(25)
◽
pp. 12317-12321
◽
Keyword(s):
Keyword(s):
2015 ◽
Vol 764-765
◽
pp. 138-142
◽
Keyword(s):
Keyword(s):