High-temperature diffusion barriers from Si-rich silicon-nitride
2006 ◽
Vol 38
(12-13)
◽
pp. 1687-1691
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1988 ◽
Vol 19
(9)
◽
pp. 2163-2170
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2004 ◽
Vol 188-189
◽
pp. 153-157
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1977 ◽
Vol 35
◽
pp. 114-115
1991 ◽
Vol 49
◽
pp. 930-931
1991 ◽
Vol 49
◽
pp. 926-927
1990 ◽
Vol 48
(4)
◽
pp. 664-665
Keyword(s):
2017 ◽
Vol 43
(6)
◽
pp. 5080-5088
◽
Keyword(s):
Keyword(s):
1992 ◽
Vol 33
(7)
◽
pp. 659-668
◽
Keyword(s):